10/24/2011	7:47:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/24/2011	7:47:49 AM	Recipe started at 7:47 AM
10/24/2011	7:47:49 AM	Helium valve closed
10/24/2011	7:47:49 AM	H2 valve closed
10/24/2011	7:47:49 AM	BCl3 valve closed
10/24/2011	7:47:49 AM	PH3 valve closed
10/24/2011	7:47:49 AM	SiCl4 pre valve closed
10/24/2011	7:47:49 AM	SiCl4 post valve closed
10/24/2011	7:47:49 AM	Main Vac valve closed
10/24/2011	7:47:49 AM	Bypass valve closed
10/24/2011	7:47:49 AM	Bubbler valve closed
10/24/2011	7:47:49 AM	Helium MFC set to  0.000000
10/24/2011	7:47:49 AM	H2 MFC set to  0.000000
10/24/2011	7:47:49 AM	BCl3 MFC set to  0.000000
10/24/2011	7:47:49 AM	PHl3 MFC set to  0.000000
10/24/2011	7:47:49 AM	SiCl4 MFC set to  0.000000
10/24/2011	7:47:49 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:47:49 AM	Tube furnace set to 0
10/24/2011	7:47:52 AM	H2 valve closed
10/24/2011	7:47:52 AM	BCl3 valve closed
10/24/2011	7:47:52 AM	PH3 valve closed
10/24/2011	7:47:52 AM	SiCl4 pre valve closed
10/24/2011	7:47:52 AM	SiCl4 post valve closed
10/24/2011	7:47:52 AM	Main Vac valve closed
10/24/2011	7:47:52 AM	Bypass valve closed
10/24/2011	7:47:52 AM	Bubbler valve closed
10/24/2011	7:47:52 AM	Helium valve opened
10/24/2011	7:47:52 AM	Helium MFC set to  500.000000
10/24/2011	7:47:52 AM	H2 MFC set to  0.000000
10/24/2011	7:47:52 AM	BCl3 MFC set to  0.000000
10/24/2011	7:47:52 AM	PHl3 MFC set to  0.000000
10/24/2011	7:47:52 AM	SiCl4 MFC set to  0.000000
10/24/2011	7:47:52 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:47:52 AM	Tube furnace set to 0
10/24/2011	7:48:39 AM	Helium valve closed
10/24/2011	7:48:39 AM	H2 valve closed
10/24/2011	7:48:39 AM	BCl3 valve closed
10/24/2011	7:48:39 AM	PH3 valve closed
10/24/2011	7:48:39 AM	SiCl4 pre valve closed
10/24/2011	7:48:39 AM	SiCl4 post valve closed
10/24/2011	7:48:39 AM	Main Vac valve closed
10/24/2011	7:48:39 AM	Bypass valve closed
10/24/2011	7:48:39 AM	Bubbler valve closed
10/24/2011	7:48:39 AM	Helium MFC set to  0.000000
10/24/2011	7:48:39 AM	H2 MFC set to  0.000000
10/24/2011	7:48:39 AM	BCl3 MFC set to  0.000000
10/24/2011	7:48:39 AM	PHl3 MFC set to  0.000000
10/24/2011	7:48:39 AM	SiCl4 MFC set to  0.000000
10/24/2011	7:48:39 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:48:39 AM	Tube furnace set to 0
10/24/2011	7:48:40 AM	Run finished at 7:48 AM
10/24/2011	7:48:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/24/2011	7:56:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	7:56:38 AM	Recipe started at 7:56 AM
10/24/2011	7:56:38 AM	Helium valve closed
10/24/2011	7:56:38 AM	H2 valve closed
10/24/2011	7:56:38 AM	BCl3 valve closed
10/24/2011	7:56:38 AM	PH3 valve closed
10/24/2011	7:56:38 AM	SiCl4 pre valve closed
10/24/2011	7:56:38 AM	SiCl4 post valve closed
10/24/2011	7:56:38 AM	Main Vac valve closed
10/24/2011	7:56:38 AM	Bubbler valve closed
10/24/2011	7:56:38 AM	Bypass valve opened
10/24/2011	7:56:38 AM	Helium MFC set to  0.000000
10/24/2011	7:56:38 AM	H2 MFC set to  0.000000
10/24/2011	7:56:38 AM	BCl3 MFC set to  0.000000
10/24/2011	7:56:38 AM	PHl3 MFC set to  0.000000
10/24/2011	7:56:38 AM	SiCl4 MFC set to  0.000000
10/24/2011	7:56:38 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:56:38 AM	Tube furnace set to 0
10/24/2011	7:57:14 AM	Run aborted at 7:57 AM
10/24/2011	7:57:14 AM	Helium valve closed
10/24/2011	7:57:14 AM	H2 valve closed
10/24/2011	7:57:14 AM	BCl3 valve closed
10/24/2011	7:57:14 AM	PH3 valve closed
10/24/2011	7:57:14 AM	SiCl4 pre valve closed
10/24/2011	7:57:14 AM	SiCl4 post valve closed
10/24/2011	7:57:14 AM	Bypass valve closed
10/24/2011	7:57:14 AM	Main Vac valve closed
10/24/2011	7:57:14 AM	Bubbler valve closed
10/24/2011	7:57:14 AM	Helium MFC set to  0.000000
10/24/2011	7:57:14 AM	H2 MFC set to  0.000000
10/24/2011	7:57:14 AM	BCl3 MFC set to  0.000000
10/24/2011	7:57:14 AM	PHl3 MFC set to  0.000000
10/24/2011	7:57:14 AM	SiCl4 MFC set to  0.000000
10/24/2011	7:57:14 AM	Tube furnace set to 0
10/24/2011	7:57:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	7:57:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/24/2011	7:57:17 AM	Recipe started at 7:57 AM
10/24/2011	7:57:17 AM	Helium valve closed
10/24/2011	7:57:17 AM	H2 valve closed
10/24/2011	7:57:17 AM	BCl3 valve closed
10/24/2011	7:57:17 AM	PH3 valve closed
10/24/2011	7:57:17 AM	SiCl4 pre valve closed
10/24/2011	7:57:17 AM	SiCl4 post valve closed
10/24/2011	7:57:17 AM	Main Vac valve closed
10/24/2011	7:57:18 AM	Bypass valve closed
10/24/2011	7:57:18 AM	Bubbler valve closed
10/24/2011	7:57:18 AM	Helium MFC set to  0.000000
10/24/2011	7:57:18 AM	H2 MFC set to  0.000000
10/24/2011	7:57:18 AM	BCl3 MFC set to  0.000000
10/24/2011	7:57:18 AM	PHl3 MFC set to  0.000000
10/24/2011	7:57:18 AM	SiCl4 MFC set to  0.000000
10/24/2011	7:57:18 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:57:18 AM	Tube furnace set to 0
10/24/2011	7:57:21 AM	H2 valve closed
10/24/2011	7:57:21 AM	BCl3 valve closed
10/24/2011	7:57:21 AM	PH3 valve closed
10/24/2011	7:57:21 AM	SiCl4 pre valve closed
10/24/2011	7:57:21 AM	SiCl4 post valve closed
10/24/2011	7:57:21 AM	Main Vac valve closed
10/24/2011	7:57:21 AM	Bypass valve closed
10/24/2011	7:57:21 AM	Bubbler valve closed
10/24/2011	7:57:21 AM	Helium valve opened
10/24/2011	7:57:21 AM	Helium MFC set to  500.000000
10/24/2011	7:57:21 AM	H2 MFC set to  0.000000
10/24/2011	7:57:21 AM	BCl3 MFC set to  0.000000
10/24/2011	7:57:21 AM	PHl3 MFC set to  0.000000
10/24/2011	7:57:21 AM	SiCl4 MFC set to  0.000000
10/24/2011	7:57:21 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:57:21 AM	Tube furnace set to 0
10/24/2011	7:57:21 AM	Helium valve closed
10/24/2011	7:57:21 AM	H2 valve closed
10/24/2011	7:57:21 AM	BCl3 valve closed
10/24/2011	7:57:21 AM	PH3 valve closed
10/24/2011	7:57:21 AM	SiCl4 pre valve closed
10/24/2011	7:57:21 AM	SiCl4 post valve closed
10/24/2011	7:57:21 AM	Main Vac valve closed
10/24/2011	7:57:21 AM	Bypass valve closed
10/24/2011	7:57:21 AM	Bubbler valve closed
10/24/2011	7:57:21 AM	Helium MFC set to  0.000000
10/24/2011	7:57:21 AM	H2 MFC set to  0.000000
10/24/2011	7:57:21 AM	BCl3 MFC set to  0.000000
10/24/2011	7:57:21 AM	PHl3 MFC set to  0.000000
10/24/2011	7:57:21 AM	SiCl4 MFC set to  0.000000
10/24/2011	7:57:21 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:57:21 AM	Tube furnace set to 0
10/24/2011	7:57:22 AM	Run finished at 7:57 AM
10/24/2011	7:57:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/24/2011	7:57:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	7:57:40 AM	Recipe started at 7:57 AM
10/24/2011	7:57:40 AM	Helium valve closed
10/24/2011	7:57:40 AM	H2 valve closed
10/24/2011	7:57:40 AM	BCl3 valve closed
10/24/2011	7:57:40 AM	PH3 valve closed
10/24/2011	7:57:40 AM	SiCl4 pre valve closed
10/24/2011	7:57:40 AM	SiCl4 post valve closed
10/24/2011	7:57:40 AM	Main Vac valve closed
10/24/2011	7:57:40 AM	Bubbler valve closed
10/24/2011	7:57:40 AM	Bypass valve opened
10/24/2011	7:57:40 AM	Helium MFC set to  0.000000
10/24/2011	7:57:40 AM	H2 MFC set to  0.000000
10/24/2011	7:57:40 AM	BCl3 MFC set to  0.000000
10/24/2011	7:57:40 AM	PHl3 MFC set to  0.000000
10/24/2011	7:57:40 AM	SiCl4 MFC set to  0.000000
10/24/2011	7:57:40 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:57:40 AM	Tube furnace set to 0
10/24/2011	7:58:22 AM	Run aborted at 7:58 AM
10/24/2011	7:58:22 AM	Helium valve closed
10/24/2011	7:58:22 AM	H2 valve closed
10/24/2011	7:58:22 AM	BCl3 valve closed
10/24/2011	7:58:22 AM	PH3 valve closed
10/24/2011	7:58:22 AM	SiCl4 pre valve closed
10/24/2011	7:58:22 AM	SiCl4 post valve closed
10/24/2011	7:58:22 AM	Bypass valve closed
10/24/2011	7:58:22 AM	Main Vac valve closed
10/24/2011	7:58:22 AM	Bubbler valve closed
10/24/2011	7:58:22 AM	Helium MFC set to  0.000000
10/24/2011	7:58:22 AM	H2 MFC set to  0.000000
10/24/2011	7:58:22 AM	BCl3 MFC set to  0.000000
10/24/2011	7:58:22 AM	PHl3 MFC set to  0.000000
10/24/2011	7:58:22 AM	SiCl4 MFC set to  0.000000
10/24/2011	7:58:22 AM	Tube furnace set to 0
10/24/2011	7:58:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	7:59:04 AM	Program started after a nonstandard shutdown
10/24/2011	7:59:04 AM	Helium valve closed
10/24/2011	7:59:04 AM	H2 valve closed
10/24/2011	7:59:04 AM	BCl3 valve closed
10/24/2011	7:59:04 AM	PH3 valve closed
10/24/2011	7:59:04 AM	SiCl4 pre valve closed
10/24/2011	7:59:04 AM	SiCl4 post valve closed
10/24/2011	7:59:04 AM	Main Vac valve closed
10/24/2011	7:59:04 AM	Bypass valve closed
10/24/2011	7:59:04 AM	Bubbler valve closed
10/24/2011	7:59:04 AM	Helium MFC set to  0.000000
10/24/2011	7:59:04 AM	H2 MFC set to  0.000000
10/24/2011	7:59:04 AM	BCl3 MFC set to  0.000000
10/24/2011	7:59:04 AM	PHl3 MFC set to  0.000000
10/24/2011	7:59:04 AM	SiCl4 MFC set to  0.000000
10/24/2011	7:59:04 AM	Bypass solenoid MFC set to  760.000000
10/24/2011	7:59:04 AM	Tube furnace set to 0
10/24/2011	7:59:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	7:59:15 AM	Recipe started at 7:59 AM
10/24/2011	7:59:15 AM	Helium valve closed
10/24/2011	7:59:15 AM	H2 valve closed
10/24/2011	7:59:15 AM	BCl3 valve closed
10/24/2011	7:59:15 AM	PH3 valve closed
10/24/2011	7:59:15 AM	SiCl4 pre valve closed
10/24/2011	7:59:15 AM	SiCl4 post valve closed
10/24/2011	7:59:15 AM	Main Vac valve closed
10/24/2011	7:59:15 AM	Bubbler valve closed
10/24/2011	7:59:15 AM	Bypass valve opened
10/24/2011	7:59:15 AM	Helium MFC set to  0.000000
10/24/2011	7:59:15 AM	H2 MFC set to  0.000000
10/24/2011	7:59:15 AM	BCl3 MFC set to  0.000000
10/24/2011	7:59:15 AM	PHl3 MFC set to  0.000000
10/24/2011	7:59:15 AM	SiCl4 MFC set to  0.000000
10/24/2011	7:59:15 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:59:15 AM	Tube furnace set to 0
10/24/2011	7:59:39 AM	Run aborted at 7:59 AM
10/24/2011	7:59:39 AM	Helium valve closed
10/24/2011	7:59:39 AM	H2 valve closed
10/24/2011	7:59:39 AM	BCl3 valve closed
10/24/2011	7:59:39 AM	PH3 valve closed
10/24/2011	7:59:39 AM	SiCl4 pre valve closed
10/24/2011	7:59:39 AM	SiCl4 post valve closed
10/24/2011	7:59:39 AM	Bypass valve closed
10/24/2011	7:59:39 AM	Main Vac valve closed
10/24/2011	7:59:39 AM	Bubbler valve closed
10/24/2011	7:59:39 AM	Helium MFC set to  0.000000
10/24/2011	7:59:39 AM	H2 MFC set to  0.000000
10/24/2011	7:59:39 AM	BCl3 MFC set to  0.000000
10/24/2011	7:59:39 AM	PHl3 MFC set to  0.000000
10/24/2011	7:59:39 AM	SiCl4 MFC set to  0.000000
10/24/2011	7:59:39 AM	Tube furnace set to 0
10/24/2011	7:59:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	7:59:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/24/2011	7:59:43 AM	Recipe started at 7:59 AM
10/24/2011	7:59:43 AM	Helium valve closed
10/24/2011	7:59:43 AM	H2 valve closed
10/24/2011	7:59:43 AM	BCl3 valve closed
10/24/2011	7:59:43 AM	PH3 valve closed
10/24/2011	7:59:43 AM	SiCl4 pre valve closed
10/24/2011	7:59:43 AM	SiCl4 post valve closed
10/24/2011	7:59:43 AM	Main Vac valve closed
10/24/2011	7:59:43 AM	Bypass valve closed
10/24/2011	7:59:43 AM	Bubbler valve closed
10/24/2011	7:59:43 AM	Helium MFC set to  0.000000
10/24/2011	7:59:43 AM	H2 MFC set to  0.000000
10/24/2011	7:59:43 AM	BCl3 MFC set to  0.000000
10/24/2011	7:59:43 AM	PHl3 MFC set to  0.000000
10/24/2011	7:59:43 AM	SiCl4 MFC set to  0.000000
10/24/2011	7:59:43 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:59:44 AM	Tube furnace set to 0
10/24/2011	7:59:47 AM	H2 valve closed
10/24/2011	7:59:47 AM	BCl3 valve closed
10/24/2011	7:59:47 AM	PH3 valve closed
10/24/2011	7:59:47 AM	SiCl4 pre valve closed
10/24/2011	7:59:47 AM	SiCl4 post valve closed
10/24/2011	7:59:47 AM	Main Vac valve closed
10/24/2011	7:59:47 AM	Bypass valve closed
10/24/2011	7:59:47 AM	Bubbler valve closed
10/24/2011	7:59:47 AM	Helium valve opened
10/24/2011	7:59:47 AM	Helium MFC set to  500.000000
10/24/2011	7:59:47 AM	H2 MFC set to  0.000000
10/24/2011	7:59:47 AM	BCl3 MFC set to  0.000000
10/24/2011	7:59:47 AM	PHl3 MFC set to  0.000000
10/24/2011	7:59:47 AM	SiCl4 MFC set to  0.000000
10/24/2011	7:59:47 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:59:47 AM	Tube furnace set to 0
10/24/2011	7:59:47 AM	Helium valve closed
10/24/2011	7:59:47 AM	H2 valve closed
10/24/2011	7:59:47 AM	BCl3 valve closed
10/24/2011	7:59:47 AM	PH3 valve closed
10/24/2011	7:59:47 AM	SiCl4 pre valve closed
10/24/2011	7:59:47 AM	SiCl4 post valve closed
10/24/2011	7:59:47 AM	Main Vac valve closed
10/24/2011	7:59:47 AM	Bypass valve closed
10/24/2011	7:59:47 AM	Bubbler valve closed
10/24/2011	7:59:47 AM	Helium MFC set to  0.000000
10/24/2011	7:59:47 AM	H2 MFC set to  0.000000
10/24/2011	7:59:47 AM	BCl3 MFC set to  0.000000
10/24/2011	7:59:47 AM	PHl3 MFC set to  0.000000
10/24/2011	7:59:47 AM	SiCl4 MFC set to  0.000000
10/24/2011	7:59:47 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:59:47 AM	Tube furnace set to 0
10/24/2011	7:59:48 AM	Run finished at 7:59 AM
10/24/2011	7:59:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/24/2011	8:01:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	8:01:17 AM	Recipe started at 8:01 AM
10/24/2011	8:01:17 AM	Helium valve closed
10/24/2011	8:01:17 AM	H2 valve closed
10/24/2011	8:01:17 AM	BCl3 valve closed
10/24/2011	8:01:17 AM	PH3 valve closed
10/24/2011	8:01:17 AM	SiCl4 pre valve closed
10/24/2011	8:01:17 AM	SiCl4 post valve closed
10/24/2011	8:01:17 AM	Main Vac valve closed
10/24/2011	8:01:17 AM	Bubbler valve closed
10/24/2011	8:01:17 AM	Bypass valve opened
10/24/2011	8:01:17 AM	Helium MFC set to  0.000000
10/24/2011	8:01:17 AM	H2 MFC set to  0.000000
10/24/2011	8:01:17 AM	BCl3 MFC set to  0.000000
10/24/2011	8:01:17 AM	PHl3 MFC set to  0.000000
10/24/2011	8:01:17 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:01:17 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:01:17 AM	Tube furnace set to 0
10/24/2011	8:01:54 AM	Run aborted at 8:01 AM
10/24/2011	8:01:54 AM	Helium valve closed
10/24/2011	8:01:54 AM	H2 valve closed
10/24/2011	8:01:54 AM	BCl3 valve closed
10/24/2011	8:01:54 AM	PH3 valve closed
10/24/2011	8:01:54 AM	SiCl4 pre valve closed
10/24/2011	8:01:54 AM	SiCl4 post valve closed
10/24/2011	8:01:54 AM	Bypass valve closed
10/24/2011	8:01:54 AM	Main Vac valve closed
10/24/2011	8:01:54 AM	Bubbler valve closed
10/24/2011	8:01:54 AM	Helium MFC set to  0.000000
10/24/2011	8:01:54 AM	H2 MFC set to  0.000000
10/24/2011	8:01:54 AM	BCl3 MFC set to  0.000000
10/24/2011	8:01:54 AM	PHl3 MFC set to  0.000000
10/24/2011	8:01:54 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:01:54 AM	Tube furnace set to 0
10/24/2011	8:01:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	8:02:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/24/2011	8:02:08 AM	Recipe started at 8:02 AM
10/24/2011	8:02:08 AM	Helium valve closed
10/24/2011	8:02:08 AM	H2 valve closed
10/24/2011	8:02:08 AM	BCl3 valve closed
10/24/2011	8:02:08 AM	PH3 valve closed
10/24/2011	8:02:08 AM	SiCl4 pre valve closed
10/24/2011	8:02:08 AM	SiCl4 post valve closed
10/24/2011	8:02:08 AM	Main Vac valve closed
10/24/2011	8:02:08 AM	Bypass valve closed
10/24/2011	8:02:08 AM	Bubbler valve closed
10/24/2011	8:02:08 AM	Helium MFC set to  0.000000
10/24/2011	8:02:08 AM	H2 MFC set to  0.000000
10/24/2011	8:02:08 AM	BCl3 MFC set to  0.000000
10/24/2011	8:02:08 AM	PHl3 MFC set to  0.000000
10/24/2011	8:02:08 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:02:08 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:02:08 AM	Tube furnace set to 0
10/24/2011	8:02:11 AM	H2 valve closed
10/24/2011	8:02:11 AM	BCl3 valve closed
10/24/2011	8:02:11 AM	PH3 valve closed
10/24/2011	8:02:11 AM	SiCl4 pre valve closed
10/24/2011	8:02:11 AM	SiCl4 post valve closed
10/24/2011	8:02:11 AM	Main Vac valve closed
10/24/2011	8:02:11 AM	Bypass valve closed
10/24/2011	8:02:11 AM	Bubbler valve closed
10/24/2011	8:02:11 AM	Helium valve opened
10/24/2011	8:02:11 AM	Helium MFC set to  500.000000
10/24/2011	8:02:11 AM	H2 MFC set to  0.000000
10/24/2011	8:02:11 AM	BCl3 MFC set to  0.000000
10/24/2011	8:02:11 AM	PHl3 MFC set to  0.000000
10/24/2011	8:02:11 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:02:11 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:02:11 AM	Tube furnace set to 0
10/24/2011	8:02:20 AM	Helium valve closed
10/24/2011	8:02:20 AM	H2 valve closed
10/24/2011	8:02:20 AM	BCl3 valve closed
10/24/2011	8:02:20 AM	PH3 valve closed
10/24/2011	8:02:20 AM	SiCl4 pre valve closed
10/24/2011	8:02:20 AM	SiCl4 post valve closed
10/24/2011	8:02:20 AM	Main Vac valve closed
10/24/2011	8:02:20 AM	Bypass valve closed
10/24/2011	8:02:20 AM	Bubbler valve closed
10/24/2011	8:02:20 AM	Helium MFC set to  0.000000
10/24/2011	8:02:20 AM	H2 MFC set to  0.000000
10/24/2011	8:02:20 AM	BCl3 MFC set to  0.000000
10/24/2011	8:02:20 AM	PHl3 MFC set to  0.000000
10/24/2011	8:02:20 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:02:20 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:02:20 AM	Tube furnace set to 0
10/24/2011	8:02:21 AM	Run finished at 8:02 AM
10/24/2011	8:02:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/24/2011	8:03:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	8:03:13 AM	Recipe started at 8:03 AM
10/24/2011	8:03:13 AM	Helium valve closed
10/24/2011	8:03:13 AM	H2 valve closed
10/24/2011	8:03:13 AM	BCl3 valve closed
10/24/2011	8:03:13 AM	PH3 valve closed
10/24/2011	8:03:13 AM	SiCl4 pre valve closed
10/24/2011	8:03:13 AM	SiCl4 post valve closed
10/24/2011	8:03:13 AM	Main Vac valve closed
10/24/2011	8:03:13 AM	Bubbler valve closed
10/24/2011	8:03:13 AM	Bypass valve opened
10/24/2011	8:03:13 AM	Helium MFC set to  0.000000
10/24/2011	8:03:13 AM	H2 MFC set to  0.000000
10/24/2011	8:03:13 AM	BCl3 MFC set to  0.000000
10/24/2011	8:03:13 AM	PHl3 MFC set to  0.000000
10/24/2011	8:03:13 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:03:13 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:03:13 AM	Tube furnace set to 0
10/24/2011	8:04:42 AM	Helium valve closed
10/24/2011	8:04:42 AM	H2 valve closed
10/24/2011	8:04:42 AM	BCl3 valve closed
10/24/2011	8:04:42 AM	PH3 valve closed
10/24/2011	8:04:42 AM	SiCl4 pre valve closed
10/24/2011	8:04:42 AM	SiCl4 post valve closed
10/24/2011	8:04:42 AM	Main Vac valve closed
10/24/2011	8:04:42 AM	Bubbler valve closed
10/24/2011	8:04:42 AM	Bypass valve opened
10/24/2011	8:04:42 AM	Helium MFC set to  0.000000
10/24/2011	8:04:42 AM	H2 MFC set to  0.000000
10/24/2011	8:04:42 AM	BCl3 MFC set to  0.000000
10/24/2011	8:04:42 AM	PHl3 MFC set to  0.000000
10/24/2011	8:04:42 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:04:42 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:04:42 AM	Tube furnace set to 0
10/24/2011	8:05:42 AM	Helium valve closed
10/24/2011	8:05:42 AM	H2 valve closed
10/24/2011	8:05:42 AM	BCl3 valve closed
10/24/2011	8:05:42 AM	PH3 valve closed
10/24/2011	8:05:42 AM	SiCl4 pre valve closed
10/24/2011	8:05:42 AM	SiCl4 post valve closed
10/24/2011	8:05:42 AM	Bypass valve closed
10/24/2011	8:05:42 AM	Bubbler valve closed
10/24/2011	8:05:42 AM	Main Vac valve opened
10/24/2011	8:05:42 AM	Helium MFC set to  0.000000
10/24/2011	8:05:42 AM	H2 MFC set to  0.000000
10/24/2011	8:05:42 AM	BCl3 MFC set to  0.000000
10/24/2011	8:05:42 AM	PHl3 MFC set to  0.000000
10/24/2011	8:05:42 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:05:42 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:05:43 AM	Tube furnace set to 0
10/24/2011	8:05:44 AM	Run finished at 8:05 AM
10/24/2011	8:05:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	8:20:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/24/2011	8:20:13 AM	Recipe started at 8:20 AM
10/24/2011	8:20:13 AM	Helium valve closed
10/24/2011	8:20:13 AM	H2 valve closed
10/24/2011	8:20:13 AM	BCl3 valve closed
10/24/2011	8:20:13 AM	PH3 valve closed
10/24/2011	8:20:13 AM	SiCl4 pre valve closed
10/24/2011	8:20:13 AM	SiCl4 post valve closed
10/24/2011	8:20:13 AM	Main Vac valve closed
10/24/2011	8:20:13 AM	Bubbler valve closed
10/24/2011	8:20:13 AM	Bypass valve opened
10/24/2011	8:20:13 AM	Helium MFC set to  0.000000
10/24/2011	8:20:13 AM	H2 MFC set to  0.000000
10/24/2011	8:20:13 AM	BCl3 MFC set to  0.000000
10/24/2011	8:20:13 AM	PHl3 MFC set to  0.000000
10/24/2011	8:20:13 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:20:13 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:20:13 AM	Tube furnace set to 0
10/24/2011	8:20:13 AM	Helium valve closed
10/24/2011	8:20:13 AM	H2 valve closed
10/24/2011	8:20:13 AM	BCl3 valve closed
10/24/2011	8:20:13 AM	PH3 valve closed
10/24/2011	8:20:13 AM	SiCl4 pre valve closed
10/24/2011	8:20:13 AM	SiCl4 post valve closed
10/24/2011	8:20:13 AM	Main Vac valve closed
10/24/2011	8:20:13 AM	Bubbler valve closed
10/24/2011	8:20:13 AM	Bypass valve opened
10/24/2011	8:20:13 AM	Helium MFC set to  0.000000
10/24/2011	8:20:13 AM	H2 MFC set to  0.000000
10/24/2011	8:20:13 AM	BCl3 MFC set to  0.000000
10/24/2011	8:20:13 AM	PHl3 MFC set to  0.000000
10/24/2011	8:20:13 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:20:13 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:20:13 AM	Tube furnace set to 0
10/24/2011	8:20:43 AM	Helium valve closed
10/24/2011	8:20:43 AM	H2 valve closed
10/24/2011	8:20:43 AM	BCl3 valve closed
10/24/2011	8:20:43 AM	PH3 valve closed
10/24/2011	8:20:43 AM	SiCl4 pre valve closed
10/24/2011	8:20:43 AM	SiCl4 post valve closed
10/24/2011	8:20:43 AM	Bypass valve closed
10/24/2011	8:20:43 AM	Bubbler valve closed
10/24/2011	8:20:43 AM	Main Vac valve opened
10/24/2011	8:20:43 AM	Helium MFC set to  0.000000
10/24/2011	8:20:43 AM	H2 MFC set to  0.000000
10/24/2011	8:20:43 AM	BCl3 MFC set to  0.000000
10/24/2011	8:20:43 AM	PHl3 MFC set to  0.000000
10/24/2011	8:20:43 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:20:43 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:20:44 AM	Tube furnace set to 0
10/24/2011	8:21:14 AM	H2 valve closed
10/24/2011	8:21:14 AM	BCl3 valve closed
10/24/2011	8:21:14 AM	PH3 valve closed
10/24/2011	8:21:14 AM	SiCl4 pre valve closed
10/24/2011	8:21:14 AM	SiCl4 post valve closed
10/24/2011	8:21:14 AM	Bypass valve closed
10/24/2011	8:21:14 AM	Bubbler valve closed
10/24/2011	8:21:14 AM	Helium valve opened
10/24/2011	8:21:14 AM	Main Vac valve opened
10/24/2011	8:21:14 AM	Helium MFC set to  20.000000
10/24/2011	8:21:14 AM	H2 MFC set to  0.000000
10/24/2011	8:21:14 AM	BCl3 MFC set to  0.000000
10/24/2011	8:21:14 AM	PHl3 MFC set to  0.000000
10/24/2011	8:21:14 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:21:14 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:21:14 AM	Tube furnace set to 0
10/24/2011	8:21:44 AM	Helium valve closed
10/24/2011	8:21:44 AM	H2 valve closed
10/24/2011	8:21:44 AM	BCl3 valve closed
10/24/2011	8:21:44 AM	PH3 valve closed
10/24/2011	8:21:44 AM	SiCl4 pre valve closed
10/24/2011	8:21:44 AM	SiCl4 post valve closed
10/24/2011	8:21:44 AM	Bypass valve closed
10/24/2011	8:21:44 AM	Bubbler valve closed
10/24/2011	8:21:44 AM	Main Vac valve opened
10/24/2011	8:21:44 AM	Helium MFC set to  0.000000
10/24/2011	8:21:44 AM	H2 MFC set to  0.000000
10/24/2011	8:21:44 AM	BCl3 MFC set to  0.000000
10/24/2011	8:21:44 AM	PHl3 MFC set to  0.000000
10/24/2011	8:21:44 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:21:44 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:21:44 AM	Tube furnace set to 0
10/24/2011	8:22:14 AM	H2 valve closed
10/24/2011	8:22:14 AM	BCl3 valve closed
10/24/2011	8:22:14 AM	PH3 valve closed
10/24/2011	8:22:14 AM	SiCl4 pre valve closed
10/24/2011	8:22:14 AM	SiCl4 post valve closed
10/24/2011	8:22:14 AM	Bypass valve closed
10/24/2011	8:22:14 AM	Bubbler valve closed
10/24/2011	8:22:14 AM	Helium valve opened
10/24/2011	8:22:14 AM	Main Vac valve opened
10/24/2011	8:22:14 AM	Helium MFC set to  20.000000
10/24/2011	8:22:14 AM	H2 MFC set to  0.000000
10/24/2011	8:22:14 AM	BCl3 MFC set to  0.000000
10/24/2011	8:22:14 AM	PHl3 MFC set to  0.000000
10/24/2011	8:22:14 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:22:14 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:22:14 AM	Tube furnace set to 0
10/24/2011	8:22:44 AM	Helium valve closed
10/24/2011	8:22:44 AM	H2 valve closed
10/24/2011	8:22:44 AM	BCl3 valve closed
10/24/2011	8:22:44 AM	PH3 valve closed
10/24/2011	8:22:44 AM	SiCl4 pre valve closed
10/24/2011	8:22:44 AM	SiCl4 post valve closed
10/24/2011	8:22:44 AM	Bypass valve closed
10/24/2011	8:22:44 AM	Bubbler valve closed
10/24/2011	8:22:44 AM	Main Vac valve opened
10/24/2011	8:22:44 AM	Helium MFC set to  0.000000
10/24/2011	8:22:44 AM	H2 MFC set to  0.000000
10/24/2011	8:22:44 AM	BCl3 MFC set to  0.000000
10/24/2011	8:22:44 AM	PHl3 MFC set to  0.000000
10/24/2011	8:22:44 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:22:44 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:22:44 AM	Tube furnace set to 0
10/24/2011	8:23:14 AM	H2 valve closed
10/24/2011	8:23:14 AM	BCl3 valve closed
10/24/2011	8:23:14 AM	PH3 valve closed
10/24/2011	8:23:14 AM	SiCl4 pre valve closed
10/24/2011	8:23:14 AM	SiCl4 post valve closed
10/24/2011	8:23:14 AM	Bypass valve closed
10/24/2011	8:23:14 AM	Bubbler valve closed
10/24/2011	8:23:14 AM	Helium valve opened
10/24/2011	8:23:14 AM	Main Vac valve opened
10/24/2011	8:23:14 AM	Helium MFC set to  20.000000
10/24/2011	8:23:14 AM	H2 MFC set to  0.000000
10/24/2011	8:23:14 AM	BCl3 MFC set to  0.000000
10/24/2011	8:23:14 AM	PHl3 MFC set to  0.000000
10/24/2011	8:23:14 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:23:14 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:23:15 AM	Tube furnace set to 0
10/24/2011	8:23:45 AM	Helium valve closed
10/24/2011	8:23:45 AM	H2 valve closed
10/24/2011	8:23:45 AM	BCl3 valve closed
10/24/2011	8:23:45 AM	PH3 valve closed
10/24/2011	8:23:45 AM	SiCl4 pre valve closed
10/24/2011	8:23:45 AM	SiCl4 post valve closed
10/24/2011	8:23:45 AM	Bypass valve closed
10/24/2011	8:23:45 AM	Bubbler valve closed
10/24/2011	8:23:45 AM	Main Vac valve opened
10/24/2011	8:23:45 AM	Helium MFC set to  0.000000
10/24/2011	8:23:45 AM	H2 MFC set to  0.000000
10/24/2011	8:23:45 AM	BCl3 MFC set to  0.000000
10/24/2011	8:23:45 AM	PHl3 MFC set to  0.000000
10/24/2011	8:23:45 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:23:45 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:23:45 AM	Tube furnace set to 0
10/24/2011	8:24:15 AM	H2 valve closed
10/24/2011	8:24:15 AM	BCl3 valve closed
10/24/2011	8:24:15 AM	PH3 valve closed
10/24/2011	8:24:15 AM	SiCl4 pre valve closed
10/24/2011	8:24:15 AM	SiCl4 post valve closed
10/24/2011	8:24:15 AM	Bypass valve closed
10/24/2011	8:24:15 AM	Bubbler valve closed
10/24/2011	8:24:15 AM	Helium valve opened
10/24/2011	8:24:15 AM	Main Vac valve opened
10/24/2011	8:24:15 AM	Helium MFC set to  20.000000
10/24/2011	8:24:15 AM	H2 MFC set to  0.000000
10/24/2011	8:24:15 AM	BCl3 MFC set to  0.000000
10/24/2011	8:24:15 AM	PHl3 MFC set to  0.000000
10/24/2011	8:24:15 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:24:15 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:24:15 AM	Tube furnace set to 0
10/24/2011	8:24:45 AM	Helium valve closed
10/24/2011	8:24:45 AM	H2 valve closed
10/24/2011	8:24:45 AM	BCl3 valve closed
10/24/2011	8:24:45 AM	PH3 valve closed
10/24/2011	8:24:45 AM	SiCl4 pre valve closed
10/24/2011	8:24:45 AM	SiCl4 post valve closed
10/24/2011	8:24:45 AM	Bypass valve closed
10/24/2011	8:24:45 AM	Bubbler valve closed
10/24/2011	8:24:45 AM	Main Vac valve opened
10/24/2011	8:24:45 AM	Helium MFC set to  0.000000
10/24/2011	8:24:45 AM	H2 MFC set to  0.000000
10/24/2011	8:24:45 AM	BCl3 MFC set to  0.000000
10/24/2011	8:24:45 AM	PHl3 MFC set to  0.000000
10/24/2011	8:24:45 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:24:45 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:24:45 AM	Tube furnace set to 0
10/24/2011	8:25:15 AM	H2 valve closed
10/24/2011	8:25:15 AM	BCl3 valve closed
10/24/2011	8:25:15 AM	PH3 valve closed
10/24/2011	8:25:15 AM	SiCl4 pre valve closed
10/24/2011	8:25:15 AM	SiCl4 post valve closed
10/24/2011	8:25:15 AM	Bypass valve closed
10/24/2011	8:25:15 AM	Bubbler valve closed
10/24/2011	8:25:15 AM	Helium valve opened
10/24/2011	8:25:15 AM	Main Vac valve opened
10/24/2011	8:25:15 AM	Helium MFC set to  20.000000
10/24/2011	8:25:15 AM	H2 MFC set to  0.000000
10/24/2011	8:25:15 AM	BCl3 MFC set to  0.000000
10/24/2011	8:25:15 AM	PHl3 MFC set to  0.000000
10/24/2011	8:25:15 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:25:15 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:25:15 AM	Tube furnace set to 0
10/24/2011	8:25:45 AM	Helium valve closed
10/24/2011	8:25:45 AM	H2 valve closed
10/24/2011	8:25:45 AM	BCl3 valve closed
10/24/2011	8:25:45 AM	PH3 valve closed
10/24/2011	8:25:45 AM	SiCl4 pre valve closed
10/24/2011	8:25:45 AM	SiCl4 post valve closed
10/24/2011	8:25:45 AM	Bypass valve closed
10/24/2011	8:25:45 AM	Bubbler valve closed
10/24/2011	8:25:45 AM	Main Vac valve opened
10/24/2011	8:25:45 AM	Helium MFC set to  0.000000
10/24/2011	8:25:45 AM	H2 MFC set to  0.000000
10/24/2011	8:25:45 AM	BCl3 MFC set to  0.000000
10/24/2011	8:25:45 AM	PHl3 MFC set to  0.000000
10/24/2011	8:25:45 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:25:45 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:25:46 AM	Tube furnace set to 0
10/24/2011	8:26:16 AM	H2 valve closed
10/24/2011	8:26:16 AM	BCl3 valve closed
10/24/2011	8:26:16 AM	PH3 valve closed
10/24/2011	8:26:16 AM	SiCl4 pre valve closed
10/24/2011	8:26:16 AM	SiCl4 post valve closed
10/24/2011	8:26:16 AM	Bypass valve closed
10/24/2011	8:26:16 AM	Bubbler valve closed
10/24/2011	8:26:16 AM	Helium valve opened
10/24/2011	8:26:16 AM	Main Vac valve opened
10/24/2011	8:26:16 AM	Helium MFC set to  20.000000
10/24/2011	8:26:16 AM	H2 MFC set to  0.000000
10/24/2011	8:26:16 AM	BCl3 MFC set to  0.000000
10/24/2011	8:26:16 AM	PHl3 MFC set to  0.000000
10/24/2011	8:26:16 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:26:16 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:26:16 AM	Tube furnace set to 0
10/24/2011	8:26:46 AM	Helium valve closed
10/24/2011	8:26:46 AM	H2 valve closed
10/24/2011	8:26:46 AM	BCl3 valve closed
10/24/2011	8:26:46 AM	PH3 valve closed
10/24/2011	8:26:46 AM	SiCl4 pre valve closed
10/24/2011	8:26:46 AM	SiCl4 post valve closed
10/24/2011	8:26:46 AM	Bypass valve closed
10/24/2011	8:26:46 AM	Bubbler valve closed
10/24/2011	8:26:46 AM	Main Vac valve opened
10/24/2011	8:26:46 AM	Helium MFC set to  0.000000
10/24/2011	8:26:46 AM	H2 MFC set to  0.000000
10/24/2011	8:26:46 AM	BCl3 MFC set to  0.000000
10/24/2011	8:26:46 AM	PHl3 MFC set to  0.000000
10/24/2011	8:26:46 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:26:46 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:26:46 AM	Tube furnace set to 0
10/24/2011	8:27:16 AM	H2 valve closed
10/24/2011	8:27:16 AM	BCl3 valve closed
10/24/2011	8:27:16 AM	PH3 valve closed
10/24/2011	8:27:16 AM	SiCl4 pre valve closed
10/24/2011	8:27:16 AM	SiCl4 post valve closed
10/24/2011	8:27:16 AM	Bypass valve closed
10/24/2011	8:27:16 AM	Bubbler valve closed
10/24/2011	8:27:16 AM	Helium valve opened
10/24/2011	8:27:16 AM	Main Vac valve opened
10/24/2011	8:27:16 AM	Helium MFC set to  20.000000
10/24/2011	8:27:16 AM	H2 MFC set to  0.000000
10/24/2011	8:27:16 AM	BCl3 MFC set to  0.000000
10/24/2011	8:27:16 AM	PHl3 MFC set to  0.000000
10/24/2011	8:27:16 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:27:16 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:27:16 AM	Tube furnace set to 0
10/24/2011	8:27:46 AM	Helium valve closed
10/24/2011	8:27:46 AM	H2 valve closed
10/24/2011	8:27:46 AM	BCl3 valve closed
10/24/2011	8:27:46 AM	PH3 valve closed
10/24/2011	8:27:46 AM	SiCl4 pre valve closed
10/24/2011	8:27:46 AM	SiCl4 post valve closed
10/24/2011	8:27:46 AM	Bypass valve closed
10/24/2011	8:27:46 AM	Bubbler valve closed
10/24/2011	8:27:46 AM	Main Vac valve opened
10/24/2011	8:27:46 AM	Helium MFC set to  0.000000
10/24/2011	8:27:46 AM	H2 MFC set to  0.000000
10/24/2011	8:27:46 AM	BCl3 MFC set to  0.000000
10/24/2011	8:27:46 AM	PHl3 MFC set to  0.000000
10/24/2011	8:27:46 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:27:46 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:27:46 AM	Tube furnace set to 0
10/24/2011	8:28:16 AM	H2 valve closed
10/24/2011	8:28:16 AM	BCl3 valve closed
10/24/2011	8:28:16 AM	PH3 valve closed
10/24/2011	8:28:16 AM	SiCl4 pre valve closed
10/24/2011	8:28:16 AM	SiCl4 post valve closed
10/24/2011	8:28:16 AM	Bypass valve closed
10/24/2011	8:28:16 AM	Bubbler valve closed
10/24/2011	8:28:16 AM	Helium valve opened
10/24/2011	8:28:16 AM	Main Vac valve opened
10/24/2011	8:28:16 AM	Helium MFC set to  20.000000
10/24/2011	8:28:16 AM	H2 MFC set to  0.000000
10/24/2011	8:28:16 AM	BCl3 MFC set to  0.000000
10/24/2011	8:28:16 AM	PHl3 MFC set to  0.000000
10/24/2011	8:28:16 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:28:16 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:28:17 AM	Tube furnace set to 0
10/24/2011	8:28:47 AM	Helium valve closed
10/24/2011	8:28:47 AM	H2 valve closed
10/24/2011	8:28:47 AM	BCl3 valve closed
10/24/2011	8:28:47 AM	PH3 valve closed
10/24/2011	8:28:47 AM	SiCl4 pre valve closed
10/24/2011	8:28:47 AM	SiCl4 post valve closed
10/24/2011	8:28:47 AM	Bypass valve closed
10/24/2011	8:28:47 AM	Bubbler valve closed
10/24/2011	8:28:47 AM	Main Vac valve opened
10/24/2011	8:28:47 AM	Helium MFC set to  0.000000
10/24/2011	8:28:47 AM	H2 MFC set to  0.000000
10/24/2011	8:28:47 AM	BCl3 MFC set to  0.000000
10/24/2011	8:28:47 AM	PHl3 MFC set to  0.000000
10/24/2011	8:28:47 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:28:47 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:28:47 AM	Tube furnace set to 0
10/24/2011	8:29:17 AM	H2 valve closed
10/24/2011	8:29:17 AM	BCl3 valve closed
10/24/2011	8:29:17 AM	PH3 valve closed
10/24/2011	8:29:17 AM	SiCl4 pre valve closed
10/24/2011	8:29:17 AM	SiCl4 post valve closed
10/24/2011	8:29:17 AM	Bypass valve closed
10/24/2011	8:29:17 AM	Bubbler valve closed
10/24/2011	8:29:17 AM	Helium valve opened
10/24/2011	8:29:17 AM	Main Vac valve opened
10/24/2011	8:29:17 AM	Helium MFC set to  20.000000
10/24/2011	8:29:17 AM	H2 MFC set to  0.000000
10/24/2011	8:29:17 AM	BCl3 MFC set to  0.000000
10/24/2011	8:29:17 AM	PHl3 MFC set to  0.000000
10/24/2011	8:29:17 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:29:17 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:29:17 AM	Tube furnace set to 0
10/24/2011	8:29:47 AM	Helium valve closed
10/24/2011	8:29:47 AM	H2 valve closed
10/24/2011	8:29:47 AM	BCl3 valve closed
10/24/2011	8:29:47 AM	PH3 valve closed
10/24/2011	8:29:47 AM	SiCl4 pre valve closed
10/24/2011	8:29:47 AM	SiCl4 post valve closed
10/24/2011	8:29:47 AM	Bypass valve closed
10/24/2011	8:29:47 AM	Bubbler valve closed
10/24/2011	8:29:47 AM	Main Vac valve opened
10/24/2011	8:29:47 AM	Helium MFC set to  0.000000
10/24/2011	8:29:47 AM	H2 MFC set to  0.000000
10/24/2011	8:29:47 AM	BCl3 MFC set to  0.000000
10/24/2011	8:29:47 AM	PHl3 MFC set to  0.000000
10/24/2011	8:29:47 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:29:47 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:29:47 AM	Tube furnace set to 0
10/24/2011	8:30:17 AM	H2 valve closed
10/24/2011	8:30:17 AM	BCl3 valve closed
10/24/2011	8:30:17 AM	PH3 valve closed
10/24/2011	8:30:17 AM	SiCl4 pre valve closed
10/24/2011	8:30:17 AM	SiCl4 post valve closed
10/24/2011	8:30:17 AM	Bypass valve closed
10/24/2011	8:30:17 AM	Bubbler valve closed
10/24/2011	8:30:17 AM	Helium valve opened
10/24/2011	8:30:17 AM	Main Vac valve opened
10/24/2011	8:30:17 AM	Helium MFC set to  20.000000
10/24/2011	8:30:17 AM	H2 MFC set to  0.000000
10/24/2011	8:30:17 AM	BCl3 MFC set to  0.000000
10/24/2011	8:30:17 AM	PHl3 MFC set to  0.000000
10/24/2011	8:30:17 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:30:17 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:30:17 AM	Tube furnace set to 0
10/24/2011	8:30:48 AM	Helium valve closed
10/24/2011	8:30:48 AM	H2 valve closed
10/24/2011	8:30:48 AM	BCl3 valve closed
10/24/2011	8:30:48 AM	PH3 valve closed
10/24/2011	8:30:48 AM	SiCl4 pre valve closed
10/24/2011	8:30:48 AM	SiCl4 post valve closed
10/24/2011	8:30:48 AM	Bypass valve closed
10/24/2011	8:30:48 AM	Bubbler valve closed
10/24/2011	8:30:48 AM	Main Vac valve opened
10/24/2011	8:30:48 AM	Helium MFC set to  0.000000
10/24/2011	8:30:48 AM	H2 MFC set to  0.000000
10/24/2011	8:30:48 AM	BCl3 MFC set to  0.000000
10/24/2011	8:30:48 AM	PHl3 MFC set to  0.000000
10/24/2011	8:30:48 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:30:48 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:30:48 AM	Tube furnace set to 0
10/24/2011	8:30:49 AM	Run finished at 8:30 AM
10/24/2011	8:30:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/24/2011	8:48:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/24/2011	8:48:30 AM	Recipe started at 8:48 AM
10/24/2011	8:48:30 AM	Helium valve closed
10/24/2011	8:48:30 AM	H2 valve closed
10/24/2011	8:48:30 AM	BCl3 valve closed
10/24/2011	8:48:30 AM	PH3 valve closed
10/24/2011	8:48:30 AM	SiCl4 pre valve closed
10/24/2011	8:48:30 AM	SiCl4 post valve closed
10/24/2011	8:48:30 AM	Main Vac valve closed
10/24/2011	8:48:30 AM	Bypass valve closed
10/24/2011	8:48:30 AM	Bubbler valve closed
10/24/2011	8:48:30 AM	Helium MFC set to  0.000000
10/24/2011	8:48:30 AM	H2 MFC set to  0.000000
10/24/2011	8:48:30 AM	BCl3 MFC set to  0.000000
10/24/2011	8:48:30 AM	PHl3 MFC set to  0.000000
10/24/2011	8:48:30 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:48:30 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:48:31 AM	Tube furnace set to 0
10/24/2011	8:48:31 AM	Run finished at 8:48 AM
10/24/2011	8:48:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/24/2011	8:48:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	8:48:52 AM	Recipe started at 8:48 AM
10/24/2011	8:48:52 AM	Helium valve closed
10/24/2011	8:48:52 AM	H2 valve closed
10/24/2011	8:48:52 AM	BCl3 valve closed
10/24/2011	8:48:52 AM	PH3 valve closed
10/24/2011	8:48:52 AM	SiCl4 pre valve closed
10/24/2011	8:48:52 AM	SiCl4 post valve closed
10/24/2011	8:48:52 AM	Main Vac valve closed
10/24/2011	8:48:52 AM	Bubbler valve closed
10/24/2011	8:48:53 AM	Bypass valve opened
10/24/2011	8:48:53 AM	Helium MFC set to  0.000000
10/24/2011	8:48:53 AM	H2 MFC set to  0.000000
10/24/2011	8:48:53 AM	BCl3 MFC set to  0.000000
10/24/2011	8:48:53 AM	PHl3 MFC set to  0.000000
10/24/2011	8:48:53 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:48:53 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:48:53 AM	Tube furnace set to 0
10/24/2011	8:48:53 AM	Helium valve closed
10/24/2011	8:48:53 AM	H2 valve closed
10/24/2011	8:48:53 AM	BCl3 valve closed
10/24/2011	8:48:53 AM	PH3 valve closed
10/24/2011	8:48:53 AM	SiCl4 pre valve closed
10/24/2011	8:48:53 AM	SiCl4 post valve closed
10/24/2011	8:48:53 AM	Main Vac valve closed
10/24/2011	8:48:53 AM	Bubbler valve closed
10/24/2011	8:48:53 AM	Bypass valve opened
10/24/2011	8:48:53 AM	Helium MFC set to  0.000000
10/24/2011	8:48:53 AM	H2 MFC set to  0.000000
10/24/2011	8:48:53 AM	BCl3 MFC set to  0.000000
10/24/2011	8:48:53 AM	PHl3 MFC set to  0.000000
10/24/2011	8:48:53 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:48:53 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:48:53 AM	Tube furnace set to 0
10/24/2011	8:49:53 AM	Helium valve closed
10/24/2011	8:49:53 AM	H2 valve closed
10/24/2011	8:49:53 AM	BCl3 valve closed
10/24/2011	8:49:53 AM	PH3 valve closed
10/24/2011	8:49:53 AM	SiCl4 pre valve closed
10/24/2011	8:49:53 AM	SiCl4 post valve closed
10/24/2011	8:49:53 AM	Bypass valve closed
10/24/2011	8:49:53 AM	Bubbler valve closed
10/24/2011	8:49:53 AM	Main Vac valve opened
10/24/2011	8:49:53 AM	Helium MFC set to  0.000000
10/24/2011	8:49:53 AM	H2 MFC set to  0.000000
10/24/2011	8:49:53 AM	BCl3 MFC set to  0.000000
10/24/2011	8:49:53 AM	PHl3 MFC set to  0.000000
10/24/2011	8:49:53 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:49:53 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:49:53 AM	Tube furnace set to 0
10/24/2011	8:49:54 AM	Run finished at 8:49 AM
10/24/2011	8:49:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	8:53:43 AM	Recipe started at 8:53 AM
10/24/2011	8:53:43 AM	Helium valve closed
10/24/2011	8:53:43 AM	H2 valve closed
10/24/2011	8:53:43 AM	BCl3 valve closed
10/24/2011	8:53:43 AM	PH3 valve closed
10/24/2011	8:53:43 AM	SiCl4 pre valve closed
10/24/2011	8:53:43 AM	SiCl4 post valve closed
10/24/2011	8:53:43 AM	Main Vac valve closed
10/24/2011	8:53:43 AM	Bypass valve closed
10/24/2011	8:53:43 AM	Bubbler valve closed
10/24/2011	8:53:43 AM	Helium MFC set to  0.000000
10/24/2011	8:53:43 AM	H2 MFC set to  0.000000
10/24/2011	8:53:43 AM	BCl3 MFC set to  0.000000
10/24/2011	8:53:43 AM	PHl3 MFC set to  0.000000
10/24/2011	8:53:43 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:53:43 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:53:43 AM	Tube furnace set to 0
10/24/2011	8:53:46 AM	Helium valve closed
10/24/2011	8:53:46 AM	BCl3 valve closed
10/24/2011	8:53:46 AM	PH3 valve closed
10/24/2011	8:53:46 AM	SiCl4 pre valve closed
10/24/2011	8:53:46 AM	SiCl4 post valve closed
10/24/2011	8:53:46 AM	Main Vac valve closed
10/24/2011	8:53:46 AM	Bypass valve closed
10/24/2011	8:53:46 AM	Bubbler valve closed
10/24/2011	8:53:46 AM	H2 valve opened
10/24/2011	8:53:46 AM	Helium MFC set to  0.000000
10/24/2011	8:53:46 AM	H2 MFC set to  500.000000
10/24/2011	8:53:46 AM	BCl3 MFC set to  0.000000
10/24/2011	8:53:46 AM	PHl3 MFC set to  0.000000
10/24/2011	8:53:46 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:53:46 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:53:46 AM	Tube furnace set to 0
10/24/2011	8:54:55 AM	Helium valve closed
10/24/2011	8:54:55 AM	BCl3 valve closed
10/24/2011	8:54:55 AM	PH3 valve closed
10/24/2011	8:54:55 AM	SiCl4 pre valve closed
10/24/2011	8:54:55 AM	SiCl4 post valve closed
10/24/2011	8:54:55 AM	Main Vac valve closed
10/24/2011	8:54:55 AM	Bypass valve closed
10/24/2011	8:54:55 AM	H2 valve opened
10/24/2011	8:54:55 AM	Bubbler valve opened
10/24/2011	8:54:55 AM	Helium MFC set to  0.000000
10/24/2011	8:54:55 AM	H2 MFC set to  500.000000
10/24/2011	8:54:55 AM	BCl3 MFC set to  0.000000
10/24/2011	8:54:55 AM	PHl3 MFC set to  0.000000
10/24/2011	8:54:55 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:54:55 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:54:55 AM	Tube furnace set to 0
10/24/2011	8:54:56 AM	Helium valve closed
10/24/2011	8:54:56 AM	BCl3 valve closed
10/24/2011	8:54:56 AM	PH3 valve closed
10/24/2011	8:54:56 AM	SiCl4 pre valve closed
10/24/2011	8:54:56 AM	SiCl4 post valve closed
10/24/2011	8:54:56 AM	Main Vac valve closed
10/24/2011	8:54:56 AM	Bypass valve closed
10/24/2011	8:54:56 AM	H2 valve opened
10/24/2011	8:54:56 AM	Bubbler valve opened
10/24/2011	8:54:56 AM	Helium MFC set to  0.000000
10/24/2011	8:54:56 AM	H2 MFC set to  500.000000
10/24/2011	8:54:56 AM	BCl3 MFC set to  0.000000
10/24/2011	8:54:56 AM	PHl3 MFC set to  0.000000
10/24/2011	8:54:56 AM	SiCl4 MFC set to  0.000000
10/24/2011	8:54:56 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:54:56 AM	Tube furnace set to 1010
10/24/2011	9:14:56 AM	Helium valve closed
10/24/2011	9:14:56 AM	BCl3 valve closed
10/24/2011	9:14:56 AM	PH3 valve closed
10/24/2011	9:14:56 AM	Main Vac valve closed
10/24/2011	9:14:56 AM	Bypass valve closed
10/24/2011	9:14:56 AM	H2 valve opened
10/24/2011	9:14:56 AM	SiCl4 pre valve opened
10/24/2011	9:14:56 AM	SiCl4 post valve opened
10/24/2011	9:14:56 AM	Bubbler valve opened
10/24/2011	9:14:56 AM	Helium MFC set to  0.000000
10/24/2011	9:14:56 AM	H2 MFC set to  500.000000
10/24/2011	9:14:56 AM	BCl3 MFC set to  0.000000
10/24/2011	9:14:56 AM	PHl3 MFC set to  0.000000
10/24/2011	9:14:56 AM	SiCl4 MFC set to  40.000000
10/24/2011	9:14:56 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	9:14:56 AM	Tube furnace set to 1010
10/24/2011	9:24:56 AM	H2 valve closed
10/24/2011	9:24:56 AM	BCl3 valve closed
10/24/2011	9:24:56 AM	PH3 valve closed
10/24/2011	9:24:56 AM	SiCl4 pre valve closed
10/24/2011	9:24:56 AM	SiCl4 post valve closed
10/24/2011	9:24:56 AM	Main Vac valve closed
10/24/2011	9:24:56 AM	Bypass valve closed
10/24/2011	9:24:56 AM	Helium valve opened
10/24/2011	9:24:56 AM	Bubbler valve opened
10/24/2011	9:24:56 AM	Helium MFC set to  500.000000
10/24/2011	9:24:56 AM	H2 MFC set to  0.000000
10/24/2011	9:24:56 AM	BCl3 MFC set to  0.000000
10/24/2011	9:24:56 AM	PHl3 MFC set to  0.000000
10/24/2011	9:24:56 AM	SiCl4 MFC set to  0.000000
10/24/2011	9:24:56 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	9:24:56 AM	Tube furnace set to 0
10/24/2011	9:50:29 AM	Helium valve closed
10/24/2011	9:50:29 AM	H2 valve closed
10/24/2011	9:50:29 AM	BCl3 valve closed
10/24/2011	9:50:29 AM	PH3 valve closed
10/24/2011	9:50:29 AM	SiCl4 pre valve closed
10/24/2011	9:50:29 AM	SiCl4 post valve closed
10/24/2011	9:50:29 AM	Main Vac valve closed
10/24/2011	9:50:29 AM	Bubbler valve closed
10/24/2011	9:50:29 AM	Bypass valve closed
10/24/2011	9:50:29 AM	Helium MFC set to  0.000000
10/24/2011	9:50:29 AM	H2 MFC set to  0.000000
10/24/2011	9:50:29 AM	BCl3 MFC set to  0.000000
10/24/2011	9:50:29 AM	PHl3 MFC set to  0.000000
10/24/2011	9:50:29 AM	SiCl4 MFC set to  0.000000
10/24/2011	9:50:29 AM	Bypass solenoid MFC set to  760.000000
10/24/2011	9:50:29 AM	Tube furnace set to 0
10/24/2011	9:50:29 AM	Baratron reads 742.339149 Torr and NaOH valve is open.  Emergency exit.
10/24/2011	9:58:09 AM	Run aborted at 9:58 AM
10/24/2011	9:58:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	9:58:13 AM	Recipe started at 9:58 AM
10/24/2011	9:58:13 AM	Helium valve closed
10/24/2011	9:58:13 AM	H2 valve closed
10/24/2011	9:58:13 AM	BCl3 valve closed
10/24/2011	9:58:13 AM	PH3 valve closed
10/24/2011	9:58:13 AM	SiCl4 pre valve closed
10/24/2011	9:58:13 AM	SiCl4 post valve closed
10/24/2011	9:58:13 AM	Main Vac valve closed
10/24/2011	9:58:13 AM	Bubbler valve closed
10/24/2011	9:58:13 AM	Bypass valve opened
10/24/2011	9:58:13 AM	Helium MFC set to  0.000000
10/24/2011	9:58:13 AM	H2 MFC set to  0.000000
10/24/2011	9:58:13 AM	BCl3 MFC set to  0.000000
10/24/2011	9:58:13 AM	PHl3 MFC set to  0.000000
10/24/2011	9:58:13 AM	SiCl4 MFC set to  0.000000
10/24/2011	9:58:13 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	9:58:13 AM	Tube furnace set to 0
10/24/2011	9:59:21 AM	Helium valve closed
10/24/2011	9:59:21 AM	H2 valve closed
10/24/2011	9:59:21 AM	BCl3 valve closed
10/24/2011	9:59:21 AM	PH3 valve closed
10/24/2011	9:59:21 AM	SiCl4 pre valve closed
10/24/2011	9:59:21 AM	SiCl4 post valve closed
10/24/2011	9:59:21 AM	Main Vac valve closed
10/24/2011	9:59:21 AM	Bubbler valve closed
10/24/2011	9:59:21 AM	Bypass valve opened
10/24/2011	9:59:21 AM	Helium MFC set to  0.000000
10/24/2011	9:59:21 AM	H2 MFC set to  0.000000
10/24/2011	9:59:21 AM	BCl3 MFC set to  0.000000
10/24/2011	9:59:21 AM	PHl3 MFC set to  0.000000
10/24/2011	9:59:21 AM	SiCl4 MFC set to  0.000000
10/24/2011	9:59:21 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	9:59:21 AM	Tube furnace set to 0
10/24/2011	10:00:21 AM	Helium valve closed
10/24/2011	10:00:21 AM	H2 valve closed
10/24/2011	10:00:21 AM	BCl3 valve closed
10/24/2011	10:00:21 AM	PH3 valve closed
10/24/2011	10:00:21 AM	SiCl4 pre valve closed
10/24/2011	10:00:21 AM	SiCl4 post valve closed
10/24/2011	10:00:21 AM	Bypass valve closed
10/24/2011	10:00:21 AM	Bubbler valve closed
10/24/2011	10:00:21 AM	Main Vac valve opened
10/24/2011	10:00:21 AM	Helium MFC set to  0.000000
10/24/2011	10:00:21 AM	H2 MFC set to  0.000000
10/24/2011	10:00:21 AM	BCl3 MFC set to  0.000000
10/24/2011	10:00:21 AM	PHl3 MFC set to  0.000000
10/24/2011	10:00:21 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:00:21 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:00:22 AM	Tube furnace set to 0
10/24/2011	10:00:23 AM	Run finished at 10:00 AM
10/24/2011	10:00:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	10:28:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/24/2011	10:29:10 AM	Recipe started at 10:29 AM
10/24/2011	10:29:10 AM	Helium valve closed
10/24/2011	10:29:10 AM	H2 valve closed
10/24/2011	10:29:10 AM	BCl3 valve closed
10/24/2011	10:29:10 AM	PH3 valve closed
10/24/2011	10:29:10 AM	SiCl4 pre valve closed
10/24/2011	10:29:10 AM	SiCl4 post valve closed
10/24/2011	10:29:10 AM	Main Vac valve closed
10/24/2011	10:29:10 AM	Bubbler valve closed
10/24/2011	10:29:10 AM	Bypass valve opened
10/24/2011	10:29:10 AM	Helium MFC set to  0.000000
10/24/2011	10:29:10 AM	H2 MFC set to  0.000000
10/24/2011	10:29:10 AM	BCl3 MFC set to  0.000000
10/24/2011	10:29:10 AM	PHl3 MFC set to  0.000000
10/24/2011	10:29:10 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:29:10 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:29:10 AM	Tube furnace set to 0
10/24/2011	10:29:10 AM	Helium valve closed
10/24/2011	10:29:10 AM	H2 valve closed
10/24/2011	10:29:10 AM	BCl3 valve closed
10/24/2011	10:29:10 AM	PH3 valve closed
10/24/2011	10:29:10 AM	SiCl4 pre valve closed
10/24/2011	10:29:10 AM	SiCl4 post valve closed
10/24/2011	10:29:10 AM	Main Vac valve closed
10/24/2011	10:29:10 AM	Bubbler valve closed
10/24/2011	10:29:10 AM	Bypass valve opened
10/24/2011	10:29:10 AM	Helium MFC set to  0.000000
10/24/2011	10:29:10 AM	H2 MFC set to  0.000000
10/24/2011	10:29:10 AM	BCl3 MFC set to  0.000000
10/24/2011	10:29:10 AM	PHl3 MFC set to  0.000000
10/24/2011	10:29:10 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:29:10 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:29:10 AM	Tube furnace set to 0
10/24/2011	10:29:40 AM	Helium valve closed
10/24/2011	10:29:40 AM	H2 valve closed
10/24/2011	10:29:40 AM	BCl3 valve closed
10/24/2011	10:29:40 AM	PH3 valve closed
10/24/2011	10:29:40 AM	SiCl4 pre valve closed
10/24/2011	10:29:40 AM	SiCl4 post valve closed
10/24/2011	10:29:40 AM	Bypass valve closed
10/24/2011	10:29:40 AM	Bubbler valve closed
10/24/2011	10:29:40 AM	Main Vac valve opened
10/24/2011	10:29:40 AM	Helium MFC set to  0.000000
10/24/2011	10:29:40 AM	H2 MFC set to  0.000000
10/24/2011	10:29:40 AM	BCl3 MFC set to  0.000000
10/24/2011	10:29:40 AM	PHl3 MFC set to  0.000000
10/24/2011	10:29:40 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:29:40 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:29:40 AM	Tube furnace set to 0
10/24/2011	10:30:11 AM	H2 valve closed
10/24/2011	10:30:11 AM	BCl3 valve closed
10/24/2011	10:30:11 AM	PH3 valve closed
10/24/2011	10:30:11 AM	SiCl4 pre valve closed
10/24/2011	10:30:11 AM	SiCl4 post valve closed
10/24/2011	10:30:11 AM	Bypass valve closed
10/24/2011	10:30:11 AM	Bubbler valve closed
10/24/2011	10:30:11 AM	Helium valve opened
10/24/2011	10:30:11 AM	Main Vac valve opened
10/24/2011	10:30:11 AM	Helium MFC set to  20.000000
10/24/2011	10:30:11 AM	H2 MFC set to  0.000000
10/24/2011	10:30:11 AM	BCl3 MFC set to  0.000000
10/24/2011	10:30:11 AM	PHl3 MFC set to  0.000000
10/24/2011	10:30:11 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:30:11 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:30:11 AM	Tube furnace set to 0
10/24/2011	10:30:41 AM	Helium valve closed
10/24/2011	10:30:41 AM	H2 valve closed
10/24/2011	10:30:41 AM	BCl3 valve closed
10/24/2011	10:30:41 AM	PH3 valve closed
10/24/2011	10:30:41 AM	SiCl4 pre valve closed
10/24/2011	10:30:41 AM	SiCl4 post valve closed
10/24/2011	10:30:41 AM	Bypass valve closed
10/24/2011	10:30:41 AM	Bubbler valve closed
10/24/2011	10:30:41 AM	Main Vac valve opened
10/24/2011	10:30:41 AM	Helium MFC set to  0.000000
10/24/2011	10:30:41 AM	H2 MFC set to  0.000000
10/24/2011	10:30:41 AM	BCl3 MFC set to  0.000000
10/24/2011	10:30:41 AM	PHl3 MFC set to  0.000000
10/24/2011	10:30:41 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:30:41 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:30:41 AM	Tube furnace set to 0
10/24/2011	10:31:11 AM	H2 valve closed
10/24/2011	10:31:11 AM	BCl3 valve closed
10/24/2011	10:31:11 AM	PH3 valve closed
10/24/2011	10:31:11 AM	SiCl4 pre valve closed
10/24/2011	10:31:11 AM	SiCl4 post valve closed
10/24/2011	10:31:11 AM	Bypass valve closed
10/24/2011	10:31:11 AM	Bubbler valve closed
10/24/2011	10:31:11 AM	Helium valve opened
10/24/2011	10:31:11 AM	Main Vac valve opened
10/24/2011	10:31:11 AM	Helium MFC set to  20.000000
10/24/2011	10:31:11 AM	H2 MFC set to  0.000000
10/24/2011	10:31:11 AM	BCl3 MFC set to  0.000000
10/24/2011	10:31:11 AM	PHl3 MFC set to  0.000000
10/24/2011	10:31:11 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:31:11 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:31:11 AM	Tube furnace set to 0
10/24/2011	10:31:41 AM	Helium valve closed
10/24/2011	10:31:41 AM	H2 valve closed
10/24/2011	10:31:41 AM	BCl3 valve closed
10/24/2011	10:31:41 AM	PH3 valve closed
10/24/2011	10:31:41 AM	SiCl4 pre valve closed
10/24/2011	10:31:41 AM	SiCl4 post valve closed
10/24/2011	10:31:41 AM	Bypass valve closed
10/24/2011	10:31:41 AM	Bubbler valve closed
10/24/2011	10:31:41 AM	Main Vac valve opened
10/24/2011	10:31:41 AM	Helium MFC set to  0.000000
10/24/2011	10:31:41 AM	H2 MFC set to  0.000000
10/24/2011	10:31:41 AM	BCl3 MFC set to  0.000000
10/24/2011	10:31:41 AM	PHl3 MFC set to  0.000000
10/24/2011	10:31:41 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:31:41 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:31:41 AM	Tube furnace set to 0
10/24/2011	10:32:11 AM	H2 valve closed
10/24/2011	10:32:11 AM	BCl3 valve closed
10/24/2011	10:32:11 AM	PH3 valve closed
10/24/2011	10:32:11 AM	SiCl4 pre valve closed
10/24/2011	10:32:11 AM	SiCl4 post valve closed
10/24/2011	10:32:11 AM	Bypass valve closed
10/24/2011	10:32:11 AM	Bubbler valve closed
10/24/2011	10:32:11 AM	Helium valve opened
10/24/2011	10:32:11 AM	Main Vac valve opened
10/24/2011	10:32:11 AM	Helium MFC set to  20.000000
10/24/2011	10:32:11 AM	H2 MFC set to  0.000000
10/24/2011	10:32:11 AM	BCl3 MFC set to  0.000000
10/24/2011	10:32:11 AM	PHl3 MFC set to  0.000000
10/24/2011	10:32:11 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:32:11 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:32:11 AM	Tube furnace set to 0
10/24/2011	10:32:41 AM	Helium valve closed
10/24/2011	10:32:41 AM	H2 valve closed
10/24/2011	10:32:41 AM	BCl3 valve closed
10/24/2011	10:32:41 AM	PH3 valve closed
10/24/2011	10:32:41 AM	SiCl4 pre valve closed
10/24/2011	10:32:41 AM	SiCl4 post valve closed
10/24/2011	10:32:42 AM	Bypass valve closed
10/24/2011	10:32:42 AM	Bubbler valve closed
10/24/2011	10:32:42 AM	Main Vac valve opened
10/24/2011	10:32:42 AM	Helium MFC set to  0.000000
10/24/2011	10:32:42 AM	H2 MFC set to  0.000000
10/24/2011	10:32:42 AM	BCl3 MFC set to  0.000000
10/24/2011	10:32:42 AM	PHl3 MFC set to  0.000000
10/24/2011	10:32:42 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:32:42 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:32:42 AM	Tube furnace set to 0
10/24/2011	10:33:12 AM	H2 valve closed
10/24/2011	10:33:12 AM	BCl3 valve closed
10/24/2011	10:33:12 AM	PH3 valve closed
10/24/2011	10:33:12 AM	SiCl4 pre valve closed
10/24/2011	10:33:12 AM	SiCl4 post valve closed
10/24/2011	10:33:12 AM	Bypass valve closed
10/24/2011	10:33:12 AM	Bubbler valve closed
10/24/2011	10:33:12 AM	Helium valve opened
10/24/2011	10:33:12 AM	Main Vac valve opened
10/24/2011	10:33:12 AM	Helium MFC set to  20.000000
10/24/2011	10:33:12 AM	H2 MFC set to  0.000000
10/24/2011	10:33:12 AM	BCl3 MFC set to  0.000000
10/24/2011	10:33:12 AM	PHl3 MFC set to  0.000000
10/24/2011	10:33:12 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:33:12 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:33:12 AM	Tube furnace set to 0
10/24/2011	10:33:42 AM	Helium valve closed
10/24/2011	10:33:42 AM	H2 valve closed
10/24/2011	10:33:42 AM	BCl3 valve closed
10/24/2011	10:33:42 AM	PH3 valve closed
10/24/2011	10:33:42 AM	SiCl4 pre valve closed
10/24/2011	10:33:42 AM	SiCl4 post valve closed
10/24/2011	10:33:42 AM	Bypass valve closed
10/24/2011	10:33:42 AM	Bubbler valve closed
10/24/2011	10:33:42 AM	Main Vac valve opened
10/24/2011	10:33:42 AM	Helium MFC set to  0.000000
10/24/2011	10:33:42 AM	H2 MFC set to  0.000000
10/24/2011	10:33:42 AM	BCl3 MFC set to  0.000000
10/24/2011	10:33:42 AM	PHl3 MFC set to  0.000000
10/24/2011	10:33:42 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:33:42 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:33:42 AM	Tube furnace set to 0
10/24/2011	10:34:12 AM	H2 valve closed
10/24/2011	10:34:12 AM	BCl3 valve closed
10/24/2011	10:34:12 AM	PH3 valve closed
10/24/2011	10:34:12 AM	SiCl4 pre valve closed
10/24/2011	10:34:12 AM	SiCl4 post valve closed
10/24/2011	10:34:12 AM	Bypass valve closed
10/24/2011	10:34:12 AM	Bubbler valve closed
10/24/2011	10:34:12 AM	Helium valve opened
10/24/2011	10:34:12 AM	Main Vac valve opened
10/24/2011	10:34:12 AM	Helium MFC set to  20.000000
10/24/2011	10:34:12 AM	H2 MFC set to  0.000000
10/24/2011	10:34:12 AM	BCl3 MFC set to  0.000000
10/24/2011	10:34:12 AM	PHl3 MFC set to  0.000000
10/24/2011	10:34:12 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:34:12 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:34:12 AM	Tube furnace set to 0
10/24/2011	10:34:42 AM	Helium valve closed
10/24/2011	10:34:42 AM	H2 valve closed
10/24/2011	10:34:42 AM	BCl3 valve closed
10/24/2011	10:34:42 AM	PH3 valve closed
10/24/2011	10:34:42 AM	SiCl4 pre valve closed
10/24/2011	10:34:42 AM	SiCl4 post valve closed
10/24/2011	10:34:42 AM	Bypass valve closed
10/24/2011	10:34:42 AM	Bubbler valve closed
10/24/2011	10:34:42 AM	Main Vac valve opened
10/24/2011	10:34:42 AM	Helium MFC set to  0.000000
10/24/2011	10:34:42 AM	H2 MFC set to  0.000000
10/24/2011	10:34:42 AM	BCl3 MFC set to  0.000000
10/24/2011	10:34:42 AM	PHl3 MFC set to  0.000000
10/24/2011	10:34:42 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:34:42 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:34:42 AM	Tube furnace set to 0
10/24/2011	10:35:12 AM	H2 valve closed
10/24/2011	10:35:12 AM	BCl3 valve closed
10/24/2011	10:35:12 AM	PH3 valve closed
10/24/2011	10:35:12 AM	SiCl4 pre valve closed
10/24/2011	10:35:12 AM	SiCl4 post valve closed
10/24/2011	10:35:12 AM	Bypass valve closed
10/24/2011	10:35:12 AM	Bubbler valve closed
10/24/2011	10:35:12 AM	Helium valve opened
10/24/2011	10:35:12 AM	Main Vac valve opened
10/24/2011	10:35:12 AM	Helium MFC set to  20.000000
10/24/2011	10:35:12 AM	H2 MFC set to  0.000000
10/24/2011	10:35:12 AM	BCl3 MFC set to  0.000000
10/24/2011	10:35:12 AM	PHl3 MFC set to  0.000000
10/24/2011	10:35:12 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:35:12 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:35:13 AM	Tube furnace set to 0
10/24/2011	10:35:43 AM	Helium valve closed
10/24/2011	10:35:43 AM	H2 valve closed
10/24/2011	10:35:43 AM	BCl3 valve closed
10/24/2011	10:35:43 AM	PH3 valve closed
10/24/2011	10:35:43 AM	SiCl4 pre valve closed
10/24/2011	10:35:43 AM	SiCl4 post valve closed
10/24/2011	10:35:43 AM	Bypass valve closed
10/24/2011	10:35:43 AM	Bubbler valve closed
10/24/2011	10:35:43 AM	Main Vac valve opened
10/24/2011	10:35:43 AM	Helium MFC set to  0.000000
10/24/2011	10:35:43 AM	H2 MFC set to  0.000000
10/24/2011	10:35:43 AM	BCl3 MFC set to  0.000000
10/24/2011	10:35:43 AM	PHl3 MFC set to  0.000000
10/24/2011	10:35:43 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:35:43 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:35:43 AM	Tube furnace set to 0
10/24/2011	10:36:13 AM	H2 valve closed
10/24/2011	10:36:13 AM	BCl3 valve closed
10/24/2011	10:36:13 AM	PH3 valve closed
10/24/2011	10:36:13 AM	SiCl4 pre valve closed
10/24/2011	10:36:13 AM	SiCl4 post valve closed
10/24/2011	10:36:13 AM	Bypass valve closed
10/24/2011	10:36:13 AM	Bubbler valve closed
10/24/2011	10:36:13 AM	Helium valve opened
10/24/2011	10:36:13 AM	Main Vac valve opened
10/24/2011	10:36:13 AM	Helium MFC set to  20.000000
10/24/2011	10:36:13 AM	H2 MFC set to  0.000000
10/24/2011	10:36:13 AM	BCl3 MFC set to  0.000000
10/24/2011	10:36:13 AM	PHl3 MFC set to  0.000000
10/24/2011	10:36:13 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:36:13 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:36:13 AM	Tube furnace set to 0
10/24/2011	10:36:43 AM	Helium valve closed
10/24/2011	10:36:43 AM	H2 valve closed
10/24/2011	10:36:43 AM	BCl3 valve closed
10/24/2011	10:36:43 AM	PH3 valve closed
10/24/2011	10:36:43 AM	SiCl4 pre valve closed
10/24/2011	10:36:43 AM	SiCl4 post valve closed
10/24/2011	10:36:43 AM	Bypass valve closed
10/24/2011	10:36:43 AM	Bubbler valve closed
10/24/2011	10:36:43 AM	Main Vac valve opened
10/24/2011	10:36:43 AM	Helium MFC set to  0.000000
10/24/2011	10:36:43 AM	H2 MFC set to  0.000000
10/24/2011	10:36:43 AM	BCl3 MFC set to  0.000000
10/24/2011	10:36:43 AM	PHl3 MFC set to  0.000000
10/24/2011	10:36:43 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:36:43 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:36:43 AM	Tube furnace set to 0
10/24/2011	10:37:13 AM	H2 valve closed
10/24/2011	10:37:13 AM	BCl3 valve closed
10/24/2011	10:37:13 AM	PH3 valve closed
10/24/2011	10:37:13 AM	SiCl4 pre valve closed
10/24/2011	10:37:13 AM	SiCl4 post valve closed
10/24/2011	10:37:13 AM	Bypass valve closed
10/24/2011	10:37:13 AM	Bubbler valve closed
10/24/2011	10:37:13 AM	Helium valve opened
10/24/2011	10:37:13 AM	Main Vac valve opened
10/24/2011	10:37:13 AM	Helium MFC set to  20.000000
10/24/2011	10:37:13 AM	H2 MFC set to  0.000000
10/24/2011	10:37:13 AM	BCl3 MFC set to  0.000000
10/24/2011	10:37:13 AM	PHl3 MFC set to  0.000000
10/24/2011	10:37:13 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:37:13 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:37:13 AM	Tube furnace set to 0
10/24/2011	10:37:43 AM	Helium valve closed
10/24/2011	10:37:43 AM	H2 valve closed
10/24/2011	10:37:43 AM	BCl3 valve closed
10/24/2011	10:37:43 AM	PH3 valve closed
10/24/2011	10:37:43 AM	SiCl4 pre valve closed
10/24/2011	10:37:43 AM	SiCl4 post valve closed
10/24/2011	10:37:43 AM	Bypass valve closed
10/24/2011	10:37:43 AM	Bubbler valve closed
10/24/2011	10:37:43 AM	Main Vac valve opened
10/24/2011	10:37:43 AM	Helium MFC set to  0.000000
10/24/2011	10:37:43 AM	H2 MFC set to  0.000000
10/24/2011	10:37:43 AM	BCl3 MFC set to  0.000000
10/24/2011	10:37:43 AM	PHl3 MFC set to  0.000000
10/24/2011	10:37:43 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:37:43 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:37:44 AM	Tube furnace set to 0
10/24/2011	10:38:14 AM	H2 valve closed
10/24/2011	10:38:14 AM	BCl3 valve closed
10/24/2011	10:38:14 AM	PH3 valve closed
10/24/2011	10:38:14 AM	SiCl4 pre valve closed
10/24/2011	10:38:14 AM	SiCl4 post valve closed
10/24/2011	10:38:14 AM	Bypass valve closed
10/24/2011	10:38:14 AM	Bubbler valve closed
10/24/2011	10:38:14 AM	Helium valve opened
10/24/2011	10:38:14 AM	Main Vac valve opened
10/24/2011	10:38:14 AM	Helium MFC set to  20.000000
10/24/2011	10:38:14 AM	H2 MFC set to  0.000000
10/24/2011	10:38:14 AM	BCl3 MFC set to  0.000000
10/24/2011	10:38:14 AM	PHl3 MFC set to  0.000000
10/24/2011	10:38:14 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:38:14 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:38:14 AM	Tube furnace set to 0
10/24/2011	10:38:44 AM	Helium valve closed
10/24/2011	10:38:44 AM	H2 valve closed
10/24/2011	10:38:44 AM	BCl3 valve closed
10/24/2011	10:38:44 AM	PH3 valve closed
10/24/2011	10:38:44 AM	SiCl4 pre valve closed
10/24/2011	10:38:44 AM	SiCl4 post valve closed
10/24/2011	10:38:44 AM	Bypass valve closed
10/24/2011	10:38:44 AM	Bubbler valve closed
10/24/2011	10:38:44 AM	Main Vac valve opened
10/24/2011	10:38:44 AM	Helium MFC set to  0.000000
10/24/2011	10:38:44 AM	H2 MFC set to  0.000000
10/24/2011	10:38:44 AM	BCl3 MFC set to  0.000000
10/24/2011	10:38:44 AM	PHl3 MFC set to  0.000000
10/24/2011	10:38:44 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:38:44 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:38:44 AM	Tube furnace set to 0
10/24/2011	10:39:14 AM	H2 valve closed
10/24/2011	10:39:14 AM	BCl3 valve closed
10/24/2011	10:39:14 AM	PH3 valve closed
10/24/2011	10:39:14 AM	SiCl4 pre valve closed
10/24/2011	10:39:14 AM	SiCl4 post valve closed
10/24/2011	10:39:14 AM	Bypass valve closed
10/24/2011	10:39:14 AM	Bubbler valve closed
10/24/2011	10:39:14 AM	Helium valve opened
10/24/2011	10:39:14 AM	Main Vac valve opened
10/24/2011	10:39:14 AM	Helium MFC set to  20.000000
10/24/2011	10:39:14 AM	H2 MFC set to  0.000000
10/24/2011	10:39:14 AM	BCl3 MFC set to  0.000000
10/24/2011	10:39:14 AM	PHl3 MFC set to  0.000000
10/24/2011	10:39:14 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:39:14 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:39:14 AM	Tube furnace set to 0
10/24/2011	10:39:44 AM	Helium valve closed
10/24/2011	10:39:44 AM	H2 valve closed
10/24/2011	10:39:44 AM	BCl3 valve closed
10/24/2011	10:39:44 AM	PH3 valve closed
10/24/2011	10:39:44 AM	SiCl4 pre valve closed
10/24/2011	10:39:44 AM	SiCl4 post valve closed
10/24/2011	10:39:44 AM	Bypass valve closed
10/24/2011	10:39:44 AM	Bubbler valve closed
10/24/2011	10:39:44 AM	Main Vac valve opened
10/24/2011	10:39:44 AM	Helium MFC set to  0.000000
10/24/2011	10:39:44 AM	H2 MFC set to  0.000000
10/24/2011	10:39:44 AM	BCl3 MFC set to  0.000000
10/24/2011	10:39:44 AM	PHl3 MFC set to  0.000000
10/24/2011	10:39:44 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:39:44 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:39:44 AM	Tube furnace set to 0
10/24/2011	10:39:45 AM	Run finished at 10:39 AM
10/24/2011	10:39:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/24/2011	10:51:28 AM	Recipe started at 10:51 AM
10/24/2011	10:51:28 AM	Helium valve closed
10/24/2011	10:51:28 AM	H2 valve closed
10/24/2011	10:51:28 AM	BCl3 valve closed
10/24/2011	10:51:28 AM	PH3 valve closed
10/24/2011	10:51:28 AM	SiCl4 pre valve closed
10/24/2011	10:51:28 AM	SiCl4 post valve closed
10/24/2011	10:51:28 AM	Main Vac valve closed
10/24/2011	10:51:28 AM	Bypass valve closed
10/24/2011	10:51:28 AM	Bubbler valve closed
10/24/2011	10:51:28 AM	Helium MFC set to  0.000000
10/24/2011	10:51:28 AM	H2 MFC set to  0.000000
10/24/2011	10:51:28 AM	BCl3 MFC set to  0.000000
10/24/2011	10:51:28 AM	PHl3 MFC set to  0.000000
10/24/2011	10:51:28 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:51:28 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:51:28 AM	Tube furnace set to 0
10/24/2011	10:51:31 AM	Helium valve closed
10/24/2011	10:51:31 AM	BCl3 valve closed
10/24/2011	10:51:31 AM	PH3 valve closed
10/24/2011	10:51:31 AM	SiCl4 pre valve closed
10/24/2011	10:51:31 AM	SiCl4 post valve closed
10/24/2011	10:51:31 AM	Main Vac valve closed
10/24/2011	10:51:31 AM	Bypass valve closed
10/24/2011	10:51:31 AM	Bubbler valve closed
10/24/2011	10:51:31 AM	H2 valve opened
10/24/2011	10:51:31 AM	Helium MFC set to  0.000000
10/24/2011	10:51:31 AM	H2 MFC set to  500.000000
10/24/2011	10:51:31 AM	BCl3 MFC set to  0.000000
10/24/2011	10:51:31 AM	PHl3 MFC set to  0.000000
10/24/2011	10:51:31 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:51:31 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:51:31 AM	Tube furnace set to 0
10/24/2011	10:52:38 AM	Helium valve closed
10/24/2011	10:52:38 AM	BCl3 valve closed
10/24/2011	10:52:38 AM	PH3 valve closed
10/24/2011	10:52:38 AM	SiCl4 pre valve closed
10/24/2011	10:52:38 AM	SiCl4 post valve closed
10/24/2011	10:52:38 AM	Main Vac valve closed
10/24/2011	10:52:38 AM	Bypass valve closed
10/24/2011	10:52:38 AM	H2 valve opened
10/24/2011	10:52:38 AM	Bubbler valve opened
10/24/2011	10:52:38 AM	Helium MFC set to  0.000000
10/24/2011	10:52:38 AM	H2 MFC set to  500.000000
10/24/2011	10:52:38 AM	BCl3 MFC set to  0.000000
10/24/2011	10:52:38 AM	PHl3 MFC set to  0.000000
10/24/2011	10:52:38 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:52:38 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:52:38 AM	Tube furnace set to 0
10/24/2011	10:52:39 AM	Helium valve closed
10/24/2011	10:52:39 AM	BCl3 valve closed
10/24/2011	10:52:39 AM	PH3 valve closed
10/24/2011	10:52:39 AM	SiCl4 pre valve closed
10/24/2011	10:52:39 AM	SiCl4 post valve closed
10/24/2011	10:52:39 AM	Main Vac valve closed
10/24/2011	10:52:39 AM	Bypass valve closed
10/24/2011	10:52:39 AM	H2 valve opened
10/24/2011	10:52:39 AM	Bubbler valve opened
10/24/2011	10:52:39 AM	Helium MFC set to  0.000000
10/24/2011	10:52:39 AM	H2 MFC set to  500.000000
10/24/2011	10:52:39 AM	BCl3 MFC set to  0.000000
10/24/2011	10:52:39 AM	PHl3 MFC set to  0.000000
10/24/2011	10:52:39 AM	SiCl4 MFC set to  0.000000
10/24/2011	10:52:39 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	10:52:39 AM	Tube furnace set to 1010
10/24/2011	11:12:39 AM	Helium valve closed
10/24/2011	11:12:39 AM	BCl3 valve closed
10/24/2011	11:12:39 AM	PH3 valve closed
10/24/2011	11:12:39 AM	Main Vac valve closed
10/24/2011	11:12:39 AM	Bypass valve closed
10/24/2011	11:12:39 AM	H2 valve opened
10/24/2011	11:12:39 AM	SiCl4 pre valve opened
10/24/2011	11:12:39 AM	SiCl4 post valve opened
10/24/2011	11:12:39 AM	Bubbler valve opened
10/24/2011	11:12:39 AM	Helium MFC set to  0.000000
10/24/2011	11:12:39 AM	H2 MFC set to  500.000000
10/24/2011	11:12:39 AM	BCl3 MFC set to  0.000000
10/24/2011	11:12:39 AM	PHl3 MFC set to  0.000000
10/24/2011	11:12:39 AM	SiCl4 MFC set to  40.000000
10/24/2011	11:12:39 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:12:40 AM	Tube furnace set to 1010
10/24/2011	11:26:40 AM	H2 valve closed
10/24/2011	11:26:40 AM	BCl3 valve closed
10/24/2011	11:26:40 AM	PH3 valve closed
10/24/2011	11:26:40 AM	SiCl4 pre valve closed
10/24/2011	11:26:40 AM	SiCl4 post valve closed
10/24/2011	11:26:40 AM	Main Vac valve closed
10/24/2011	11:26:40 AM	Bypass valve closed
10/24/2011	11:26:40 AM	Helium valve opened
10/24/2011	11:26:40 AM	Bubbler valve opened
10/24/2011	11:26:40 AM	Helium MFC set to  500.000000
10/24/2011	11:26:40 AM	H2 MFC set to  0.000000
10/24/2011	11:26:40 AM	BCl3 MFC set to  0.000000
10/24/2011	11:26:40 AM	PHl3 MFC set to  0.000000
10/24/2011	11:26:40 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:26:40 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:26:40 AM	Tube furnace set to 0
10/24/2011	11:36:43 AM	Helium valve closed
10/24/2011	11:36:43 AM	H2 valve closed
10/24/2011	11:36:43 AM	BCl3 valve closed
10/24/2011	11:36:43 AM	PH3 valve closed
10/24/2011	11:36:43 AM	SiCl4 pre valve closed
10/24/2011	11:36:43 AM	SiCl4 post valve closed
10/24/2011	11:36:43 AM	Main Vac valve closed
10/24/2011	11:36:43 AM	Bubbler valve closed
10/24/2011	11:36:43 AM	Bypass valve closed
10/24/2011	11:36:43 AM	Helium MFC set to  0.000000
10/24/2011	11:36:43 AM	H2 MFC set to  0.000000
10/24/2011	11:36:43 AM	BCl3 MFC set to  0.000000
10/24/2011	11:36:43 AM	PHl3 MFC set to  0.000000
10/24/2011	11:36:43 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:36:43 AM	Bypass solenoid MFC set to  760.000000
10/24/2011	11:36:43 AM	Tube furnace set to 0
10/24/2011	11:36:43 AM	Baratron reads 743.359977 Torr and NaOH valve is open.  Emergency exit.
10/24/2011	11:44:25 AM	Run aborted at 11:44 AM
10/24/2011	11:44:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	11:44:28 AM	Recipe started at 11:44 AM
10/24/2011	11:44:28 AM	Helium valve closed
10/24/2011	11:44:28 AM	H2 valve closed
10/24/2011	11:44:28 AM	BCl3 valve closed
10/24/2011	11:44:28 AM	PH3 valve closed
10/24/2011	11:44:28 AM	SiCl4 pre valve closed
10/24/2011	11:44:28 AM	SiCl4 post valve closed
10/24/2011	11:44:28 AM	Main Vac valve closed
10/24/2011	11:44:28 AM	Bubbler valve closed
10/24/2011	11:44:28 AM	Bypass valve opened
10/24/2011	11:44:28 AM	Helium MFC set to  0.000000
10/24/2011	11:44:28 AM	H2 MFC set to  0.000000
10/24/2011	11:44:28 AM	BCl3 MFC set to  0.000000
10/24/2011	11:44:28 AM	PHl3 MFC set to  0.000000
10/24/2011	11:44:28 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:44:28 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:44:28 AM	Tube furnace set to 0
10/24/2011	11:45:35 AM	Helium valve closed
10/24/2011	11:45:35 AM	H2 valve closed
10/24/2011	11:45:35 AM	BCl3 valve closed
10/24/2011	11:45:35 AM	PH3 valve closed
10/24/2011	11:45:35 AM	SiCl4 pre valve closed
10/24/2011	11:45:35 AM	SiCl4 post valve closed
10/24/2011	11:45:35 AM	Main Vac valve closed
10/24/2011	11:45:35 AM	Bubbler valve closed
10/24/2011	11:45:35 AM	Bypass valve opened
10/24/2011	11:45:35 AM	Helium MFC set to  0.000000
10/24/2011	11:45:35 AM	H2 MFC set to  0.000000
10/24/2011	11:45:35 AM	BCl3 MFC set to  0.000000
10/24/2011	11:45:35 AM	PHl3 MFC set to  0.000000
10/24/2011	11:45:35 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:45:35 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:45:35 AM	Tube furnace set to 0
10/24/2011	11:46:35 AM	Helium valve closed
10/24/2011	11:46:35 AM	H2 valve closed
10/24/2011	11:46:35 AM	BCl3 valve closed
10/24/2011	11:46:35 AM	PH3 valve closed
10/24/2011	11:46:35 AM	SiCl4 pre valve closed
10/24/2011	11:46:35 AM	SiCl4 post valve closed
10/24/2011	11:46:35 AM	Bypass valve closed
10/24/2011	11:46:35 AM	Bubbler valve closed
10/24/2011	11:46:35 AM	Main Vac valve opened
10/24/2011	11:46:35 AM	Helium MFC set to  0.000000
10/24/2011	11:46:35 AM	H2 MFC set to  0.000000
10/24/2011	11:46:35 AM	BCl3 MFC set to  0.000000
10/24/2011	11:46:35 AM	PHl3 MFC set to  0.000000
10/24/2011	11:46:35 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:46:35 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:46:35 AM	Tube furnace set to 0
10/24/2011	11:46:36 AM	Run finished at 11:46 AM
10/24/2011	11:46:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	11:50:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/24/2011	11:50:21 AM	Recipe started at 11:50 AM
10/24/2011	11:50:21 AM	Helium valve closed
10/24/2011	11:50:21 AM	H2 valve closed
10/24/2011	11:50:21 AM	BCl3 valve closed
10/24/2011	11:50:21 AM	PH3 valve closed
10/24/2011	11:50:21 AM	SiCl4 pre valve closed
10/24/2011	11:50:21 AM	SiCl4 post valve closed
10/24/2011	11:50:21 AM	Main Vac valve closed
10/24/2011	11:50:21 AM	Bubbler valve closed
10/24/2011	11:50:21 AM	Bypass valve opened
10/24/2011	11:50:21 AM	Helium MFC set to  0.000000
10/24/2011	11:50:21 AM	H2 MFC set to  0.000000
10/24/2011	11:50:21 AM	BCl3 MFC set to  0.000000
10/24/2011	11:50:21 AM	PHl3 MFC set to  0.000000
10/24/2011	11:50:21 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:50:21 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:50:21 AM	Tube furnace set to 0
10/24/2011	11:50:21 AM	Helium valve closed
10/24/2011	11:50:21 AM	H2 valve closed
10/24/2011	11:50:21 AM	BCl3 valve closed
10/24/2011	11:50:21 AM	PH3 valve closed
10/24/2011	11:50:21 AM	SiCl4 pre valve closed
10/24/2011	11:50:21 AM	SiCl4 post valve closed
10/24/2011	11:50:21 AM	Main Vac valve closed
10/24/2011	11:50:21 AM	Bubbler valve closed
10/24/2011	11:50:21 AM	Bypass valve opened
10/24/2011	11:50:21 AM	Helium MFC set to  0.000000
10/24/2011	11:50:21 AM	H2 MFC set to  0.000000
10/24/2011	11:50:21 AM	BCl3 MFC set to  0.000000
10/24/2011	11:50:21 AM	PHl3 MFC set to  0.000000
10/24/2011	11:50:21 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:50:21 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:50:21 AM	Tube furnace set to 0
10/24/2011	11:50:51 AM	Helium valve closed
10/24/2011	11:50:51 AM	H2 valve closed
10/24/2011	11:50:51 AM	BCl3 valve closed
10/24/2011	11:50:51 AM	PH3 valve closed
10/24/2011	11:50:51 AM	SiCl4 pre valve closed
10/24/2011	11:50:51 AM	SiCl4 post valve closed
10/24/2011	11:50:51 AM	Bypass valve closed
10/24/2011	11:50:51 AM	Bubbler valve closed
10/24/2011	11:50:51 AM	Main Vac valve opened
10/24/2011	11:50:51 AM	Helium MFC set to  0.000000
10/24/2011	11:50:51 AM	H2 MFC set to  0.000000
10/24/2011	11:50:51 AM	BCl3 MFC set to  0.000000
10/24/2011	11:50:51 AM	PHl3 MFC set to  0.000000
10/24/2011	11:50:51 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:50:51 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:50:51 AM	Tube furnace set to 0
10/24/2011	11:51:21 AM	H2 valve closed
10/24/2011	11:51:21 AM	BCl3 valve closed
10/24/2011	11:51:21 AM	PH3 valve closed
10/24/2011	11:51:21 AM	SiCl4 pre valve closed
10/24/2011	11:51:21 AM	SiCl4 post valve closed
10/24/2011	11:51:21 AM	Bypass valve closed
10/24/2011	11:51:21 AM	Bubbler valve closed
10/24/2011	11:51:21 AM	Helium valve opened
10/24/2011	11:51:21 AM	Main Vac valve opened
10/24/2011	11:51:21 AM	Helium MFC set to  20.000000
10/24/2011	11:51:21 AM	H2 MFC set to  0.000000
10/24/2011	11:51:21 AM	BCl3 MFC set to  0.000000
10/24/2011	11:51:21 AM	PHl3 MFC set to  0.000000
10/24/2011	11:51:21 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:51:21 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:51:22 AM	Tube furnace set to 0
10/24/2011	11:51:52 AM	Helium valve closed
10/24/2011	11:51:52 AM	H2 valve closed
10/24/2011	11:51:52 AM	BCl3 valve closed
10/24/2011	11:51:52 AM	PH3 valve closed
10/24/2011	11:51:52 AM	SiCl4 pre valve closed
10/24/2011	11:51:52 AM	SiCl4 post valve closed
10/24/2011	11:51:52 AM	Bypass valve closed
10/24/2011	11:51:52 AM	Bubbler valve closed
10/24/2011	11:51:52 AM	Main Vac valve opened
10/24/2011	11:51:52 AM	Helium MFC set to  0.000000
10/24/2011	11:51:52 AM	H2 MFC set to  0.000000
10/24/2011	11:51:52 AM	BCl3 MFC set to  0.000000
10/24/2011	11:51:52 AM	PHl3 MFC set to  0.000000
10/24/2011	11:51:52 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:51:52 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:51:52 AM	Tube furnace set to 0
10/24/2011	11:52:22 AM	H2 valve closed
10/24/2011	11:52:22 AM	BCl3 valve closed
10/24/2011	11:52:22 AM	PH3 valve closed
10/24/2011	11:52:22 AM	SiCl4 pre valve closed
10/24/2011	11:52:22 AM	SiCl4 post valve closed
10/24/2011	11:52:22 AM	Bypass valve closed
10/24/2011	11:52:22 AM	Bubbler valve closed
10/24/2011	11:52:22 AM	Helium valve opened
10/24/2011	11:52:22 AM	Main Vac valve opened
10/24/2011	11:52:22 AM	Helium MFC set to  20.000000
10/24/2011	11:52:22 AM	H2 MFC set to  0.000000
10/24/2011	11:52:22 AM	BCl3 MFC set to  0.000000
10/24/2011	11:52:22 AM	PHl3 MFC set to  0.000000
10/24/2011	11:52:22 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:52:22 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:52:22 AM	Tube furnace set to 0
10/24/2011	11:52:52 AM	Helium valve closed
10/24/2011	11:52:52 AM	H2 valve closed
10/24/2011	11:52:52 AM	BCl3 valve closed
10/24/2011	11:52:52 AM	PH3 valve closed
10/24/2011	11:52:52 AM	SiCl4 pre valve closed
10/24/2011	11:52:52 AM	SiCl4 post valve closed
10/24/2011	11:52:52 AM	Bypass valve closed
10/24/2011	11:52:52 AM	Bubbler valve closed
10/24/2011	11:52:52 AM	Main Vac valve opened
10/24/2011	11:52:52 AM	Helium MFC set to  0.000000
10/24/2011	11:52:52 AM	H2 MFC set to  0.000000
10/24/2011	11:52:52 AM	BCl3 MFC set to  0.000000
10/24/2011	11:52:52 AM	PHl3 MFC set to  0.000000
10/24/2011	11:52:52 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:52:52 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:52:52 AM	Tube furnace set to 0
10/24/2011	11:53:22 AM	H2 valve closed
10/24/2011	11:53:22 AM	BCl3 valve closed
10/24/2011	11:53:22 AM	PH3 valve closed
10/24/2011	11:53:22 AM	SiCl4 pre valve closed
10/24/2011	11:53:22 AM	SiCl4 post valve closed
10/24/2011	11:53:22 AM	Bypass valve closed
10/24/2011	11:53:22 AM	Bubbler valve closed
10/24/2011	11:53:22 AM	Helium valve opened
10/24/2011	11:53:22 AM	Main Vac valve opened
10/24/2011	11:53:22 AM	Helium MFC set to  20.000000
10/24/2011	11:53:22 AM	H2 MFC set to  0.000000
10/24/2011	11:53:22 AM	BCl3 MFC set to  0.000000
10/24/2011	11:53:22 AM	PHl3 MFC set to  0.000000
10/24/2011	11:53:22 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:53:22 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:53:22 AM	Tube furnace set to 0
10/24/2011	11:53:52 AM	Helium valve closed
10/24/2011	11:53:52 AM	H2 valve closed
10/24/2011	11:53:52 AM	BCl3 valve closed
10/24/2011	11:53:52 AM	PH3 valve closed
10/24/2011	11:53:52 AM	SiCl4 pre valve closed
10/24/2011	11:53:52 AM	SiCl4 post valve closed
10/24/2011	11:53:52 AM	Bypass valve closed
10/24/2011	11:53:52 AM	Bubbler valve closed
10/24/2011	11:53:52 AM	Main Vac valve opened
10/24/2011	11:53:52 AM	Helium MFC set to  0.000000
10/24/2011	11:53:52 AM	H2 MFC set to  0.000000
10/24/2011	11:53:52 AM	BCl3 MFC set to  0.000000
10/24/2011	11:53:52 AM	PHl3 MFC set to  0.000000
10/24/2011	11:53:52 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:53:52 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:53:53 AM	Tube furnace set to 0
10/24/2011	11:54:23 AM	H2 valve closed
10/24/2011	11:54:23 AM	BCl3 valve closed
10/24/2011	11:54:23 AM	PH3 valve closed
10/24/2011	11:54:23 AM	SiCl4 pre valve closed
10/24/2011	11:54:23 AM	SiCl4 post valve closed
10/24/2011	11:54:23 AM	Bypass valve closed
10/24/2011	11:54:23 AM	Bubbler valve closed
10/24/2011	11:54:23 AM	Helium valve opened
10/24/2011	11:54:23 AM	Main Vac valve opened
10/24/2011	11:54:23 AM	Helium MFC set to  20.000000
10/24/2011	11:54:23 AM	H2 MFC set to  0.000000
10/24/2011	11:54:23 AM	BCl3 MFC set to  0.000000
10/24/2011	11:54:23 AM	PHl3 MFC set to  0.000000
10/24/2011	11:54:23 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:54:23 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:54:23 AM	Tube furnace set to 0
10/24/2011	11:54:53 AM	Helium valve closed
10/24/2011	11:54:53 AM	H2 valve closed
10/24/2011	11:54:53 AM	BCl3 valve closed
10/24/2011	11:54:53 AM	PH3 valve closed
10/24/2011	11:54:53 AM	SiCl4 pre valve closed
10/24/2011	11:54:53 AM	SiCl4 post valve closed
10/24/2011	11:54:53 AM	Bypass valve closed
10/24/2011	11:54:53 AM	Bubbler valve closed
10/24/2011	11:54:53 AM	Main Vac valve opened
10/24/2011	11:54:53 AM	Helium MFC set to  0.000000
10/24/2011	11:54:53 AM	H2 MFC set to  0.000000
10/24/2011	11:54:53 AM	BCl3 MFC set to  0.000000
10/24/2011	11:54:53 AM	PHl3 MFC set to  0.000000
10/24/2011	11:54:53 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:54:53 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:54:53 AM	Tube furnace set to 0
10/24/2011	11:55:23 AM	H2 valve closed
10/24/2011	11:55:23 AM	BCl3 valve closed
10/24/2011	11:55:23 AM	PH3 valve closed
10/24/2011	11:55:23 AM	SiCl4 pre valve closed
10/24/2011	11:55:23 AM	SiCl4 post valve closed
10/24/2011	11:55:23 AM	Bypass valve closed
10/24/2011	11:55:23 AM	Bubbler valve closed
10/24/2011	11:55:23 AM	Helium valve opened
10/24/2011	11:55:23 AM	Main Vac valve opened
10/24/2011	11:55:23 AM	Helium MFC set to  20.000000
10/24/2011	11:55:23 AM	H2 MFC set to  0.000000
10/24/2011	11:55:23 AM	BCl3 MFC set to  0.000000
10/24/2011	11:55:23 AM	PHl3 MFC set to  0.000000
10/24/2011	11:55:23 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:55:23 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:55:23 AM	Tube furnace set to 0
10/24/2011	11:55:53 AM	Helium valve closed
10/24/2011	11:55:53 AM	H2 valve closed
10/24/2011	11:55:53 AM	BCl3 valve closed
10/24/2011	11:55:53 AM	PH3 valve closed
10/24/2011	11:55:53 AM	SiCl4 pre valve closed
10/24/2011	11:55:53 AM	SiCl4 post valve closed
10/24/2011	11:55:53 AM	Bypass valve closed
10/24/2011	11:55:53 AM	Bubbler valve closed
10/24/2011	11:55:53 AM	Main Vac valve opened
10/24/2011	11:55:53 AM	Helium MFC set to  0.000000
10/24/2011	11:55:53 AM	H2 MFC set to  0.000000
10/24/2011	11:55:53 AM	BCl3 MFC set to  0.000000
10/24/2011	11:55:53 AM	PHl3 MFC set to  0.000000
10/24/2011	11:55:53 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:55:53 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:55:54 AM	Tube furnace set to 0
10/24/2011	11:56:24 AM	H2 valve closed
10/24/2011	11:56:24 AM	BCl3 valve closed
10/24/2011	11:56:24 AM	PH3 valve closed
10/24/2011	11:56:24 AM	SiCl4 pre valve closed
10/24/2011	11:56:24 AM	SiCl4 post valve closed
10/24/2011	11:56:24 AM	Bypass valve closed
10/24/2011	11:56:24 AM	Bubbler valve closed
10/24/2011	11:56:24 AM	Helium valve opened
10/24/2011	11:56:24 AM	Main Vac valve opened
10/24/2011	11:56:24 AM	Helium MFC set to  20.000000
10/24/2011	11:56:24 AM	H2 MFC set to  0.000000
10/24/2011	11:56:24 AM	BCl3 MFC set to  0.000000
10/24/2011	11:56:24 AM	PHl3 MFC set to  0.000000
10/24/2011	11:56:24 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:56:24 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:56:24 AM	Tube furnace set to 0
10/24/2011	11:56:54 AM	Helium valve closed
10/24/2011	11:56:54 AM	H2 valve closed
10/24/2011	11:56:54 AM	BCl3 valve closed
10/24/2011	11:56:54 AM	PH3 valve closed
10/24/2011	11:56:54 AM	SiCl4 pre valve closed
10/24/2011	11:56:54 AM	SiCl4 post valve closed
10/24/2011	11:56:54 AM	Bypass valve closed
10/24/2011	11:56:54 AM	Bubbler valve closed
10/24/2011	11:56:54 AM	Main Vac valve opened
10/24/2011	11:56:54 AM	Helium MFC set to  0.000000
10/24/2011	11:56:54 AM	H2 MFC set to  0.000000
10/24/2011	11:56:54 AM	BCl3 MFC set to  0.000000
10/24/2011	11:56:54 AM	PHl3 MFC set to  0.000000
10/24/2011	11:56:54 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:56:54 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:56:54 AM	Tube furnace set to 0
10/24/2011	11:57:24 AM	H2 valve closed
10/24/2011	11:57:24 AM	BCl3 valve closed
10/24/2011	11:57:24 AM	PH3 valve closed
10/24/2011	11:57:24 AM	SiCl4 pre valve closed
10/24/2011	11:57:24 AM	SiCl4 post valve closed
10/24/2011	11:57:24 AM	Bypass valve closed
10/24/2011	11:57:24 AM	Bubbler valve closed
10/24/2011	11:57:24 AM	Helium valve opened
10/24/2011	11:57:24 AM	Main Vac valve opened
10/24/2011	11:57:24 AM	Helium MFC set to  20.000000
10/24/2011	11:57:24 AM	H2 MFC set to  0.000000
10/24/2011	11:57:24 AM	BCl3 MFC set to  0.000000
10/24/2011	11:57:24 AM	PHl3 MFC set to  0.000000
10/24/2011	11:57:24 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:57:24 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:57:24 AM	Tube furnace set to 0
10/24/2011	11:57:54 AM	Helium valve closed
10/24/2011	11:57:54 AM	H2 valve closed
10/24/2011	11:57:54 AM	BCl3 valve closed
10/24/2011	11:57:54 AM	PH3 valve closed
10/24/2011	11:57:54 AM	SiCl4 pre valve closed
10/24/2011	11:57:54 AM	SiCl4 post valve closed
10/24/2011	11:57:54 AM	Bypass valve closed
10/24/2011	11:57:54 AM	Bubbler valve closed
10/24/2011	11:57:54 AM	Main Vac valve opened
10/24/2011	11:57:54 AM	Helium MFC set to  0.000000
10/24/2011	11:57:54 AM	H2 MFC set to  0.000000
10/24/2011	11:57:54 AM	BCl3 MFC set to  0.000000
10/24/2011	11:57:54 AM	PHl3 MFC set to  0.000000
10/24/2011	11:57:54 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:57:54 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:57:54 AM	Tube furnace set to 0
10/24/2011	11:58:24 AM	H2 valve closed
10/24/2011	11:58:24 AM	BCl3 valve closed
10/24/2011	11:58:24 AM	PH3 valve closed
10/24/2011	11:58:24 AM	SiCl4 pre valve closed
10/24/2011	11:58:24 AM	SiCl4 post valve closed
10/24/2011	11:58:24 AM	Bypass valve closed
10/24/2011	11:58:24 AM	Bubbler valve closed
10/24/2011	11:58:24 AM	Helium valve opened
10/24/2011	11:58:24 AM	Main Vac valve opened
10/24/2011	11:58:24 AM	Helium MFC set to  20.000000
10/24/2011	11:58:24 AM	H2 MFC set to  0.000000
10/24/2011	11:58:24 AM	BCl3 MFC set to  0.000000
10/24/2011	11:58:24 AM	PHl3 MFC set to  0.000000
10/24/2011	11:58:24 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:58:24 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:58:25 AM	Tube furnace set to 0
10/24/2011	11:58:55 AM	Helium valve closed
10/24/2011	11:58:55 AM	H2 valve closed
10/24/2011	11:58:55 AM	BCl3 valve closed
10/24/2011	11:58:55 AM	PH3 valve closed
10/24/2011	11:58:55 AM	SiCl4 pre valve closed
10/24/2011	11:58:55 AM	SiCl4 post valve closed
10/24/2011	11:58:55 AM	Bypass valve closed
10/24/2011	11:58:55 AM	Bubbler valve closed
10/24/2011	11:58:55 AM	Main Vac valve opened
10/24/2011	11:58:55 AM	Helium MFC set to  0.000000
10/24/2011	11:58:55 AM	H2 MFC set to  0.000000
10/24/2011	11:58:55 AM	BCl3 MFC set to  0.000000
10/24/2011	11:58:55 AM	PHl3 MFC set to  0.000000
10/24/2011	11:58:55 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:58:55 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:58:55 AM	Tube furnace set to 0
10/24/2011	11:59:25 AM	H2 valve closed
10/24/2011	11:59:25 AM	BCl3 valve closed
10/24/2011	11:59:25 AM	PH3 valve closed
10/24/2011	11:59:25 AM	SiCl4 pre valve closed
10/24/2011	11:59:25 AM	SiCl4 post valve closed
10/24/2011	11:59:25 AM	Bypass valve closed
10/24/2011	11:59:25 AM	Bubbler valve closed
10/24/2011	11:59:25 AM	Helium valve opened
10/24/2011	11:59:25 AM	Main Vac valve opened
10/24/2011	11:59:25 AM	Helium MFC set to  20.000000
10/24/2011	11:59:25 AM	H2 MFC set to  0.000000
10/24/2011	11:59:25 AM	BCl3 MFC set to  0.000000
10/24/2011	11:59:25 AM	PHl3 MFC set to  0.000000
10/24/2011	11:59:25 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:59:25 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:59:25 AM	Tube furnace set to 0
10/24/2011	11:59:55 AM	Helium valve closed
10/24/2011	11:59:55 AM	H2 valve closed
10/24/2011	11:59:55 AM	BCl3 valve closed
10/24/2011	11:59:55 AM	PH3 valve closed
10/24/2011	11:59:55 AM	SiCl4 pre valve closed
10/24/2011	11:59:55 AM	SiCl4 post valve closed
10/24/2011	11:59:55 AM	Bypass valve closed
10/24/2011	11:59:55 AM	Bubbler valve closed
10/24/2011	11:59:55 AM	Main Vac valve opened
10/24/2011	11:59:55 AM	Helium MFC set to  0.000000
10/24/2011	11:59:55 AM	H2 MFC set to  0.000000
10/24/2011	11:59:55 AM	BCl3 MFC set to  0.000000
10/24/2011	11:59:55 AM	PHl3 MFC set to  0.000000
10/24/2011	11:59:55 AM	SiCl4 MFC set to  0.000000
10/24/2011	11:59:55 AM	Bypass solenoid MFC set to  0.000000
10/24/2011	11:59:55 AM	Tube furnace set to 0
10/24/2011	12:00:25 PM	H2 valve closed
10/24/2011	12:00:25 PM	BCl3 valve closed
10/24/2011	12:00:25 PM	PH3 valve closed
10/24/2011	12:00:25 PM	SiCl4 pre valve closed
10/24/2011	12:00:25 PM	SiCl4 post valve closed
10/24/2011	12:00:25 PM	Bypass valve closed
10/24/2011	12:00:25 PM	Bubbler valve closed
10/24/2011	12:00:25 PM	Helium valve opened
10/24/2011	12:00:25 PM	Main Vac valve opened
10/24/2011	12:00:25 PM	Helium MFC set to  20.000000
10/24/2011	12:00:25 PM	H2 MFC set to  0.000000
10/24/2011	12:00:25 PM	BCl3 MFC set to  0.000000
10/24/2011	12:00:25 PM	PHl3 MFC set to  0.000000
10/24/2011	12:00:25 PM	SiCl4 MFC set to  0.000000
10/24/2011	12:00:25 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	12:00:25 PM	Tube furnace set to 0
10/24/2011	12:00:55 PM	Helium valve closed
10/24/2011	12:00:55 PM	H2 valve closed
10/24/2011	12:00:55 PM	BCl3 valve closed
10/24/2011	12:00:55 PM	PH3 valve closed
10/24/2011	12:00:55 PM	SiCl4 pre valve closed
10/24/2011	12:00:55 PM	SiCl4 post valve closed
10/24/2011	12:00:55 PM	Bypass valve closed
10/24/2011	12:00:55 PM	Bubbler valve closed
10/24/2011	12:00:55 PM	Main Vac valve opened
10/24/2011	12:00:56 PM	Helium MFC set to  0.000000
10/24/2011	12:00:56 PM	H2 MFC set to  0.000000
10/24/2011	12:00:56 PM	BCl3 MFC set to  0.000000
10/24/2011	12:00:56 PM	PHl3 MFC set to  0.000000
10/24/2011	12:00:56 PM	SiCl4 MFC set to  0.000000
10/24/2011	12:00:56 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	12:00:56 PM	Tube furnace set to 0
10/24/2011	12:00:57 PM	Run finished at 12:00 PM
10/24/2011	12:00:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/24/2011	1:12:59 PM	Recipe started at 1:12 PM
10/24/2011	1:12:59 PM	Helium valve closed
10/24/2011	1:12:59 PM	H2 valve closed
10/24/2011	1:12:59 PM	BCl3 valve closed
10/24/2011	1:12:59 PM	PH3 valve closed
10/24/2011	1:12:59 PM	SiCl4 pre valve closed
10/24/2011	1:12:59 PM	SiCl4 post valve closed
10/24/2011	1:12:59 PM	Main Vac valve closed
10/24/2011	1:12:59 PM	Bypass valve closed
10/24/2011	1:12:59 PM	Bubbler valve closed
10/24/2011	1:12:59 PM	Helium MFC set to  0.000000
10/24/2011	1:12:59 PM	H2 MFC set to  0.000000
10/24/2011	1:12:59 PM	BCl3 MFC set to  0.000000
10/24/2011	1:12:59 PM	PHl3 MFC set to  0.000000
10/24/2011	1:12:59 PM	SiCl4 MFC set to  0.000000
10/24/2011	1:12:59 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	1:12:59 PM	Tube furnace set to 0
10/24/2011	1:13:02 PM	Helium valve closed
10/24/2011	1:13:02 PM	BCl3 valve closed
10/24/2011	1:13:02 PM	PH3 valve closed
10/24/2011	1:13:02 PM	SiCl4 pre valve closed
10/24/2011	1:13:02 PM	SiCl4 post valve closed
10/24/2011	1:13:02 PM	Main Vac valve closed
10/24/2011	1:13:02 PM	Bypass valve closed
10/24/2011	1:13:02 PM	Bubbler valve closed
10/24/2011	1:13:02 PM	H2 valve opened
10/24/2011	1:13:02 PM	Helium MFC set to  0.000000
10/24/2011	1:13:02 PM	H2 MFC set to  500.000000
10/24/2011	1:13:02 PM	BCl3 MFC set to  0.000000
10/24/2011	1:13:02 PM	PHl3 MFC set to  0.000000
10/24/2011	1:13:02 PM	SiCl4 MFC set to  0.000000
10/24/2011	1:13:02 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	1:13:02 PM	Tube furnace set to 0
10/24/2011	1:14:08 PM	Helium valve closed
10/24/2011	1:14:08 PM	BCl3 valve closed
10/24/2011	1:14:08 PM	PH3 valve closed
10/24/2011	1:14:08 PM	SiCl4 pre valve closed
10/24/2011	1:14:08 PM	SiCl4 post valve closed
10/24/2011	1:14:08 PM	Main Vac valve closed
10/24/2011	1:14:08 PM	Bypass valve closed
10/24/2011	1:14:08 PM	H2 valve opened
10/24/2011	1:14:08 PM	Bubbler valve opened
10/24/2011	1:14:08 PM	Helium MFC set to  0.000000
10/24/2011	1:14:08 PM	H2 MFC set to  500.000000
10/24/2011	1:14:08 PM	BCl3 MFC set to  0.000000
10/24/2011	1:14:08 PM	PHl3 MFC set to  0.000000
10/24/2011	1:14:08 PM	SiCl4 MFC set to  0.000000
10/24/2011	1:14:08 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	1:14:08 PM	Tube furnace set to 0
10/24/2011	1:14:09 PM	Helium valve closed
10/24/2011	1:14:09 PM	BCl3 valve closed
10/24/2011	1:14:09 PM	PH3 valve closed
10/24/2011	1:14:09 PM	SiCl4 pre valve closed
10/24/2011	1:14:09 PM	SiCl4 post valve closed
10/24/2011	1:14:09 PM	Main Vac valve closed
10/24/2011	1:14:09 PM	Bypass valve closed
10/24/2011	1:14:09 PM	H2 valve opened
10/24/2011	1:14:09 PM	Bubbler valve opened
10/24/2011	1:14:09 PM	Helium MFC set to  0.000000
10/24/2011	1:14:09 PM	H2 MFC set to  500.000000
10/24/2011	1:14:09 PM	BCl3 MFC set to  0.000000
10/24/2011	1:14:09 PM	PHl3 MFC set to  0.000000
10/24/2011	1:14:09 PM	SiCl4 MFC set to  0.000000
10/24/2011	1:14:09 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	1:14:09 PM	Tube furnace set to 1010
10/24/2011	1:34:09 PM	Helium valve closed
10/24/2011	1:34:09 PM	BCl3 valve closed
10/24/2011	1:34:09 PM	PH3 valve closed
10/24/2011	1:34:09 PM	Main Vac valve closed
10/24/2011	1:34:09 PM	Bypass valve closed
10/24/2011	1:34:09 PM	H2 valve opened
10/24/2011	1:34:09 PM	SiCl4 pre valve opened
10/24/2011	1:34:09 PM	SiCl4 post valve opened
10/24/2011	1:34:09 PM	Bubbler valve opened
10/24/2011	1:34:09 PM	Helium MFC set to  0.000000
10/24/2011	1:34:09 PM	H2 MFC set to  500.000000
10/24/2011	1:34:09 PM	BCl3 MFC set to  0.000000
10/24/2011	1:34:09 PM	PHl3 MFC set to  0.000000
10/24/2011	1:34:09 PM	SiCl4 MFC set to  38.000000
10/24/2011	1:34:09 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	1:34:09 PM	Tube furnace set to 1010
10/24/2011	1:44:09 PM	H2 valve closed
10/24/2011	1:44:09 PM	BCl3 valve closed
10/24/2011	1:44:09 PM	PH3 valve closed
10/24/2011	1:44:09 PM	SiCl4 pre valve closed
10/24/2011	1:44:09 PM	SiCl4 post valve closed
10/24/2011	1:44:09 PM	Main Vac valve closed
10/24/2011	1:44:09 PM	Bypass valve closed
10/24/2011	1:44:09 PM	Helium valve opened
10/24/2011	1:44:09 PM	Bubbler valve opened
10/24/2011	1:44:09 PM	Helium MFC set to  500.000000
10/24/2011	1:44:09 PM	H2 MFC set to  0.000000
10/24/2011	1:44:09 PM	BCl3 MFC set to  0.000000
10/24/2011	1:44:09 PM	PHl3 MFC set to  0.000000
10/24/2011	1:44:09 PM	SiCl4 MFC set to  0.000000
10/24/2011	1:44:09 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	1:44:09 PM	Tube furnace set to 0
10/24/2011	2:24:09 PM	Helium valve closed
10/24/2011	2:24:09 PM	H2 valve closed
10/24/2011	2:24:09 PM	BCl3 valve closed
10/24/2011	2:24:09 PM	PH3 valve closed
10/24/2011	2:24:09 PM	SiCl4 pre valve closed
10/24/2011	2:24:09 PM	SiCl4 post valve closed
10/24/2011	2:24:09 PM	Main Vac valve closed
10/24/2011	2:24:09 PM	Bypass valve closed
10/24/2011	2:24:09 PM	Bubbler valve closed
10/24/2011	2:24:09 PM	Helium MFC set to  0.000000
10/24/2011	2:24:09 PM	H2 MFC set to  0.000000
10/24/2011	2:24:09 PM	BCl3 MFC set to  0.000000
10/24/2011	2:24:09 PM	PHl3 MFC set to  0.000000
10/24/2011	2:24:09 PM	SiCl4 MFC set to  0.000000
10/24/2011	2:24:09 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	2:24:10 PM	Tube furnace set to 0
10/24/2011	2:24:11 PM	Run finished at 2:24 PM
10/24/2011	3:05:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	3:05:54 PM	Recipe started at 3:05 PM
10/24/2011	3:05:54 PM	Helium valve closed
10/24/2011	3:05:54 PM	H2 valve closed
10/24/2011	3:05:54 PM	BCl3 valve closed
10/24/2011	3:05:54 PM	PH3 valve closed
10/24/2011	3:05:54 PM	SiCl4 pre valve closed
10/24/2011	3:05:54 PM	SiCl4 post valve closed
10/24/2011	3:05:54 PM	Main Vac valve closed
10/24/2011	3:05:54 PM	Bubbler valve closed
10/24/2011	3:05:54 PM	Bypass valve opened
10/24/2011	3:05:54 PM	Helium MFC set to  0.000000
10/24/2011	3:05:54 PM	H2 MFC set to  0.000000
10/24/2011	3:05:54 PM	BCl3 MFC set to  0.000000
10/24/2011	3:05:54 PM	PHl3 MFC set to  0.000000
10/24/2011	3:05:54 PM	SiCl4 MFC set to  0.000000
10/24/2011	3:05:54 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	3:05:54 PM	Tube furnace set to 0
10/24/2011	3:07:01 PM	Helium valve closed
10/24/2011	3:07:01 PM	H2 valve closed
10/24/2011	3:07:01 PM	BCl3 valve closed
10/24/2011	3:07:01 PM	PH3 valve closed
10/24/2011	3:07:01 PM	SiCl4 pre valve closed
10/24/2011	3:07:01 PM	SiCl4 post valve closed
10/24/2011	3:07:01 PM	Main Vac valve closed
10/24/2011	3:07:01 PM	Bubbler valve closed
10/24/2011	3:07:01 PM	Bypass valve opened
10/24/2011	3:07:01 PM	Helium MFC set to  0.000000
10/24/2011	3:07:01 PM	H2 MFC set to  0.000000
10/24/2011	3:07:01 PM	BCl3 MFC set to  0.000000
10/24/2011	3:07:01 PM	PHl3 MFC set to  0.000000
10/24/2011	3:07:01 PM	SiCl4 MFC set to  0.000000
10/24/2011	3:07:01 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	3:07:01 PM	Tube furnace set to 0
10/24/2011	3:08:01 PM	Helium valve closed
10/24/2011	3:08:01 PM	H2 valve closed
10/24/2011	3:08:01 PM	BCl3 valve closed
10/24/2011	3:08:01 PM	PH3 valve closed
10/24/2011	3:08:01 PM	SiCl4 pre valve closed
10/24/2011	3:08:01 PM	SiCl4 post valve closed
10/24/2011	3:08:01 PM	Bypass valve closed
10/24/2011	3:08:01 PM	Bubbler valve closed
10/24/2011	3:08:01 PM	Main Vac valve opened
10/24/2011	3:08:01 PM	Helium MFC set to  0.000000
10/24/2011	3:08:01 PM	H2 MFC set to  0.000000
10/24/2011	3:08:01 PM	BCl3 MFC set to  0.000000
10/24/2011	3:08:01 PM	PHl3 MFC set to  0.000000
10/24/2011	3:08:01 PM	SiCl4 MFC set to  0.000000
10/24/2011	3:08:01 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	3:08:01 PM	Tube furnace set to 0
10/24/2011	3:08:02 PM	Run finished at 3:08 PM
10/24/2011	3:08:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	5:15:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/24/2011	5:16:03 PM	Recipe started at 5:15 PM
10/24/2011	5:16:03 PM	Helium valve closed
10/24/2011	5:16:03 PM	H2 valve closed
10/24/2011	5:16:03 PM	BCl3 valve closed
10/24/2011	5:16:03 PM	PH3 valve closed
10/24/2011	5:16:03 PM	SiCl4 pre valve closed
10/24/2011	5:16:03 PM	SiCl4 post valve closed
10/24/2011	5:16:03 PM	Main Vac valve closed
10/24/2011	5:16:03 PM	Bubbler valve closed
10/24/2011	5:16:03 PM	Bypass valve opened
10/24/2011	5:16:03 PM	Helium MFC set to  0.000000
10/24/2011	5:16:03 PM	H2 MFC set to  0.000000
10/24/2011	5:16:03 PM	BCl3 MFC set to  0.000000
10/24/2011	5:16:03 PM	PHl3 MFC set to  0.000000
10/24/2011	5:16:03 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:16:03 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:16:04 PM	Tube furnace set to 0
10/24/2011	5:16:04 PM	Helium valve closed
10/24/2011	5:16:04 PM	H2 valve closed
10/24/2011	5:16:04 PM	BCl3 valve closed
10/24/2011	5:16:04 PM	PH3 valve closed
10/24/2011	5:16:04 PM	SiCl4 pre valve closed
10/24/2011	5:16:04 PM	SiCl4 post valve closed
10/24/2011	5:16:04 PM	Main Vac valve closed
10/24/2011	5:16:04 PM	Bubbler valve closed
10/24/2011	5:16:04 PM	Bypass valve opened
10/24/2011	5:16:04 PM	Helium MFC set to  0.000000
10/24/2011	5:16:04 PM	H2 MFC set to  0.000000
10/24/2011	5:16:04 PM	BCl3 MFC set to  0.000000
10/24/2011	5:16:04 PM	PHl3 MFC set to  0.000000
10/24/2011	5:16:04 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:16:04 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:16:04 PM	Tube furnace set to 0
10/24/2011	5:16:34 PM	Helium valve closed
10/24/2011	5:16:34 PM	H2 valve closed
10/24/2011	5:16:34 PM	BCl3 valve closed
10/24/2011	5:16:34 PM	PH3 valve closed
10/24/2011	5:16:34 PM	SiCl4 pre valve closed
10/24/2011	5:16:34 PM	SiCl4 post valve closed
10/24/2011	5:16:34 PM	Bypass valve closed
10/24/2011	5:16:34 PM	Bubbler valve closed
10/24/2011	5:16:34 PM	Main Vac valve opened
10/24/2011	5:16:34 PM	Helium MFC set to  0.000000
10/24/2011	5:16:34 PM	H2 MFC set to  0.000000
10/24/2011	5:16:34 PM	BCl3 MFC set to  0.000000
10/24/2011	5:16:34 PM	PHl3 MFC set to  0.000000
10/24/2011	5:16:34 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:16:34 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:16:34 PM	Tube furnace set to 0
10/24/2011	5:17:04 PM	H2 valve closed
10/24/2011	5:17:04 PM	BCl3 valve closed
10/24/2011	5:17:04 PM	PH3 valve closed
10/24/2011	5:17:04 PM	SiCl4 pre valve closed
10/24/2011	5:17:04 PM	SiCl4 post valve closed
10/24/2011	5:17:04 PM	Bypass valve closed
10/24/2011	5:17:04 PM	Bubbler valve closed
10/24/2011	5:17:04 PM	Helium valve opened
10/24/2011	5:17:04 PM	Main Vac valve opened
10/24/2011	5:17:04 PM	Helium MFC set to  20.000000
10/24/2011	5:17:04 PM	H2 MFC set to  0.000000
10/24/2011	5:17:04 PM	BCl3 MFC set to  0.000000
10/24/2011	5:17:04 PM	PHl3 MFC set to  0.000000
10/24/2011	5:17:04 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:17:04 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:17:04 PM	Tube furnace set to 0
10/24/2011	5:17:34 PM	Helium valve closed
10/24/2011	5:17:34 PM	H2 valve closed
10/24/2011	5:17:34 PM	BCl3 valve closed
10/24/2011	5:17:34 PM	PH3 valve closed
10/24/2011	5:17:34 PM	SiCl4 pre valve closed
10/24/2011	5:17:34 PM	SiCl4 post valve closed
10/24/2011	5:17:34 PM	Bypass valve closed
10/24/2011	5:17:34 PM	Bubbler valve closed
10/24/2011	5:17:34 PM	Main Vac valve opened
10/24/2011	5:17:34 PM	Helium MFC set to  0.000000
10/24/2011	5:17:34 PM	H2 MFC set to  0.000000
10/24/2011	5:17:34 PM	BCl3 MFC set to  0.000000
10/24/2011	5:17:34 PM	PHl3 MFC set to  0.000000
10/24/2011	5:17:34 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:17:34 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:17:35 PM	Tube furnace set to 0
10/24/2011	5:18:05 PM	H2 valve closed
10/24/2011	5:18:05 PM	BCl3 valve closed
10/24/2011	5:18:05 PM	PH3 valve closed
10/24/2011	5:18:05 PM	SiCl4 pre valve closed
10/24/2011	5:18:05 PM	SiCl4 post valve closed
10/24/2011	5:18:05 PM	Bypass valve closed
10/24/2011	5:18:05 PM	Bubbler valve closed
10/24/2011	5:18:05 PM	Helium valve opened
10/24/2011	5:18:05 PM	Main Vac valve opened
10/24/2011	5:18:05 PM	Helium MFC set to  20.000000
10/24/2011	5:18:05 PM	H2 MFC set to  0.000000
10/24/2011	5:18:05 PM	BCl3 MFC set to  0.000000
10/24/2011	5:18:05 PM	PHl3 MFC set to  0.000000
10/24/2011	5:18:05 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:18:05 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:18:05 PM	Tube furnace set to 0
10/24/2011	5:18:35 PM	Helium valve closed
10/24/2011	5:18:35 PM	H2 valve closed
10/24/2011	5:18:35 PM	BCl3 valve closed
10/24/2011	5:18:35 PM	PH3 valve closed
10/24/2011	5:18:35 PM	SiCl4 pre valve closed
10/24/2011	5:18:35 PM	SiCl4 post valve closed
10/24/2011	5:18:35 PM	Bypass valve closed
10/24/2011	5:18:35 PM	Bubbler valve closed
10/24/2011	5:18:35 PM	Main Vac valve opened
10/24/2011	5:18:35 PM	Helium MFC set to  0.000000
10/24/2011	5:18:35 PM	H2 MFC set to  0.000000
10/24/2011	5:18:35 PM	BCl3 MFC set to  0.000000
10/24/2011	5:18:35 PM	PHl3 MFC set to  0.000000
10/24/2011	5:18:35 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:18:35 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:18:35 PM	Tube furnace set to 0
10/24/2011	5:19:05 PM	H2 valve closed
10/24/2011	5:19:05 PM	BCl3 valve closed
10/24/2011	5:19:05 PM	PH3 valve closed
10/24/2011	5:19:05 PM	SiCl4 pre valve closed
10/24/2011	5:19:05 PM	SiCl4 post valve closed
10/24/2011	5:19:05 PM	Bypass valve closed
10/24/2011	5:19:05 PM	Bubbler valve closed
10/24/2011	5:19:05 PM	Helium valve opened
10/24/2011	5:19:05 PM	Main Vac valve opened
10/24/2011	5:19:05 PM	Helium MFC set to  20.000000
10/24/2011	5:19:05 PM	H2 MFC set to  0.000000
10/24/2011	5:19:05 PM	BCl3 MFC set to  0.000000
10/24/2011	5:19:05 PM	PHl3 MFC set to  0.000000
10/24/2011	5:19:05 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:19:05 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:19:05 PM	Tube furnace set to 0
10/24/2011	5:19:35 PM	Helium valve closed
10/24/2011	5:19:35 PM	H2 valve closed
10/24/2011	5:19:35 PM	BCl3 valve closed
10/24/2011	5:19:35 PM	PH3 valve closed
10/24/2011	5:19:35 PM	SiCl4 pre valve closed
10/24/2011	5:19:35 PM	SiCl4 post valve closed
10/24/2011	5:19:35 PM	Bypass valve closed
10/24/2011	5:19:35 PM	Bubbler valve closed
10/24/2011	5:19:35 PM	Main Vac valve opened
10/24/2011	5:19:35 PM	Helium MFC set to  0.000000
10/24/2011	5:19:35 PM	H2 MFC set to  0.000000
10/24/2011	5:19:35 PM	BCl3 MFC set to  0.000000
10/24/2011	5:19:35 PM	PHl3 MFC set to  0.000000
10/24/2011	5:19:35 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:19:35 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:19:35 PM	Tube furnace set to 0
10/24/2011	5:20:05 PM	H2 valve closed
10/24/2011	5:20:05 PM	BCl3 valve closed
10/24/2011	5:20:05 PM	PH3 valve closed
10/24/2011	5:20:05 PM	SiCl4 pre valve closed
10/24/2011	5:20:05 PM	SiCl4 post valve closed
10/24/2011	5:20:05 PM	Bypass valve closed
10/24/2011	5:20:05 PM	Bubbler valve closed
10/24/2011	5:20:05 PM	Helium valve opened
10/24/2011	5:20:05 PM	Main Vac valve opened
10/24/2011	5:20:05 PM	Helium MFC set to  20.000000
10/24/2011	5:20:05 PM	H2 MFC set to  0.000000
10/24/2011	5:20:05 PM	BCl3 MFC set to  0.000000
10/24/2011	5:20:05 PM	PHl3 MFC set to  0.000000
10/24/2011	5:20:05 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:20:05 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:20:06 PM	Tube furnace set to 0
10/24/2011	5:20:36 PM	Helium valve closed
10/24/2011	5:20:36 PM	H2 valve closed
10/24/2011	5:20:36 PM	BCl3 valve closed
10/24/2011	5:20:36 PM	PH3 valve closed
10/24/2011	5:20:36 PM	SiCl4 pre valve closed
10/24/2011	5:20:36 PM	SiCl4 post valve closed
10/24/2011	5:20:36 PM	Bypass valve closed
10/24/2011	5:20:36 PM	Bubbler valve closed
10/24/2011	5:20:36 PM	Main Vac valve opened
10/24/2011	5:20:36 PM	Helium MFC set to  0.000000
10/24/2011	5:20:36 PM	H2 MFC set to  0.000000
10/24/2011	5:20:36 PM	BCl3 MFC set to  0.000000
10/24/2011	5:20:36 PM	PHl3 MFC set to  0.000000
10/24/2011	5:20:36 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:20:36 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:20:36 PM	Tube furnace set to 0
10/24/2011	5:21:06 PM	H2 valve closed
10/24/2011	5:21:06 PM	BCl3 valve closed
10/24/2011	5:21:06 PM	PH3 valve closed
10/24/2011	5:21:06 PM	SiCl4 pre valve closed
10/24/2011	5:21:06 PM	SiCl4 post valve closed
10/24/2011	5:21:06 PM	Bypass valve closed
10/24/2011	5:21:06 PM	Bubbler valve closed
10/24/2011	5:21:06 PM	Helium valve opened
10/24/2011	5:21:06 PM	Main Vac valve opened
10/24/2011	5:21:06 PM	Helium MFC set to  20.000000
10/24/2011	5:21:06 PM	H2 MFC set to  0.000000
10/24/2011	5:21:06 PM	BCl3 MFC set to  0.000000
10/24/2011	5:21:06 PM	PHl3 MFC set to  0.000000
10/24/2011	5:21:06 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:21:06 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:21:06 PM	Tube furnace set to 0
10/24/2011	5:21:36 PM	Helium valve closed
10/24/2011	5:21:36 PM	H2 valve closed
10/24/2011	5:21:36 PM	BCl3 valve closed
10/24/2011	5:21:36 PM	PH3 valve closed
10/24/2011	5:21:36 PM	SiCl4 pre valve closed
10/24/2011	5:21:36 PM	SiCl4 post valve closed
10/24/2011	5:21:36 PM	Bypass valve closed
10/24/2011	5:21:36 PM	Bubbler valve closed
10/24/2011	5:21:36 PM	Main Vac valve opened
10/24/2011	5:21:36 PM	Helium MFC set to  0.000000
10/24/2011	5:21:36 PM	H2 MFC set to  0.000000
10/24/2011	5:21:36 PM	BCl3 MFC set to  0.000000
10/24/2011	5:21:36 PM	PHl3 MFC set to  0.000000
10/24/2011	5:21:36 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:21:36 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:21:36 PM	Tube furnace set to 0
10/24/2011	5:22:06 PM	H2 valve closed
10/24/2011	5:22:06 PM	BCl3 valve closed
10/24/2011	5:22:06 PM	PH3 valve closed
10/24/2011	5:22:06 PM	SiCl4 pre valve closed
10/24/2011	5:22:06 PM	SiCl4 post valve closed
10/24/2011	5:22:06 PM	Bypass valve closed
10/24/2011	5:22:06 PM	Bubbler valve closed
10/24/2011	5:22:06 PM	Helium valve opened
10/24/2011	5:22:06 PM	Main Vac valve opened
10/24/2011	5:22:06 PM	Helium MFC set to  20.000000
10/24/2011	5:22:06 PM	H2 MFC set to  0.000000
10/24/2011	5:22:06 PM	BCl3 MFC set to  0.000000
10/24/2011	5:22:06 PM	PHl3 MFC set to  0.000000
10/24/2011	5:22:06 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:22:06 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:22:06 PM	Tube furnace set to 0
10/24/2011	5:22:36 PM	Helium valve closed
10/24/2011	5:22:36 PM	H2 valve closed
10/24/2011	5:22:36 PM	BCl3 valve closed
10/24/2011	5:22:36 PM	PH3 valve closed
10/24/2011	5:22:36 PM	SiCl4 pre valve closed
10/24/2011	5:22:36 PM	SiCl4 post valve closed
10/24/2011	5:22:36 PM	Bypass valve closed
10/24/2011	5:22:36 PM	Bubbler valve closed
10/24/2011	5:22:36 PM	Main Vac valve opened
10/24/2011	5:22:36 PM	Helium MFC set to  0.000000
10/24/2011	5:22:36 PM	H2 MFC set to  0.000000
10/24/2011	5:22:36 PM	BCl3 MFC set to  0.000000
10/24/2011	5:22:36 PM	PHl3 MFC set to  0.000000
10/24/2011	5:22:36 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:22:36 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:22:37 PM	Tube furnace set to 0
10/24/2011	5:23:07 PM	H2 valve closed
10/24/2011	5:23:07 PM	BCl3 valve closed
10/24/2011	5:23:07 PM	PH3 valve closed
10/24/2011	5:23:07 PM	SiCl4 pre valve closed
10/24/2011	5:23:07 PM	SiCl4 post valve closed
10/24/2011	5:23:07 PM	Bypass valve closed
10/24/2011	5:23:07 PM	Bubbler valve closed
10/24/2011	5:23:07 PM	Helium valve opened
10/24/2011	5:23:07 PM	Main Vac valve opened
10/24/2011	5:23:07 PM	Helium MFC set to  20.000000
10/24/2011	5:23:07 PM	H2 MFC set to  0.000000
10/24/2011	5:23:07 PM	BCl3 MFC set to  0.000000
10/24/2011	5:23:07 PM	PHl3 MFC set to  0.000000
10/24/2011	5:23:07 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:23:07 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:23:07 PM	Tube furnace set to 0
10/24/2011	5:23:37 PM	Helium valve closed
10/24/2011	5:23:37 PM	H2 valve closed
10/24/2011	5:23:37 PM	BCl3 valve closed
10/24/2011	5:23:37 PM	PH3 valve closed
10/24/2011	5:23:37 PM	SiCl4 pre valve closed
10/24/2011	5:23:37 PM	SiCl4 post valve closed
10/24/2011	5:23:37 PM	Bypass valve closed
10/24/2011	5:23:37 PM	Bubbler valve closed
10/24/2011	5:23:37 PM	Main Vac valve opened
10/24/2011	5:23:37 PM	Helium MFC set to  0.000000
10/24/2011	5:23:37 PM	H2 MFC set to  0.000000
10/24/2011	5:23:37 PM	BCl3 MFC set to  0.000000
10/24/2011	5:23:37 PM	PHl3 MFC set to  0.000000
10/24/2011	5:23:37 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:23:37 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:23:37 PM	Tube furnace set to 0
10/24/2011	5:24:07 PM	H2 valve closed
10/24/2011	5:24:07 PM	BCl3 valve closed
10/24/2011	5:24:07 PM	PH3 valve closed
10/24/2011	5:24:07 PM	SiCl4 pre valve closed
10/24/2011	5:24:07 PM	SiCl4 post valve closed
10/24/2011	5:24:07 PM	Bypass valve closed
10/24/2011	5:24:07 PM	Bubbler valve closed
10/24/2011	5:24:07 PM	Helium valve opened
10/24/2011	5:24:07 PM	Main Vac valve opened
10/24/2011	5:24:07 PM	Helium MFC set to  20.000000
10/24/2011	5:24:07 PM	H2 MFC set to  0.000000
10/24/2011	5:24:07 PM	BCl3 MFC set to  0.000000
10/24/2011	5:24:07 PM	PHl3 MFC set to  0.000000
10/24/2011	5:24:07 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:24:07 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:24:07 PM	Tube furnace set to 0
10/24/2011	5:24:37 PM	Helium valve closed
10/24/2011	5:24:37 PM	H2 valve closed
10/24/2011	5:24:37 PM	BCl3 valve closed
10/24/2011	5:24:37 PM	PH3 valve closed
10/24/2011	5:24:37 PM	SiCl4 pre valve closed
10/24/2011	5:24:37 PM	SiCl4 post valve closed
10/24/2011	5:24:37 PM	Bypass valve closed
10/24/2011	5:24:37 PM	Bubbler valve closed
10/24/2011	5:24:37 PM	Main Vac valve opened
10/24/2011	5:24:37 PM	Helium MFC set to  0.000000
10/24/2011	5:24:37 PM	H2 MFC set to  0.000000
10/24/2011	5:24:37 PM	BCl3 MFC set to  0.000000
10/24/2011	5:24:37 PM	PHl3 MFC set to  0.000000
10/24/2011	5:24:37 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:24:37 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:24:37 PM	Tube furnace set to 0
10/24/2011	5:25:07 PM	H2 valve closed
10/24/2011	5:25:07 PM	BCl3 valve closed
10/24/2011	5:25:07 PM	PH3 valve closed
10/24/2011	5:25:07 PM	SiCl4 pre valve closed
10/24/2011	5:25:07 PM	SiCl4 post valve closed
10/24/2011	5:25:07 PM	Bypass valve closed
10/24/2011	5:25:07 PM	Bubbler valve closed
10/24/2011	5:25:07 PM	Helium valve opened
10/24/2011	5:25:07 PM	Main Vac valve opened
10/24/2011	5:25:07 PM	Helium MFC set to  20.000000
10/24/2011	5:25:07 PM	H2 MFC set to  0.000000
10/24/2011	5:25:07 PM	BCl3 MFC set to  0.000000
10/24/2011	5:25:07 PM	PHl3 MFC set to  0.000000
10/24/2011	5:25:07 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:25:07 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:25:08 PM	Tube furnace set to 0
10/24/2011	5:25:38 PM	Helium valve closed
10/24/2011	5:25:38 PM	H2 valve closed
10/24/2011	5:25:38 PM	BCl3 valve closed
10/24/2011	5:25:38 PM	PH3 valve closed
10/24/2011	5:25:38 PM	SiCl4 pre valve closed
10/24/2011	5:25:38 PM	SiCl4 post valve closed
10/24/2011	5:25:38 PM	Bypass valve closed
10/24/2011	5:25:38 PM	Bubbler valve closed
10/24/2011	5:25:38 PM	Main Vac valve opened
10/24/2011	5:25:38 PM	Helium MFC set to  0.000000
10/24/2011	5:25:38 PM	H2 MFC set to  0.000000
10/24/2011	5:25:38 PM	BCl3 MFC set to  0.000000
10/24/2011	5:25:38 PM	PHl3 MFC set to  0.000000
10/24/2011	5:25:38 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:25:38 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:25:38 PM	Tube furnace set to 0
10/24/2011	5:26:08 PM	H2 valve closed
10/24/2011	5:26:08 PM	BCl3 valve closed
10/24/2011	5:26:08 PM	PH3 valve closed
10/24/2011	5:26:08 PM	SiCl4 pre valve closed
10/24/2011	5:26:08 PM	SiCl4 post valve closed
10/24/2011	5:26:08 PM	Bypass valve closed
10/24/2011	5:26:08 PM	Bubbler valve closed
10/24/2011	5:26:08 PM	Helium valve opened
10/24/2011	5:26:08 PM	Main Vac valve opened
10/24/2011	5:26:08 PM	Helium MFC set to  20.000000
10/24/2011	5:26:08 PM	H2 MFC set to  0.000000
10/24/2011	5:26:08 PM	BCl3 MFC set to  0.000000
10/24/2011	5:26:08 PM	PHl3 MFC set to  0.000000
10/24/2011	5:26:08 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:26:08 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:26:08 PM	Tube furnace set to 0
10/24/2011	5:26:38 PM	Helium valve closed
10/24/2011	5:26:38 PM	H2 valve closed
10/24/2011	5:26:38 PM	BCl3 valve closed
10/24/2011	5:26:38 PM	PH3 valve closed
10/24/2011	5:26:38 PM	SiCl4 pre valve closed
10/24/2011	5:26:38 PM	SiCl4 post valve closed
10/24/2011	5:26:38 PM	Bypass valve closed
10/24/2011	5:26:38 PM	Bubbler valve closed
10/24/2011	5:26:38 PM	Main Vac valve opened
10/24/2011	5:26:38 PM	Helium MFC set to  0.000000
10/24/2011	5:26:38 PM	H2 MFC set to  0.000000
10/24/2011	5:26:38 PM	BCl3 MFC set to  0.000000
10/24/2011	5:26:38 PM	PHl3 MFC set to  0.000000
10/24/2011	5:26:38 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:26:38 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:26:38 PM	Tube furnace set to 0
10/24/2011	5:26:39 PM	Run finished at 5:26 PM
10/24/2011	5:26:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/24/2011	5:38:20 PM	Recipe started at 5:38 PM
10/24/2011	5:38:20 PM	Helium valve closed
10/24/2011	5:38:20 PM	H2 valve closed
10/24/2011	5:38:20 PM	BCl3 valve closed
10/24/2011	5:38:20 PM	PH3 valve closed
10/24/2011	5:38:20 PM	SiCl4 pre valve closed
10/24/2011	5:38:20 PM	SiCl4 post valve closed
10/24/2011	5:38:20 PM	Main Vac valve closed
10/24/2011	5:38:20 PM	Bypass valve closed
10/24/2011	5:38:20 PM	Bubbler valve closed
10/24/2011	5:38:20 PM	Helium MFC set to  0.000000
10/24/2011	5:38:20 PM	H2 MFC set to  0.000000
10/24/2011	5:38:20 PM	BCl3 MFC set to  0.000000
10/24/2011	5:38:20 PM	PHl3 MFC set to  0.000000
10/24/2011	5:38:20 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:38:20 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:38:20 PM	Tube furnace set to 0
10/24/2011	5:38:23 PM	Helium valve closed
10/24/2011	5:38:23 PM	BCl3 valve closed
10/24/2011	5:38:23 PM	PH3 valve closed
10/24/2011	5:38:23 PM	SiCl4 pre valve closed
10/24/2011	5:38:23 PM	SiCl4 post valve closed
10/24/2011	5:38:23 PM	Main Vac valve closed
10/24/2011	5:38:23 PM	Bypass valve closed
10/24/2011	5:38:23 PM	Bubbler valve closed
10/24/2011	5:38:23 PM	H2 valve opened
10/24/2011	5:38:23 PM	Helium MFC set to  0.000000
10/24/2011	5:38:23 PM	H2 MFC set to  500.000000
10/24/2011	5:38:23 PM	BCl3 MFC set to  0.000000
10/24/2011	5:38:23 PM	PHl3 MFC set to  0.000000
10/24/2011	5:38:23 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:38:23 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:38:23 PM	Tube furnace set to 0
10/24/2011	5:39:30 PM	Helium valve closed
10/24/2011	5:39:31 PM	BCl3 valve closed
10/24/2011	5:39:31 PM	PH3 valve closed
10/24/2011	5:39:31 PM	SiCl4 pre valve closed
10/24/2011	5:39:31 PM	SiCl4 post valve closed
10/24/2011	5:39:31 PM	Main Vac valve closed
10/24/2011	5:39:31 PM	Bypass valve closed
10/24/2011	5:39:31 PM	H2 valve opened
10/24/2011	5:39:31 PM	Bubbler valve opened
10/24/2011	5:39:31 PM	Helium MFC set to  0.000000
10/24/2011	5:39:31 PM	H2 MFC set to  500.000000
10/24/2011	5:39:31 PM	BCl3 MFC set to  0.000000
10/24/2011	5:39:31 PM	PHl3 MFC set to  0.000000
10/24/2011	5:39:31 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:39:31 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:39:31 PM	Tube furnace set to 0
10/24/2011	5:39:32 PM	Helium valve closed
10/24/2011	5:39:32 PM	BCl3 valve closed
10/24/2011	5:39:32 PM	PH3 valve closed
10/24/2011	5:39:32 PM	SiCl4 pre valve closed
10/24/2011	5:39:32 PM	SiCl4 post valve closed
10/24/2011	5:39:32 PM	Main Vac valve closed
10/24/2011	5:39:32 PM	Bypass valve closed
10/24/2011	5:39:32 PM	H2 valve opened
10/24/2011	5:39:32 PM	Bubbler valve opened
10/24/2011	5:39:32 PM	Helium MFC set to  0.000000
10/24/2011	5:39:32 PM	H2 MFC set to  500.000000
10/24/2011	5:39:32 PM	BCl3 MFC set to  0.000000
10/24/2011	5:39:32 PM	PHl3 MFC set to  0.000000
10/24/2011	5:39:32 PM	SiCl4 MFC set to  0.000000
10/24/2011	5:39:32 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:39:32 PM	Tube furnace set to 1010
10/24/2011	5:59:32 PM	Helium valve closed
10/24/2011	5:59:32 PM	BCl3 valve closed
10/24/2011	5:59:32 PM	PH3 valve closed
10/24/2011	5:59:32 PM	Main Vac valve closed
10/24/2011	5:59:32 PM	Bypass valve closed
10/24/2011	5:59:32 PM	H2 valve opened
10/24/2011	5:59:32 PM	SiCl4 pre valve opened
10/24/2011	5:59:32 PM	SiCl4 post valve opened
10/24/2011	5:59:32 PM	Bubbler valve opened
10/24/2011	5:59:32 PM	Helium MFC set to  0.000000
10/24/2011	5:59:32 PM	H2 MFC set to  500.000000
10/24/2011	5:59:32 PM	BCl3 MFC set to  0.000000
10/24/2011	5:59:32 PM	PHl3 MFC set to  0.000000
10/24/2011	5:59:32 PM	SiCl4 MFC set to  36.000000
10/24/2011	5:59:32 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	5:59:32 PM	Tube furnace set to 1010
10/24/2011	6:09:32 PM	H2 valve closed
10/24/2011	6:09:32 PM	BCl3 valve closed
10/24/2011	6:09:32 PM	PH3 valve closed
10/24/2011	6:09:32 PM	SiCl4 pre valve closed
10/24/2011	6:09:32 PM	SiCl4 post valve closed
10/24/2011	6:09:32 PM	Main Vac valve closed
10/24/2011	6:09:32 PM	Bypass valve closed
10/24/2011	6:09:32 PM	Helium valve opened
10/24/2011	6:09:32 PM	Bubbler valve opened
10/24/2011	6:09:32 PM	Helium MFC set to  500.000000
10/24/2011	6:09:32 PM	H2 MFC set to  0.000000
10/24/2011	6:09:32 PM	BCl3 MFC set to  0.000000
10/24/2011	6:09:32 PM	PHl3 MFC set to  0.000000
10/24/2011	6:09:32 PM	SiCl4 MFC set to  0.000000
10/24/2011	6:09:32 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	6:09:32 PM	Tube furnace set to 0
10/24/2011	6:49:32 PM	Helium valve closed
10/24/2011	6:49:32 PM	H2 valve closed
10/24/2011	6:49:32 PM	BCl3 valve closed
10/24/2011	6:49:32 PM	PH3 valve closed
10/24/2011	6:49:32 PM	SiCl4 pre valve closed
10/24/2011	6:49:32 PM	SiCl4 post valve closed
10/24/2011	6:49:32 PM	Main Vac valve closed
10/24/2011	6:49:32 PM	Bypass valve closed
10/24/2011	6:49:32 PM	Bubbler valve closed
10/24/2011	6:49:32 PM	Helium MFC set to  0.000000
10/24/2011	6:49:32 PM	H2 MFC set to  0.000000
10/24/2011	6:49:32 PM	BCl3 MFC set to  0.000000
10/24/2011	6:49:32 PM	PHl3 MFC set to  0.000000
10/24/2011	6:49:32 PM	SiCl4 MFC set to  0.000000
10/24/2011	6:49:32 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	6:49:32 PM	Tube furnace set to 0
10/24/2011	6:49:33 PM	Run finished at 6:49 PM
10/24/2011	7:00:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	7:00:15 PM	Recipe started at 7:00 PM
10/24/2011	7:00:15 PM	Helium valve closed
10/24/2011	7:00:15 PM	H2 valve closed
10/24/2011	7:00:15 PM	BCl3 valve closed
10/24/2011	7:00:15 PM	PH3 valve closed
10/24/2011	7:00:15 PM	SiCl4 pre valve closed
10/24/2011	7:00:15 PM	SiCl4 post valve closed
10/24/2011	7:00:15 PM	Main Vac valve closed
10/24/2011	7:00:15 PM	Bubbler valve closed
10/24/2011	7:00:15 PM	Bypass valve opened
10/24/2011	7:00:15 PM	Helium MFC set to  0.000000
10/24/2011	7:00:15 PM	H2 MFC set to  0.000000
10/24/2011	7:00:15 PM	BCl3 MFC set to  0.000000
10/24/2011	7:00:15 PM	PHl3 MFC set to  0.000000
10/24/2011	7:00:15 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:00:15 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:00:15 PM	Tube furnace set to 0
10/24/2011	7:01:24 PM	Helium valve closed
10/24/2011	7:01:24 PM	H2 valve closed
10/24/2011	7:01:24 PM	BCl3 valve closed
10/24/2011	7:01:24 PM	PH3 valve closed
10/24/2011	7:01:24 PM	SiCl4 pre valve closed
10/24/2011	7:01:24 PM	SiCl4 post valve closed
10/24/2011	7:01:24 PM	Main Vac valve closed
10/24/2011	7:01:24 PM	Bubbler valve closed
10/24/2011	7:01:24 PM	Bypass valve opened
10/24/2011	7:01:24 PM	Helium MFC set to  0.000000
10/24/2011	7:01:24 PM	H2 MFC set to  0.000000
10/24/2011	7:01:24 PM	BCl3 MFC set to  0.000000
10/24/2011	7:01:24 PM	PHl3 MFC set to  0.000000
10/24/2011	7:01:24 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:01:24 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:01:24 PM	Tube furnace set to 0
10/24/2011	7:02:25 PM	Helium valve closed
10/24/2011	7:02:25 PM	H2 valve closed
10/24/2011	7:02:25 PM	BCl3 valve closed
10/24/2011	7:02:25 PM	PH3 valve closed
10/24/2011	7:02:25 PM	SiCl4 pre valve closed
10/24/2011	7:02:25 PM	SiCl4 post valve closed
10/24/2011	7:02:25 PM	Bypass valve closed
10/24/2011	7:02:25 PM	Bubbler valve closed
10/24/2011	7:02:25 PM	Main Vac valve opened
10/24/2011	7:02:25 PM	Helium MFC set to  0.000000
10/24/2011	7:02:25 PM	H2 MFC set to  0.000000
10/24/2011	7:02:25 PM	BCl3 MFC set to  0.000000
10/24/2011	7:02:25 PM	PHl3 MFC set to  0.000000
10/24/2011	7:02:25 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:02:25 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:02:25 PM	Tube furnace set to 0
10/24/2011	7:02:26 PM	Run finished at 7:02 PM
10/24/2011	7:02:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	7:08:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/24/2011	7:08:16 PM	Recipe started at 7:08 PM
10/24/2011	7:08:16 PM	Helium valve closed
10/24/2011	7:08:16 PM	H2 valve closed
10/24/2011	7:08:16 PM	BCl3 valve closed
10/24/2011	7:08:16 PM	PH3 valve closed
10/24/2011	7:08:16 PM	SiCl4 pre valve closed
10/24/2011	7:08:16 PM	SiCl4 post valve closed
10/24/2011	7:08:16 PM	Main Vac valve closed
10/24/2011	7:08:16 PM	Bubbler valve closed
10/24/2011	7:08:16 PM	Bypass valve opened
10/24/2011	7:08:16 PM	Helium MFC set to  0.000000
10/24/2011	7:08:16 PM	H2 MFC set to  0.000000
10/24/2011	7:08:16 PM	BCl3 MFC set to  0.000000
10/24/2011	7:08:16 PM	PHl3 MFC set to  0.000000
10/24/2011	7:08:16 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:08:16 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:08:16 PM	Tube furnace set to 0
10/24/2011	7:08:17 PM	Helium valve closed
10/24/2011	7:08:17 PM	H2 valve closed
10/24/2011	7:08:17 PM	BCl3 valve closed
10/24/2011	7:08:17 PM	PH3 valve closed
10/24/2011	7:08:17 PM	SiCl4 pre valve closed
10/24/2011	7:08:17 PM	SiCl4 post valve closed
10/24/2011	7:08:17 PM	Main Vac valve closed
10/24/2011	7:08:17 PM	Bubbler valve closed
10/24/2011	7:08:17 PM	Bypass valve opened
10/24/2011	7:08:17 PM	Helium MFC set to  0.000000
10/24/2011	7:08:17 PM	H2 MFC set to  0.000000
10/24/2011	7:08:17 PM	BCl3 MFC set to  0.000000
10/24/2011	7:08:17 PM	PHl3 MFC set to  0.000000
10/24/2011	7:08:17 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:08:17 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:08:17 PM	Tube furnace set to 0
10/24/2011	7:08:47 PM	Helium valve closed
10/24/2011	7:08:47 PM	H2 valve closed
10/24/2011	7:08:47 PM	BCl3 valve closed
10/24/2011	7:08:47 PM	PH3 valve closed
10/24/2011	7:08:47 PM	SiCl4 pre valve closed
10/24/2011	7:08:47 PM	SiCl4 post valve closed
10/24/2011	7:08:47 PM	Bypass valve closed
10/24/2011	7:08:47 PM	Bubbler valve closed
10/24/2011	7:08:47 PM	Main Vac valve opened
10/24/2011	7:08:47 PM	Helium MFC set to  0.000000
10/24/2011	7:08:47 PM	H2 MFC set to  0.000000
10/24/2011	7:08:47 PM	BCl3 MFC set to  0.000000
10/24/2011	7:08:47 PM	PHl3 MFC set to  0.000000
10/24/2011	7:08:47 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:08:47 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:08:47 PM	Tube furnace set to 0
10/24/2011	7:09:17 PM	H2 valve closed
10/24/2011	7:09:17 PM	BCl3 valve closed
10/24/2011	7:09:17 PM	PH3 valve closed
10/24/2011	7:09:17 PM	SiCl4 pre valve closed
10/24/2011	7:09:17 PM	SiCl4 post valve closed
10/24/2011	7:09:17 PM	Bypass valve closed
10/24/2011	7:09:17 PM	Bubbler valve closed
10/24/2011	7:09:17 PM	Helium valve opened
10/24/2011	7:09:17 PM	Main Vac valve opened
10/24/2011	7:09:17 PM	Helium MFC set to  20.000000
10/24/2011	7:09:17 PM	H2 MFC set to  0.000000
10/24/2011	7:09:17 PM	BCl3 MFC set to  0.000000
10/24/2011	7:09:17 PM	PHl3 MFC set to  0.000000
10/24/2011	7:09:17 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:09:17 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:09:17 PM	Tube furnace set to 0
10/24/2011	7:09:47 PM	Helium valve closed
10/24/2011	7:09:47 PM	H2 valve closed
10/24/2011	7:09:47 PM	BCl3 valve closed
10/24/2011	7:09:47 PM	PH3 valve closed
10/24/2011	7:09:47 PM	SiCl4 pre valve closed
10/24/2011	7:09:47 PM	SiCl4 post valve closed
10/24/2011	7:09:47 PM	Bypass valve closed
10/24/2011	7:09:47 PM	Bubbler valve closed
10/24/2011	7:09:47 PM	Main Vac valve opened
10/24/2011	7:09:47 PM	Helium MFC set to  0.000000
10/24/2011	7:09:47 PM	H2 MFC set to  0.000000
10/24/2011	7:09:47 PM	BCl3 MFC set to  0.000000
10/24/2011	7:09:47 PM	PHl3 MFC set to  0.000000
10/24/2011	7:09:47 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:09:47 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:09:47 PM	Tube furnace set to 0
10/24/2011	7:10:17 PM	H2 valve closed
10/24/2011	7:10:17 PM	BCl3 valve closed
10/24/2011	7:10:17 PM	PH3 valve closed
10/24/2011	7:10:17 PM	SiCl4 pre valve closed
10/24/2011	7:10:17 PM	SiCl4 post valve closed
10/24/2011	7:10:17 PM	Bypass valve closed
10/24/2011	7:10:17 PM	Bubbler valve closed
10/24/2011	7:10:17 PM	Helium valve opened
10/24/2011	7:10:17 PM	Main Vac valve opened
10/24/2011	7:10:17 PM	Helium MFC set to  20.000000
10/24/2011	7:10:17 PM	H2 MFC set to  0.000000
10/24/2011	7:10:17 PM	BCl3 MFC set to  0.000000
10/24/2011	7:10:17 PM	PHl3 MFC set to  0.000000
10/24/2011	7:10:17 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:10:17 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:10:17 PM	Tube furnace set to 0
10/24/2011	7:10:47 PM	Helium valve closed
10/24/2011	7:10:47 PM	H2 valve closed
10/24/2011	7:10:47 PM	BCl3 valve closed
10/24/2011	7:10:47 PM	PH3 valve closed
10/24/2011	7:10:47 PM	SiCl4 pre valve closed
10/24/2011	7:10:47 PM	SiCl4 post valve closed
10/24/2011	7:10:47 PM	Bypass valve closed
10/24/2011	7:10:47 PM	Bubbler valve closed
10/24/2011	7:10:47 PM	Main Vac valve opened
10/24/2011	7:10:47 PM	Helium MFC set to  0.000000
10/24/2011	7:10:47 PM	H2 MFC set to  0.000000
10/24/2011	7:10:47 PM	BCl3 MFC set to  0.000000
10/24/2011	7:10:47 PM	PHl3 MFC set to  0.000000
10/24/2011	7:10:47 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:10:48 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:10:48 PM	Tube furnace set to 0
10/24/2011	7:11:18 PM	H2 valve closed
10/24/2011	7:11:18 PM	BCl3 valve closed
10/24/2011	7:11:18 PM	PH3 valve closed
10/24/2011	7:11:18 PM	SiCl4 pre valve closed
10/24/2011	7:11:18 PM	SiCl4 post valve closed
10/24/2011	7:11:18 PM	Bypass valve closed
10/24/2011	7:11:18 PM	Bubbler valve closed
10/24/2011	7:11:18 PM	Helium valve opened
10/24/2011	7:11:18 PM	Main Vac valve opened
10/24/2011	7:11:18 PM	Helium MFC set to  20.000000
10/24/2011	7:11:18 PM	H2 MFC set to  0.000000
10/24/2011	7:11:18 PM	BCl3 MFC set to  0.000000
10/24/2011	7:11:18 PM	PHl3 MFC set to  0.000000
10/24/2011	7:11:18 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:11:18 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:11:18 PM	Tube furnace set to 0
10/24/2011	7:11:48 PM	Helium valve closed
10/24/2011	7:11:48 PM	H2 valve closed
10/24/2011	7:11:48 PM	BCl3 valve closed
10/24/2011	7:11:48 PM	PH3 valve closed
10/24/2011	7:11:48 PM	SiCl4 pre valve closed
10/24/2011	7:11:48 PM	SiCl4 post valve closed
10/24/2011	7:11:48 PM	Bypass valve closed
10/24/2011	7:11:48 PM	Bubbler valve closed
10/24/2011	7:11:48 PM	Main Vac valve opened
10/24/2011	7:11:48 PM	Helium MFC set to  0.000000
10/24/2011	7:11:48 PM	H2 MFC set to  0.000000
10/24/2011	7:11:48 PM	BCl3 MFC set to  0.000000
10/24/2011	7:11:48 PM	PHl3 MFC set to  0.000000
10/24/2011	7:11:48 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:11:48 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:11:48 PM	Tube furnace set to 0
10/24/2011	7:12:18 PM	H2 valve closed
10/24/2011	7:12:18 PM	BCl3 valve closed
10/24/2011	7:12:18 PM	PH3 valve closed
10/24/2011	7:12:18 PM	SiCl4 pre valve closed
10/24/2011	7:12:18 PM	SiCl4 post valve closed
10/24/2011	7:12:18 PM	Bypass valve closed
10/24/2011	7:12:18 PM	Bubbler valve closed
10/24/2011	7:12:18 PM	Helium valve opened
10/24/2011	7:12:18 PM	Main Vac valve opened
10/24/2011	7:12:18 PM	Helium MFC set to  20.000000
10/24/2011	7:12:18 PM	H2 MFC set to  0.000000
10/24/2011	7:12:18 PM	BCl3 MFC set to  0.000000
10/24/2011	7:12:18 PM	PHl3 MFC set to  0.000000
10/24/2011	7:12:18 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:12:18 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:12:18 PM	Tube furnace set to 0
10/24/2011	7:12:48 PM	Helium valve closed
10/24/2011	7:12:48 PM	H2 valve closed
10/24/2011	7:12:48 PM	BCl3 valve closed
10/24/2011	7:12:48 PM	PH3 valve closed
10/24/2011	7:12:48 PM	SiCl4 pre valve closed
10/24/2011	7:12:48 PM	SiCl4 post valve closed
10/24/2011	7:12:48 PM	Bypass valve closed
10/24/2011	7:12:48 PM	Bubbler valve closed
10/24/2011	7:12:48 PM	Main Vac valve opened
10/24/2011	7:12:48 PM	Helium MFC set to  0.000000
10/24/2011	7:12:48 PM	H2 MFC set to  0.000000
10/24/2011	7:12:48 PM	BCl3 MFC set to  0.000000
10/24/2011	7:12:48 PM	PHl3 MFC set to  0.000000
10/24/2011	7:12:48 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:12:48 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:12:48 PM	Tube furnace set to 0
10/24/2011	7:13:18 PM	H2 valve closed
10/24/2011	7:13:18 PM	BCl3 valve closed
10/24/2011	7:13:18 PM	PH3 valve closed
10/24/2011	7:13:18 PM	SiCl4 pre valve closed
10/24/2011	7:13:18 PM	SiCl4 post valve closed
10/24/2011	7:13:18 PM	Bypass valve closed
10/24/2011	7:13:18 PM	Bubbler valve closed
10/24/2011	7:13:18 PM	Helium valve opened
10/24/2011	7:13:18 PM	Main Vac valve opened
10/24/2011	7:13:18 PM	Helium MFC set to  20.000000
10/24/2011	7:13:18 PM	H2 MFC set to  0.000000
10/24/2011	7:13:18 PM	BCl3 MFC set to  0.000000
10/24/2011	7:13:18 PM	PHl3 MFC set to  0.000000
10/24/2011	7:13:18 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:13:18 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:13:19 PM	Tube furnace set to 0
10/24/2011	7:13:49 PM	Helium valve closed
10/24/2011	7:13:49 PM	H2 valve closed
10/24/2011	7:13:49 PM	BCl3 valve closed
10/24/2011	7:13:49 PM	PH3 valve closed
10/24/2011	7:13:49 PM	SiCl4 pre valve closed
10/24/2011	7:13:49 PM	SiCl4 post valve closed
10/24/2011	7:13:49 PM	Bypass valve closed
10/24/2011	7:13:49 PM	Bubbler valve closed
10/24/2011	7:13:49 PM	Main Vac valve opened
10/24/2011	7:13:49 PM	Helium MFC set to  0.000000
10/24/2011	7:13:49 PM	H2 MFC set to  0.000000
10/24/2011	7:13:49 PM	BCl3 MFC set to  0.000000
10/24/2011	7:13:49 PM	PHl3 MFC set to  0.000000
10/24/2011	7:13:49 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:13:49 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:13:49 PM	Tube furnace set to 0
10/24/2011	7:14:19 PM	H2 valve closed
10/24/2011	7:14:19 PM	BCl3 valve closed
10/24/2011	7:14:19 PM	PH3 valve closed
10/24/2011	7:14:19 PM	SiCl4 pre valve closed
10/24/2011	7:14:19 PM	SiCl4 post valve closed
10/24/2011	7:14:19 PM	Bypass valve closed
10/24/2011	7:14:19 PM	Bubbler valve closed
10/24/2011	7:14:19 PM	Helium valve opened
10/24/2011	7:14:19 PM	Main Vac valve opened
10/24/2011	7:14:19 PM	Helium MFC set to  20.000000
10/24/2011	7:14:19 PM	H2 MFC set to  0.000000
10/24/2011	7:14:19 PM	BCl3 MFC set to  0.000000
10/24/2011	7:14:19 PM	PHl3 MFC set to  0.000000
10/24/2011	7:14:19 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:14:19 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:14:19 PM	Tube furnace set to 0
10/24/2011	7:14:49 PM	Helium valve closed
10/24/2011	7:14:49 PM	H2 valve closed
10/24/2011	7:14:49 PM	BCl3 valve closed
10/24/2011	7:14:49 PM	PH3 valve closed
10/24/2011	7:14:49 PM	SiCl4 pre valve closed
10/24/2011	7:14:49 PM	SiCl4 post valve closed
10/24/2011	7:14:49 PM	Bypass valve closed
10/24/2011	7:14:49 PM	Bubbler valve closed
10/24/2011	7:14:49 PM	Main Vac valve opened
10/24/2011	7:14:49 PM	Helium MFC set to  0.000000
10/24/2011	7:14:49 PM	H2 MFC set to  0.000000
10/24/2011	7:14:49 PM	BCl3 MFC set to  0.000000
10/24/2011	7:14:49 PM	PHl3 MFC set to  0.000000
10/24/2011	7:14:49 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:14:49 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:14:49 PM	Tube furnace set to 0
10/24/2011	7:15:19 PM	H2 valve closed
10/24/2011	7:15:19 PM	BCl3 valve closed
10/24/2011	7:15:19 PM	PH3 valve closed
10/24/2011	7:15:19 PM	SiCl4 pre valve closed
10/24/2011	7:15:19 PM	SiCl4 post valve closed
10/24/2011	7:15:19 PM	Bypass valve closed
10/24/2011	7:15:19 PM	Bubbler valve closed
10/24/2011	7:15:19 PM	Helium valve opened
10/24/2011	7:15:19 PM	Main Vac valve opened
10/24/2011	7:15:19 PM	Helium MFC set to  20.000000
10/24/2011	7:15:19 PM	H2 MFC set to  0.000000
10/24/2011	7:15:19 PM	BCl3 MFC set to  0.000000
10/24/2011	7:15:19 PM	PHl3 MFC set to  0.000000
10/24/2011	7:15:19 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:15:19 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:15:19 PM	Tube furnace set to 0
10/24/2011	7:15:49 PM	Helium valve closed
10/24/2011	7:15:49 PM	H2 valve closed
10/24/2011	7:15:49 PM	BCl3 valve closed
10/24/2011	7:15:49 PM	PH3 valve closed
10/24/2011	7:15:49 PM	SiCl4 pre valve closed
10/24/2011	7:15:49 PM	SiCl4 post valve closed
10/24/2011	7:15:49 PM	Bypass valve closed
10/24/2011	7:15:49 PM	Bubbler valve closed
10/24/2011	7:15:49 PM	Main Vac valve opened
10/24/2011	7:15:49 PM	Helium MFC set to  0.000000
10/24/2011	7:15:49 PM	H2 MFC set to  0.000000
10/24/2011	7:15:49 PM	BCl3 MFC set to  0.000000
10/24/2011	7:15:49 PM	PHl3 MFC set to  0.000000
10/24/2011	7:15:49 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:15:49 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:15:50 PM	Tube furnace set to 0
10/24/2011	7:16:20 PM	H2 valve closed
10/24/2011	7:16:20 PM	BCl3 valve closed
10/24/2011	7:16:20 PM	PH3 valve closed
10/24/2011	7:16:20 PM	SiCl4 pre valve closed
10/24/2011	7:16:20 PM	SiCl4 post valve closed
10/24/2011	7:16:20 PM	Bypass valve closed
10/24/2011	7:16:20 PM	Bubbler valve closed
10/24/2011	7:16:20 PM	Helium valve opened
10/24/2011	7:16:20 PM	Main Vac valve opened
10/24/2011	7:16:20 PM	Helium MFC set to  20.000000
10/24/2011	7:16:20 PM	H2 MFC set to  0.000000
10/24/2011	7:16:20 PM	BCl3 MFC set to  0.000000
10/24/2011	7:16:20 PM	PHl3 MFC set to  0.000000
10/24/2011	7:16:20 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:16:20 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:16:20 PM	Tube furnace set to 0
10/24/2011	7:16:50 PM	Helium valve closed
10/24/2011	7:16:50 PM	H2 valve closed
10/24/2011	7:16:50 PM	BCl3 valve closed
10/24/2011	7:16:50 PM	PH3 valve closed
10/24/2011	7:16:50 PM	SiCl4 pre valve closed
10/24/2011	7:16:50 PM	SiCl4 post valve closed
10/24/2011	7:16:50 PM	Bypass valve closed
10/24/2011	7:16:50 PM	Bubbler valve closed
10/24/2011	7:16:50 PM	Main Vac valve opened
10/24/2011	7:16:50 PM	Helium MFC set to  0.000000
10/24/2011	7:16:50 PM	H2 MFC set to  0.000000
10/24/2011	7:16:50 PM	BCl3 MFC set to  0.000000
10/24/2011	7:16:50 PM	PHl3 MFC set to  0.000000
10/24/2011	7:16:50 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:16:50 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:16:50 PM	Tube furnace set to 0
10/24/2011	7:17:20 PM	H2 valve closed
10/24/2011	7:17:20 PM	BCl3 valve closed
10/24/2011	7:17:20 PM	PH3 valve closed
10/24/2011	7:17:20 PM	SiCl4 pre valve closed
10/24/2011	7:17:20 PM	SiCl4 post valve closed
10/24/2011	7:17:20 PM	Bypass valve closed
10/24/2011	7:17:20 PM	Bubbler valve closed
10/24/2011	7:17:20 PM	Helium valve opened
10/24/2011	7:17:20 PM	Main Vac valve opened
10/24/2011	7:17:20 PM	Helium MFC set to  20.000000
10/24/2011	7:17:20 PM	H2 MFC set to  0.000000
10/24/2011	7:17:20 PM	BCl3 MFC set to  0.000000
10/24/2011	7:17:20 PM	PHl3 MFC set to  0.000000
10/24/2011	7:17:20 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:17:20 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:17:20 PM	Tube furnace set to 0
10/24/2011	7:17:50 PM	Helium valve closed
10/24/2011	7:17:50 PM	H2 valve closed
10/24/2011	7:17:50 PM	BCl3 valve closed
10/24/2011	7:17:50 PM	PH3 valve closed
10/24/2011	7:17:50 PM	SiCl4 pre valve closed
10/24/2011	7:17:50 PM	SiCl4 post valve closed
10/24/2011	7:17:50 PM	Bypass valve closed
10/24/2011	7:17:50 PM	Bubbler valve closed
10/24/2011	7:17:50 PM	Main Vac valve opened
10/24/2011	7:17:50 PM	Helium MFC set to  0.000000
10/24/2011	7:17:50 PM	H2 MFC set to  0.000000
10/24/2011	7:17:50 PM	BCl3 MFC set to  0.000000
10/24/2011	7:17:50 PM	PHl3 MFC set to  0.000000
10/24/2011	7:17:50 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:17:50 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:17:51 PM	Tube furnace set to 0
10/24/2011	7:18:21 PM	H2 valve closed
10/24/2011	7:18:21 PM	BCl3 valve closed
10/24/2011	7:18:21 PM	PH3 valve closed
10/24/2011	7:18:21 PM	SiCl4 pre valve closed
10/24/2011	7:18:21 PM	SiCl4 post valve closed
10/24/2011	7:18:21 PM	Bypass valve closed
10/24/2011	7:18:21 PM	Bubbler valve closed
10/24/2011	7:18:21 PM	Helium valve opened
10/24/2011	7:18:21 PM	Main Vac valve opened
10/24/2011	7:18:21 PM	Helium MFC set to  20.000000
10/24/2011	7:18:21 PM	H2 MFC set to  0.000000
10/24/2011	7:18:21 PM	BCl3 MFC set to  0.000000
10/24/2011	7:18:21 PM	PHl3 MFC set to  0.000000
10/24/2011	7:18:21 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:18:21 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:18:21 PM	Tube furnace set to 0
10/24/2011	7:18:51 PM	Helium valve closed
10/24/2011	7:18:51 PM	H2 valve closed
10/24/2011	7:18:51 PM	BCl3 valve closed
10/24/2011	7:18:51 PM	PH3 valve closed
10/24/2011	7:18:51 PM	SiCl4 pre valve closed
10/24/2011	7:18:51 PM	SiCl4 post valve closed
10/24/2011	7:18:51 PM	Bypass valve closed
10/24/2011	7:18:51 PM	Bubbler valve closed
10/24/2011	7:18:51 PM	Main Vac valve opened
10/24/2011	7:18:51 PM	Helium MFC set to  0.000000
10/24/2011	7:18:51 PM	H2 MFC set to  0.000000
10/24/2011	7:18:51 PM	BCl3 MFC set to  0.000000
10/24/2011	7:18:51 PM	PHl3 MFC set to  0.000000
10/24/2011	7:18:51 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:18:51 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:18:51 PM	Tube furnace set to 0
10/24/2011	7:18:52 PM	Run finished at 7:18 PM
10/24/2011	7:18:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/24/2011	7:45:39 PM	Recipe started at 7:45 PM
10/24/2011	7:45:39 PM	Helium valve closed
10/24/2011	7:45:39 PM	H2 valve closed
10/24/2011	7:45:39 PM	BCl3 valve closed
10/24/2011	7:45:39 PM	PH3 valve closed
10/24/2011	7:45:39 PM	SiCl4 pre valve closed
10/24/2011	7:45:39 PM	SiCl4 post valve closed
10/24/2011	7:45:39 PM	Main Vac valve closed
10/24/2011	7:45:39 PM	Bypass valve closed
10/24/2011	7:45:39 PM	Bubbler valve closed
10/24/2011	7:45:39 PM	Helium MFC set to  0.000000
10/24/2011	7:45:39 PM	H2 MFC set to  0.000000
10/24/2011	7:45:39 PM	BCl3 MFC set to  0.000000
10/24/2011	7:45:39 PM	PHl3 MFC set to  0.000000
10/24/2011	7:45:39 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:45:39 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:45:39 PM	Tube furnace set to 0
10/24/2011	7:45:42 PM	Helium valve closed
10/24/2011	7:45:42 PM	BCl3 valve closed
10/24/2011	7:45:42 PM	PH3 valve closed
10/24/2011	7:45:42 PM	SiCl4 pre valve closed
10/24/2011	7:45:42 PM	SiCl4 post valve closed
10/24/2011	7:45:42 PM	Main Vac valve closed
10/24/2011	7:45:42 PM	Bypass valve closed
10/24/2011	7:45:42 PM	Bubbler valve closed
10/24/2011	7:45:42 PM	H2 valve opened
10/24/2011	7:45:42 PM	Helium MFC set to  0.000000
10/24/2011	7:45:42 PM	H2 MFC set to  500.000000
10/24/2011	7:45:42 PM	BCl3 MFC set to  0.000000
10/24/2011	7:45:42 PM	PHl3 MFC set to  0.000000
10/24/2011	7:45:42 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:45:42 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:45:42 PM	Tube furnace set to 0
10/24/2011	7:46:49 PM	Helium valve closed
10/24/2011	7:46:49 PM	BCl3 valve closed
10/24/2011	7:46:49 PM	PH3 valve closed
10/24/2011	7:46:49 PM	SiCl4 pre valve closed
10/24/2011	7:46:49 PM	SiCl4 post valve closed
10/24/2011	7:46:49 PM	Main Vac valve closed
10/24/2011	7:46:49 PM	Bypass valve closed
10/24/2011	7:46:49 PM	H2 valve opened
10/24/2011	7:46:49 PM	Bubbler valve opened
10/24/2011	7:46:49 PM	Helium MFC set to  0.000000
10/24/2011	7:46:49 PM	H2 MFC set to  500.000000
10/24/2011	7:46:49 PM	BCl3 MFC set to  0.000000
10/24/2011	7:46:49 PM	PHl3 MFC set to  0.000000
10/24/2011	7:46:49 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:46:49 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:46:49 PM	Tube furnace set to 0
10/24/2011	7:46:50 PM	Helium valve closed
10/24/2011	7:46:50 PM	BCl3 valve closed
10/24/2011	7:46:50 PM	PH3 valve closed
10/24/2011	7:46:50 PM	SiCl4 pre valve closed
10/24/2011	7:46:50 PM	SiCl4 post valve closed
10/24/2011	7:46:50 PM	Main Vac valve closed
10/24/2011	7:46:50 PM	Bypass valve closed
10/24/2011	7:46:50 PM	H2 valve opened
10/24/2011	7:46:50 PM	Bubbler valve opened
10/24/2011	7:46:50 PM	Helium MFC set to  0.000000
10/24/2011	7:46:50 PM	H2 MFC set to  500.000000
10/24/2011	7:46:50 PM	BCl3 MFC set to  0.000000
10/24/2011	7:46:50 PM	PHl3 MFC set to  0.000000
10/24/2011	7:46:50 PM	SiCl4 MFC set to  0.000000
10/24/2011	7:46:50 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	7:46:50 PM	Tube furnace set to 1010
10/24/2011	8:06:50 PM	Helium valve closed
10/24/2011	8:06:50 PM	BCl3 valve closed
10/24/2011	8:06:50 PM	PH3 valve closed
10/24/2011	8:06:50 PM	Main Vac valve closed
10/24/2011	8:06:50 PM	Bypass valve closed
10/24/2011	8:06:50 PM	H2 valve opened
10/24/2011	8:06:50 PM	SiCl4 pre valve opened
10/24/2011	8:06:50 PM	SiCl4 post valve opened
10/24/2011	8:06:50 PM	Bubbler valve opened
10/24/2011	8:06:50 PM	Helium MFC set to  0.000000
10/24/2011	8:06:50 PM	H2 MFC set to  500.000000
10/24/2011	8:06:50 PM	BCl3 MFC set to  0.000000
10/24/2011	8:06:50 PM	PHl3 MFC set to  0.000000
10/24/2011	8:06:50 PM	SiCl4 MFC set to  34.000000
10/24/2011	8:06:50 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:06:51 PM	Tube furnace set to 1010
10/24/2011	8:16:51 PM	H2 valve closed
10/24/2011	8:16:51 PM	BCl3 valve closed
10/24/2011	8:16:51 PM	PH3 valve closed
10/24/2011	8:16:51 PM	SiCl4 pre valve closed
10/24/2011	8:16:51 PM	SiCl4 post valve closed
10/24/2011	8:16:51 PM	Main Vac valve closed
10/24/2011	8:16:51 PM	Bypass valve closed
10/24/2011	8:16:51 PM	Helium valve opened
10/24/2011	8:16:51 PM	Bubbler valve opened
10/24/2011	8:16:51 PM	Helium MFC set to  500.000000
10/24/2011	8:16:51 PM	H2 MFC set to  0.000000
10/24/2011	8:16:51 PM	BCl3 MFC set to  0.000000
10/24/2011	8:16:51 PM	PHl3 MFC set to  0.000000
10/24/2011	8:16:51 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:16:51 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:16:51 PM	Tube furnace set to 0
10/24/2011	8:31:33 PM	Helium valve closed
10/24/2011	8:31:33 PM	H2 valve closed
10/24/2011	8:31:33 PM	BCl3 valve closed
10/24/2011	8:31:33 PM	PH3 valve closed
10/24/2011	8:31:33 PM	SiCl4 pre valve closed
10/24/2011	8:31:33 PM	SiCl4 post valve closed
10/24/2011	8:31:33 PM	Main Vac valve closed
10/24/2011	8:31:33 PM	Bubbler valve closed
10/24/2011	8:31:33 PM	Bypass valve closed
10/24/2011	8:31:33 PM	Helium MFC set to  0.000000
10/24/2011	8:31:33 PM	H2 MFC set to  0.000000
10/24/2011	8:31:33 PM	BCl3 MFC set to  0.000000
10/24/2011	8:31:33 PM	PHl3 MFC set to  0.000000
10/24/2011	8:31:33 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:31:33 PM	Bypass solenoid MFC set to  760.000000
10/24/2011	8:31:33 PM	Tube furnace set to 0
10/24/2011	8:31:33 PM	Baratron reads 744.380805 Torr and NaOH valve is open.  Emergency exit.
10/24/2011	8:35:05 PM	Run aborted at 8:35 PM
10/24/2011	8:35:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	8:35:08 PM	Recipe started at 8:35 PM
10/24/2011	8:35:08 PM	Helium valve closed
10/24/2011	8:35:08 PM	H2 valve closed
10/24/2011	8:35:08 PM	BCl3 valve closed
10/24/2011	8:35:08 PM	PH3 valve closed
10/24/2011	8:35:08 PM	SiCl4 pre valve closed
10/24/2011	8:35:08 PM	SiCl4 post valve closed
10/24/2011	8:35:08 PM	Main Vac valve closed
10/24/2011	8:35:08 PM	Bubbler valve closed
10/24/2011	8:35:08 PM	Bypass valve opened
10/24/2011	8:35:08 PM	Helium MFC set to  0.000000
10/24/2011	8:35:08 PM	H2 MFC set to  0.000000
10/24/2011	8:35:08 PM	BCl3 MFC set to  0.000000
10/24/2011	8:35:08 PM	PHl3 MFC set to  0.000000
10/24/2011	8:35:08 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:35:08 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:35:08 PM	Tube furnace set to 0
10/24/2011	8:36:12 PM	Helium valve closed
10/24/2011	8:36:12 PM	H2 valve closed
10/24/2011	8:36:12 PM	BCl3 valve closed
10/24/2011	8:36:12 PM	PH3 valve closed
10/24/2011	8:36:12 PM	SiCl4 pre valve closed
10/24/2011	8:36:12 PM	SiCl4 post valve closed
10/24/2011	8:36:12 PM	Main Vac valve closed
10/24/2011	8:36:12 PM	Bubbler valve closed
10/24/2011	8:36:12 PM	Bypass valve opened
10/24/2011	8:36:12 PM	Helium MFC set to  0.000000
10/24/2011	8:36:12 PM	H2 MFC set to  0.000000
10/24/2011	8:36:12 PM	BCl3 MFC set to  0.000000
10/24/2011	8:36:12 PM	PHl3 MFC set to  0.000000
10/24/2011	8:36:12 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:36:12 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:36:12 PM	Tube furnace set to 0
10/24/2011	8:37:12 PM	Helium valve closed
10/24/2011	8:37:12 PM	H2 valve closed
10/24/2011	8:37:12 PM	BCl3 valve closed
10/24/2011	8:37:12 PM	PH3 valve closed
10/24/2011	8:37:12 PM	SiCl4 pre valve closed
10/24/2011	8:37:12 PM	SiCl4 post valve closed
10/24/2011	8:37:12 PM	Bypass valve closed
10/24/2011	8:37:12 PM	Bubbler valve closed
10/24/2011	8:37:12 PM	Main Vac valve opened
10/24/2011	8:37:12 PM	Helium MFC set to  0.000000
10/24/2011	8:37:12 PM	H2 MFC set to  0.000000
10/24/2011	8:37:12 PM	BCl3 MFC set to  0.000000
10/24/2011	8:37:12 PM	PHl3 MFC set to  0.000000
10/24/2011	8:37:12 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:37:12 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:37:12 PM	Tube furnace set to 0
10/24/2011	8:37:13 PM	Run finished at 8:37 PM
10/24/2011	8:37:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/24/2011	8:39:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/24/2011	8:39:49 PM	Recipe started at 8:39 PM
10/24/2011	8:39:49 PM	Helium valve closed
10/24/2011	8:39:49 PM	H2 valve closed
10/24/2011	8:39:49 PM	BCl3 valve closed
10/24/2011	8:39:49 PM	PH3 valve closed
10/24/2011	8:39:49 PM	SiCl4 pre valve closed
10/24/2011	8:39:49 PM	SiCl4 post valve closed
10/24/2011	8:39:49 PM	Main Vac valve closed
10/24/2011	8:39:49 PM	Bubbler valve closed
10/24/2011	8:39:49 PM	Bypass valve opened
10/24/2011	8:39:49 PM	Helium MFC set to  0.000000
10/24/2011	8:39:49 PM	H2 MFC set to  0.000000
10/24/2011	8:39:49 PM	BCl3 MFC set to  0.000000
10/24/2011	8:39:49 PM	PHl3 MFC set to  0.000000
10/24/2011	8:39:49 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:39:49 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:39:49 PM	Tube furnace set to 0
10/24/2011	8:39:49 PM	Helium valve closed
10/24/2011	8:39:49 PM	H2 valve closed
10/24/2011	8:39:49 PM	BCl3 valve closed
10/24/2011	8:39:49 PM	PH3 valve closed
10/24/2011	8:39:49 PM	SiCl4 pre valve closed
10/24/2011	8:39:49 PM	SiCl4 post valve closed
10/24/2011	8:39:49 PM	Main Vac valve closed
10/24/2011	8:39:49 PM	Bubbler valve closed
10/24/2011	8:39:49 PM	Bypass valve opened
10/24/2011	8:39:49 PM	Helium MFC set to  0.000000
10/24/2011	8:39:49 PM	H2 MFC set to  0.000000
10/24/2011	8:39:49 PM	BCl3 MFC set to  0.000000
10/24/2011	8:39:49 PM	PHl3 MFC set to  0.000000
10/24/2011	8:39:49 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:39:49 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:39:50 PM	Tube furnace set to 0
10/24/2011	8:40:20 PM	Helium valve closed
10/24/2011	8:40:20 PM	H2 valve closed
10/24/2011	8:40:20 PM	BCl3 valve closed
10/24/2011	8:40:20 PM	PH3 valve closed
10/24/2011	8:40:20 PM	SiCl4 pre valve closed
10/24/2011	8:40:20 PM	SiCl4 post valve closed
10/24/2011	8:40:20 PM	Bypass valve closed
10/24/2011	8:40:20 PM	Bubbler valve closed
10/24/2011	8:40:20 PM	Main Vac valve opened
10/24/2011	8:40:20 PM	Helium MFC set to  0.000000
10/24/2011	8:40:20 PM	H2 MFC set to  0.000000
10/24/2011	8:40:20 PM	BCl3 MFC set to  0.000000
10/24/2011	8:40:20 PM	PHl3 MFC set to  0.000000
10/24/2011	8:40:20 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:40:20 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:40:20 PM	Tube furnace set to 0
10/24/2011	8:40:50 PM	H2 valve closed
10/24/2011	8:40:50 PM	BCl3 valve closed
10/24/2011	8:40:50 PM	PH3 valve closed
10/24/2011	8:40:50 PM	SiCl4 pre valve closed
10/24/2011	8:40:50 PM	SiCl4 post valve closed
10/24/2011	8:40:50 PM	Bypass valve closed
10/24/2011	8:40:50 PM	Bubbler valve closed
10/24/2011	8:40:50 PM	Helium valve opened
10/24/2011	8:40:50 PM	Main Vac valve opened
10/24/2011	8:40:50 PM	Helium MFC set to  20.000000
10/24/2011	8:40:50 PM	H2 MFC set to  0.000000
10/24/2011	8:40:50 PM	BCl3 MFC set to  0.000000
10/24/2011	8:40:50 PM	PHl3 MFC set to  0.000000
10/24/2011	8:40:50 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:40:50 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:40:50 PM	Tube furnace set to 0
10/24/2011	8:41:20 PM	Helium valve closed
10/24/2011	8:41:20 PM	H2 valve closed
10/24/2011	8:41:20 PM	BCl3 valve closed
10/24/2011	8:41:20 PM	PH3 valve closed
10/24/2011	8:41:20 PM	SiCl4 pre valve closed
10/24/2011	8:41:20 PM	SiCl4 post valve closed
10/24/2011	8:41:20 PM	Bypass valve closed
10/24/2011	8:41:20 PM	Bubbler valve closed
10/24/2011	8:41:20 PM	Main Vac valve opened
10/24/2011	8:41:20 PM	Helium MFC set to  0.000000
10/24/2011	8:41:20 PM	H2 MFC set to  0.000000
10/24/2011	8:41:20 PM	BCl3 MFC set to  0.000000
10/24/2011	8:41:20 PM	PHl3 MFC set to  0.000000
10/24/2011	8:41:20 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:41:20 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:41:20 PM	Tube furnace set to 0
10/24/2011	8:41:50 PM	H2 valve closed
10/24/2011	8:41:50 PM	BCl3 valve closed
10/24/2011	8:41:50 PM	PH3 valve closed
10/24/2011	8:41:50 PM	SiCl4 pre valve closed
10/24/2011	8:41:50 PM	SiCl4 post valve closed
10/24/2011	8:41:50 PM	Bypass valve closed
10/24/2011	8:41:50 PM	Bubbler valve closed
10/24/2011	8:41:50 PM	Helium valve opened
10/24/2011	8:41:50 PM	Main Vac valve opened
10/24/2011	8:41:50 PM	Helium MFC set to  20.000000
10/24/2011	8:41:50 PM	H2 MFC set to  0.000000
10/24/2011	8:41:50 PM	BCl3 MFC set to  0.000000
10/24/2011	8:41:50 PM	PHl3 MFC set to  0.000000
10/24/2011	8:41:50 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:41:50 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:41:50 PM	Tube furnace set to 0
10/24/2011	8:42:20 PM	Helium valve closed
10/24/2011	8:42:20 PM	H2 valve closed
10/24/2011	8:42:20 PM	BCl3 valve closed
10/24/2011	8:42:20 PM	PH3 valve closed
10/24/2011	8:42:20 PM	SiCl4 pre valve closed
10/24/2011	8:42:20 PM	SiCl4 post valve closed
10/24/2011	8:42:20 PM	Bypass valve closed
10/24/2011	8:42:20 PM	Bubbler valve closed
10/24/2011	8:42:20 PM	Main Vac valve opened
10/24/2011	8:42:20 PM	Helium MFC set to  0.000000
10/24/2011	8:42:20 PM	H2 MFC set to  0.000000
10/24/2011	8:42:20 PM	BCl3 MFC set to  0.000000
10/24/2011	8:42:20 PM	PHl3 MFC set to  0.000000
10/24/2011	8:42:20 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:42:20 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:42:21 PM	Tube furnace set to 0
10/24/2011	8:42:51 PM	H2 valve closed
10/24/2011	8:42:51 PM	BCl3 valve closed
10/24/2011	8:42:51 PM	PH3 valve closed
10/24/2011	8:42:51 PM	SiCl4 pre valve closed
10/24/2011	8:42:51 PM	SiCl4 post valve closed
10/24/2011	8:42:51 PM	Bypass valve closed
10/24/2011	8:42:51 PM	Bubbler valve closed
10/24/2011	8:42:51 PM	Helium valve opened
10/24/2011	8:42:51 PM	Main Vac valve opened
10/24/2011	8:42:51 PM	Helium MFC set to  20.000000
10/24/2011	8:42:51 PM	H2 MFC set to  0.000000
10/24/2011	8:42:51 PM	BCl3 MFC set to  0.000000
10/24/2011	8:42:51 PM	PHl3 MFC set to  0.000000
10/24/2011	8:42:51 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:42:51 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:42:51 PM	Tube furnace set to 0
10/24/2011	8:43:21 PM	Helium valve closed
10/24/2011	8:43:21 PM	H2 valve closed
10/24/2011	8:43:21 PM	BCl3 valve closed
10/24/2011	8:43:21 PM	PH3 valve closed
10/24/2011	8:43:21 PM	SiCl4 pre valve closed
10/24/2011	8:43:21 PM	SiCl4 post valve closed
10/24/2011	8:43:21 PM	Bypass valve closed
10/24/2011	8:43:21 PM	Bubbler valve closed
10/24/2011	8:43:21 PM	Main Vac valve opened
10/24/2011	8:43:21 PM	Helium MFC set to  0.000000
10/24/2011	8:43:21 PM	H2 MFC set to  0.000000
10/24/2011	8:43:21 PM	BCl3 MFC set to  0.000000
10/24/2011	8:43:21 PM	PHl3 MFC set to  0.000000
10/24/2011	8:43:21 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:43:21 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:43:21 PM	Tube furnace set to 0
10/24/2011	8:43:51 PM	H2 valve closed
10/24/2011	8:43:51 PM	BCl3 valve closed
10/24/2011	8:43:51 PM	PH3 valve closed
10/24/2011	8:43:51 PM	SiCl4 pre valve closed
10/24/2011	8:43:51 PM	SiCl4 post valve closed
10/24/2011	8:43:51 PM	Bypass valve closed
10/24/2011	8:43:51 PM	Bubbler valve closed
10/24/2011	8:43:51 PM	Helium valve opened
10/24/2011	8:43:51 PM	Main Vac valve opened
10/24/2011	8:43:51 PM	Helium MFC set to  20.000000
10/24/2011	8:43:51 PM	H2 MFC set to  0.000000
10/24/2011	8:43:51 PM	BCl3 MFC set to  0.000000
10/24/2011	8:43:51 PM	PHl3 MFC set to  0.000000
10/24/2011	8:43:51 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:43:51 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:43:51 PM	Tube furnace set to 0
10/24/2011	8:44:21 PM	Helium valve closed
10/24/2011	8:44:21 PM	H2 valve closed
10/24/2011	8:44:21 PM	BCl3 valve closed
10/24/2011	8:44:21 PM	PH3 valve closed
10/24/2011	8:44:21 PM	SiCl4 pre valve closed
10/24/2011	8:44:21 PM	SiCl4 post valve closed
10/24/2011	8:44:21 PM	Bypass valve closed
10/24/2011	8:44:21 PM	Bubbler valve closed
10/24/2011	8:44:21 PM	Main Vac valve opened
10/24/2011	8:44:21 PM	Helium MFC set to  0.000000
10/24/2011	8:44:21 PM	H2 MFC set to  0.000000
10/24/2011	8:44:21 PM	BCl3 MFC set to  0.000000
10/24/2011	8:44:21 PM	PHl3 MFC set to  0.000000
10/24/2011	8:44:21 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:44:21 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:44:21 PM	Tube furnace set to 0
10/24/2011	8:44:51 PM	H2 valve closed
10/24/2011	8:44:51 PM	BCl3 valve closed
10/24/2011	8:44:51 PM	PH3 valve closed
10/24/2011	8:44:51 PM	SiCl4 pre valve closed
10/24/2011	8:44:51 PM	SiCl4 post valve closed
10/24/2011	8:44:51 PM	Bypass valve closed
10/24/2011	8:44:51 PM	Bubbler valve closed
10/24/2011	8:44:51 PM	Helium valve opened
10/24/2011	8:44:51 PM	Main Vac valve opened
10/24/2011	8:44:51 PM	Helium MFC set to  20.000000
10/24/2011	8:44:51 PM	H2 MFC set to  0.000000
10/24/2011	8:44:51 PM	BCl3 MFC set to  0.000000
10/24/2011	8:44:51 PM	PHl3 MFC set to  0.000000
10/24/2011	8:44:51 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:44:51 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:44:51 PM	Tube furnace set to 0
10/24/2011	8:45:22 PM	Helium valve closed
10/24/2011	8:45:22 PM	H2 valve closed
10/24/2011	8:45:22 PM	BCl3 valve closed
10/24/2011	8:45:22 PM	PH3 valve closed
10/24/2011	8:45:22 PM	SiCl4 pre valve closed
10/24/2011	8:45:22 PM	SiCl4 post valve closed
10/24/2011	8:45:22 PM	Bypass valve closed
10/24/2011	8:45:22 PM	Bubbler valve closed
10/24/2011	8:45:22 PM	Main Vac valve opened
10/24/2011	8:45:22 PM	Helium MFC set to  0.000000
10/24/2011	8:45:22 PM	H2 MFC set to  0.000000
10/24/2011	8:45:22 PM	BCl3 MFC set to  0.000000
10/24/2011	8:45:22 PM	PHl3 MFC set to  0.000000
10/24/2011	8:45:22 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:45:22 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:45:22 PM	Tube furnace set to 0
10/24/2011	8:45:52 PM	H2 valve closed
10/24/2011	8:45:52 PM	BCl3 valve closed
10/24/2011	8:45:52 PM	PH3 valve closed
10/24/2011	8:45:52 PM	SiCl4 pre valve closed
10/24/2011	8:45:52 PM	SiCl4 post valve closed
10/24/2011	8:45:52 PM	Bypass valve closed
10/24/2011	8:45:52 PM	Bubbler valve closed
10/24/2011	8:45:52 PM	Helium valve opened
10/24/2011	8:45:52 PM	Main Vac valve opened
10/24/2011	8:45:52 PM	Helium MFC set to  20.000000
10/24/2011	8:45:52 PM	H2 MFC set to  0.000000
10/24/2011	8:45:52 PM	BCl3 MFC set to  0.000000
10/24/2011	8:45:52 PM	PHl3 MFC set to  0.000000
10/24/2011	8:45:52 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:45:52 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:45:52 PM	Tube furnace set to 0
10/24/2011	8:46:22 PM	Helium valve closed
10/24/2011	8:46:22 PM	H2 valve closed
10/24/2011	8:46:22 PM	BCl3 valve closed
10/24/2011	8:46:22 PM	PH3 valve closed
10/24/2011	8:46:22 PM	SiCl4 pre valve closed
10/24/2011	8:46:22 PM	SiCl4 post valve closed
10/24/2011	8:46:22 PM	Bypass valve closed
10/24/2011	8:46:22 PM	Bubbler valve closed
10/24/2011	8:46:22 PM	Main Vac valve opened
10/24/2011	8:46:22 PM	Helium MFC set to  0.000000
10/24/2011	8:46:22 PM	H2 MFC set to  0.000000
10/24/2011	8:46:22 PM	BCl3 MFC set to  0.000000
10/24/2011	8:46:22 PM	PHl3 MFC set to  0.000000
10/24/2011	8:46:22 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:46:22 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:46:22 PM	Tube furnace set to 0
10/24/2011	8:46:52 PM	H2 valve closed
10/24/2011	8:46:52 PM	BCl3 valve closed
10/24/2011	8:46:52 PM	PH3 valve closed
10/24/2011	8:46:52 PM	SiCl4 pre valve closed
10/24/2011	8:46:52 PM	SiCl4 post valve closed
10/24/2011	8:46:52 PM	Bypass valve closed
10/24/2011	8:46:52 PM	Bubbler valve closed
10/24/2011	8:46:52 PM	Helium valve opened
10/24/2011	8:46:52 PM	Main Vac valve opened
10/24/2011	8:46:52 PM	Helium MFC set to  20.000000
10/24/2011	8:46:52 PM	H2 MFC set to  0.000000
10/24/2011	8:46:52 PM	BCl3 MFC set to  0.000000
10/24/2011	8:46:52 PM	PHl3 MFC set to  0.000000
10/24/2011	8:46:52 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:46:52 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:46:52 PM	Tube furnace set to 0
10/24/2011	8:47:22 PM	Helium valve closed
10/24/2011	8:47:22 PM	H2 valve closed
10/24/2011	8:47:22 PM	BCl3 valve closed
10/24/2011	8:47:22 PM	PH3 valve closed
10/24/2011	8:47:22 PM	SiCl4 pre valve closed
10/24/2011	8:47:22 PM	SiCl4 post valve closed
10/24/2011	8:47:22 PM	Bypass valve closed
10/24/2011	8:47:22 PM	Bubbler valve closed
10/24/2011	8:47:22 PM	Main Vac valve opened
10/24/2011	8:47:22 PM	Helium MFC set to  0.000000
10/24/2011	8:47:22 PM	H2 MFC set to  0.000000
10/24/2011	8:47:22 PM	BCl3 MFC set to  0.000000
10/24/2011	8:47:22 PM	PHl3 MFC set to  0.000000
10/24/2011	8:47:22 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:47:22 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:47:22 PM	Tube furnace set to 0
10/24/2011	8:47:52 PM	H2 valve closed
10/24/2011	8:47:52 PM	BCl3 valve closed
10/24/2011	8:47:52 PM	PH3 valve closed
10/24/2011	8:47:52 PM	SiCl4 pre valve closed
10/24/2011	8:47:52 PM	SiCl4 post valve closed
10/24/2011	8:47:53 PM	Bypass valve closed
10/24/2011	8:47:53 PM	Bubbler valve closed
10/24/2011	8:47:53 PM	Helium valve opened
10/24/2011	8:47:53 PM	Main Vac valve opened
10/24/2011	8:47:53 PM	Helium MFC set to  20.000000
10/24/2011	8:47:53 PM	H2 MFC set to  0.000000
10/24/2011	8:47:53 PM	BCl3 MFC set to  0.000000
10/24/2011	8:47:53 PM	PHl3 MFC set to  0.000000
10/24/2011	8:47:53 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:47:53 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:47:53 PM	Tube furnace set to 0
10/24/2011	8:48:23 PM	Helium valve closed
10/24/2011	8:48:23 PM	H2 valve closed
10/24/2011	8:48:23 PM	BCl3 valve closed
10/24/2011	8:48:23 PM	PH3 valve closed
10/24/2011	8:48:23 PM	SiCl4 pre valve closed
10/24/2011	8:48:23 PM	SiCl4 post valve closed
10/24/2011	8:48:23 PM	Bypass valve closed
10/24/2011	8:48:23 PM	Bubbler valve closed
10/24/2011	8:48:23 PM	Main Vac valve opened
10/24/2011	8:48:23 PM	Helium MFC set to  0.000000
10/24/2011	8:48:23 PM	H2 MFC set to  0.000000
10/24/2011	8:48:23 PM	BCl3 MFC set to  0.000000
10/24/2011	8:48:23 PM	PHl3 MFC set to  0.000000
10/24/2011	8:48:23 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:48:23 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:48:23 PM	Tube furnace set to 0
10/24/2011	8:48:53 PM	H2 valve closed
10/24/2011	8:48:53 PM	BCl3 valve closed
10/24/2011	8:48:53 PM	PH3 valve closed
10/24/2011	8:48:53 PM	SiCl4 pre valve closed
10/24/2011	8:48:53 PM	SiCl4 post valve closed
10/24/2011	8:48:53 PM	Bypass valve closed
10/24/2011	8:48:53 PM	Bubbler valve closed
10/24/2011	8:48:53 PM	Helium valve opened
10/24/2011	8:48:53 PM	Main Vac valve opened
10/24/2011	8:48:53 PM	Helium MFC set to  20.000000
10/24/2011	8:48:53 PM	H2 MFC set to  0.000000
10/24/2011	8:48:53 PM	BCl3 MFC set to  0.000000
10/24/2011	8:48:53 PM	PHl3 MFC set to  0.000000
10/24/2011	8:48:53 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:48:53 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:48:53 PM	Tube furnace set to 0
10/24/2011	8:49:23 PM	Helium valve closed
10/24/2011	8:49:23 PM	H2 valve closed
10/24/2011	8:49:23 PM	BCl3 valve closed
10/24/2011	8:49:23 PM	PH3 valve closed
10/24/2011	8:49:23 PM	SiCl4 pre valve closed
10/24/2011	8:49:23 PM	SiCl4 post valve closed
10/24/2011	8:49:23 PM	Bypass valve closed
10/24/2011	8:49:23 PM	Bubbler valve closed
10/24/2011	8:49:23 PM	Main Vac valve opened
10/24/2011	8:49:23 PM	Helium MFC set to  0.000000
10/24/2011	8:49:23 PM	H2 MFC set to  0.000000
10/24/2011	8:49:23 PM	BCl3 MFC set to  0.000000
10/24/2011	8:49:23 PM	PHl3 MFC set to  0.000000
10/24/2011	8:49:23 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:49:23 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:49:23 PM	Tube furnace set to 0
10/24/2011	8:49:53 PM	H2 valve closed
10/24/2011	8:49:53 PM	BCl3 valve closed
10/24/2011	8:49:53 PM	PH3 valve closed
10/24/2011	8:49:53 PM	SiCl4 pre valve closed
10/24/2011	8:49:53 PM	SiCl4 post valve closed
10/24/2011	8:49:53 PM	Bypass valve closed
10/24/2011	8:49:53 PM	Bubbler valve closed
10/24/2011	8:49:53 PM	Helium valve opened
10/24/2011	8:49:53 PM	Main Vac valve opened
10/24/2011	8:49:53 PM	Helium MFC set to  20.000000
10/24/2011	8:49:53 PM	H2 MFC set to  0.000000
10/24/2011	8:49:53 PM	BCl3 MFC set to  0.000000
10/24/2011	8:49:53 PM	PHl3 MFC set to  0.000000
10/24/2011	8:49:53 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:49:53 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:49:54 PM	Tube furnace set to 0
10/24/2011	8:50:24 PM	Helium valve closed
10/24/2011	8:50:24 PM	H2 valve closed
10/24/2011	8:50:24 PM	BCl3 valve closed
10/24/2011	8:50:24 PM	PH3 valve closed
10/24/2011	8:50:24 PM	SiCl4 pre valve closed
10/24/2011	8:50:24 PM	SiCl4 post valve closed
10/24/2011	8:50:24 PM	Bypass valve closed
10/24/2011	8:50:24 PM	Bubbler valve closed
10/24/2011	8:50:24 PM	Main Vac valve opened
10/24/2011	8:50:24 PM	Helium MFC set to  0.000000
10/24/2011	8:50:24 PM	H2 MFC set to  0.000000
10/24/2011	8:50:24 PM	BCl3 MFC set to  0.000000
10/24/2011	8:50:24 PM	PHl3 MFC set to  0.000000
10/24/2011	8:50:24 PM	SiCl4 MFC set to  0.000000
10/24/2011	8:50:24 PM	Bypass solenoid MFC set to  0.000000
10/24/2011	8:50:24 PM	Tube furnace set to 0
10/24/2011	8:50:25 PM	Run finished at 8:50 PM
10/24/2011	8:50:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
